Brennan; Damian

Patent Applications and Registrations

Patent applications and USPTO patent grants for Brennan; Damian.The latest application filed is for "method, system, and apparatus for improving doping uniformity in high-tilt ion implantation".

Company Profile

0.5.6

Brennan; Damian - Gloucester MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation Grant 7,462,844 - Chang , et al. December 9, 2	2008-12-09
Technique for tuning an ion implanter system Grant 7,397,047 - Chang , et al. July 8, 2	2008-07-08
Technique for uniformity tuning in an ion implanter system Grant 7,355,188 - Olson , et al. April 8, 2	2008-04-08
Technique for uniformity tuning in an ion implanter system Grant 7,253,423 - Chang , et al. August 7, 2	2007-08-07
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation App 20070085037 - Chang; Shengwu ; et al.	2007-04-19
Technique for uniformity tuning in an ion implanter system App 20060284114 - Olson; Joseph C. ; et al.	2006-12-21
Technique for uniformity tuning in an ion implanter system App 20060266957 - Chang; Shengwu ; et al.	2006-11-30
Technique for tuning an ion implanter system App 20060249696 - Chang; Shengwu ; et al.	2006-11-09
Ion implant ion beam parallelism and direction integrity determination and adjusting App 20060169922 - Chang; Shengwu ; et al.	2006-08-03
Ion beam incidence angle and beam divergence monitor Grant 6,690,022 - Larsen , et al. February 10, 2	2004-02-10
In situ ion beam incidence angle and beam divergence monitor App 20020121889 - Larsen, Grant Kenji ; et al.	2002-09-05

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