loadpatents
Patent applications and USPTO patent grants for Bresan; Andre.The latest application filed is for "method for producing a reflective optical component for an euv projection exposure apparatus and component of this type".
Patent | Date |
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Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type Grant 9,541,685 - Kierey , et al. January 10, 2 | 2017-01-10 |
Method For Producing A Reflective Optical Component For An Euv Projection Exposure Apparatus And Component Of This Type App 20130335816 - Kierey; Holger ;   et al. | 2013-12-19 |
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 8,520,307 - Wolf , et al. August 27, 2 | 2013-08-27 |
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110083542 - Wolf; Oliver ;   et al. | 2011-04-14 |
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 7,880,969 - Wolf , et al. February 1, 2 | 2011-02-01 |
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090021839 - Wolf; Oliver ;   et al. | 2009-01-22 |
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