loadpatents
Patent applications and USPTO patent grants for BRIEN; Daniel.The latest application filed is for "apparatus for processing a wafer, and method of controlling such an apparatus".
Patent | Date |
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Apparatus For Processing A Wafer, And Method Of Controlling Such An Apparatus App 20220084848 - BRIEN; Daniel ;   et al. | 2022-03-17 |
Coated flat component in a CVD reactor Grant 11,053,586 - Kollberg , et al. July 6, 2 | 2021-07-06 |
Spin chuck with concentrated center and radial heating Grant 10,658,204 - Hill , et al. | 2020-05-19 |
Substrate treatment device Grant 10,438,823 - Brien O | 2019-10-08 |
Apparatus and radiant heating plate for processing wafer-shaped articles Grant 10,312,117 - Si , et al. | 2019-06-04 |
Spin Chuck With Concentrated Center And Radial Heating App 20190051541 - Hill; Bridget ;   et al. | 2019-02-14 |
Apparatus And Radiant Heating Plate For Processing Wafer-shaped Articles App 20180047596 - SI; Hongbo ;   et al. | 2018-02-15 |
Coated Flat Component In A Cvd Reactor App 20170152598 - KOLLBERG; Marcel ;   et al. | 2017-06-01 |
Substrate Treatment Device App 20160204008 - BRIEN; Daniel | 2016-07-14 |
MOCVD reactor having cylindrical gas inlet element Grant 8,841,221 - Brien , et al. September 23, 2 | 2014-09-23 |
Cvd Reactor App 20120156396 - Strauch; Gerhard Karl ;   et al. | 2012-06-21 |
Mocvd Reactor Having A Ceiling Panel Coupled Locally Differently To A Heat Dissipation Member App 20120003389 - Brien; Daniel ;   et al. | 2012-01-05 |
Mocvd Reactor Having Cylindrical Gas Inlet Element App 20110294283 - Brien; Daniel ;   et al. | 2011-12-01 |
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