Patent | Date |
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Process integration scheme to lower overall dielectric constant in BEoL interconnect structures Grant 9,076,844 - Bright , et al. July 7, 2 | 2015-07-07 |
Automatic dynamic baseline creation and adjustment Grant 7,899,627 - Huang , et al. March 1, 2 | 2011-03-01 |
Methods and arrangement for creating recipes using best-known methods Grant 7,542,820 - Huang , et al. June 2, 2 | 2009-06-02 |
Process Integration Scheme To Lower Overall Dielectric Constant In Beol Interconnect Structures App 20090134520 - Bright; Nicolas ;   et al. | 2009-05-28 |
Computer readable mask shrink control processor Grant 7,539,969 - Sadjadi , et al. May 26, 2 | 2009-05-26 |
Process integration scheme to lower overall dielectric constant in BEoL interconnect structures Grant 7,521,358 - Bright , et al. April 21, 2 | 2009-04-21 |
Reticle alignment and overlay for multiple reticle process Grant 7,465,525 - Sadjadi , et al. December 16, 2 | 2008-12-16 |
Methods and Arrangement for Creating Recipes Using Best-Known Methods App 20080188970 - Huang; Chung-Ho ;   et al. | 2008-08-07 |
Process integration scheme to lower overall dielectric constant in BEoL interconnect structures App 20080150138 - Bright; Nicolas ;   et al. | 2008-06-26 |
Automatic Dynamic Baseline Creation And Adjustment App 20080079918 - Huang; Chung-Ho ;   et al. | 2008-04-03 |
Smart component-based management techniques in a substrate processing system Grant 7,254,510 - Benjamin , et al. August 7, 2 | 2007-08-07 |
Smart component-based management techniques in a substrate processing system Grant 7,152,011 - Benjamin , et al. December 19, 2 | 2006-12-19 |
Smart component-based management techniques in a substrate processing system App 20060271325 - Benjamin; Neil ;   et al. | 2006-11-30 |
Computer readable mask shrink control processor App 20060259886 - Sadjadi; S.M. Reza ;   et al. | 2006-11-16 |
Reticle alignment and overlay for multiple reticle process App 20060257750 - Sadjadi; S.M. Reza ;   et al. | 2006-11-16 |
Apparatus for controlling wafer temperature in chemical mechanical polishing Grant 7,029,368 - Bright , et al. April 18, 2 | 2006-04-18 |
Smart component-based management techniques in a substrate processing system App 20060047458 - Benjamin; Neil ;   et al. | 2006-03-02 |
Apparatus methods for controlling wafer temperature in chemical mechanical polishing Grant 6,984,162 - Bright , et al. January 10, 2 | 2006-01-10 |
System and method for metal residue detection and mapping within a multi-step sequence Grant 6,929,531 - Gotkis , et al. August 16, 2 | 2005-08-16 |
Apparatus methods for controlling wafer temperature in chemical mechanical polishing App 20040242124 - Bright, Nicolas ;   et al. | 2004-12-02 |
Apparatus methods for controlling wafer temperature in chemical mechanical polishing App 20040108065 - Bright, Nicolas ;   et al. | 2004-06-10 |
Apparatus and methods for controlling wafer temperature in chemical mechanical polishing Grant 6,736,720 - Bright , et al. May 18, 2 | 2004-05-18 |
System and method for metal residue detection and mapping within a multi-step sequence App 20040058620 - Gotkis, Yehiel ;   et al. | 2004-03-25 |
Apparatus and methods for controlling wafer temperature in chemical mechanical polishing App 20030119429 - Bright, Nicolas ;   et al. | 2003-06-26 |
Method and apparatus for controlling the volume of a plasma Grant 6,322,661 - Bailey, III , et al. November 27, 2 | 2001-11-27 |
Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography Grant 6,194,325 - Yang , et al. February 27, 2 | 2001-02-27 |