Breukers; Marcus Joseph Elisabeth Godfried
Patent Applications and Registrations
Patent applications and USPTO patent grants for Breukers; Marcus Joseph Elisabeth Godfried.The latest application filed is for "lithographic apparatus and device manufacturing method".
- Breukers; Marcus Joseph Elisabeth Godfried - Eindhoven NL
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method Grant 10,175,587 - Butler , et al. J | 2019-01-08 |
| Lithographic Apparatus And Device Manufacturing Method App 20160299442 - BUTLER; Hans ; et al. | 2016-10-13 |
| Lithographic apparatus and device manufacturing method Grant 8,891,063 - Breukers , et al. November 18, 2 | 2014-11-18 |
| Lithographic Apparatus and Device Manufacturing Method App 20120188528 - BREUKERS; Marcus Joseph Elisabeth Godfried ; et al. | 2012-07-26 |
| Lithographic apparatus, projection apparatus and device manufacturing method Grant 7,352,436 - Butler , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus, projection apparatus and device manufacturing method App 20060285101 - Butler; Hans ; et al. | 2006-12-21 |
| Lithographic apparatus and device manufacturing method Grant 7,148,950 - Draaijer , et al. December 12, 2 | 2006-12-12 |
| Lithographic apparatus and device manufacturing method App 20050012912 - Draaijer, Evert Hendrik Jan ; et al. | 2005-01-20 |
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