| Patent | Date |
|---|
Micromechanical device and method for manufacturing a micromechanical device
Grant 11,261,082 - Graf , et al. March 1, 2 | 2022-03-01 |
Magnetic field sensor and method for measuring an external magnetic field
Grant 10,928,462 - Patak , et al. February 23, 2 | 2021-02-23 |
Magnetic Field Sensor And Method For Measuring An External Magnetic Field
App 20200326386 - Patak; Christian ; et al. | 2020-10-15 |
Sensor element having laser-activated getter material
Grant 10,793,428 - Breitling , et al. October 6, 2 | 2020-10-06 |
MEMS component having two different internal pressures
Grant 10,752,498 - Breitling , et al. A | 2020-08-25 |
Micromechanical Device And Method For Manufacturing A Micromechanical Device
App 20200198966 - Graf; Eckhard ; et al. | 2020-06-25 |
Device including micromechanical components in cavities having different pressures and method for its manufacture
Grant 10,384,932 - Breitling , et al. A | 2019-08-20 |
Laser reseal including a protective structure
Grant 10,183,861 - Breitling , et al. Ja | 2019-01-22 |
Sensor Element Having Laser-activated Getter Material
App 20180362337 - Breitling; Achim ; et al. | 2018-12-20 |
Mems Component Having Two Different Internal Pressures
App 20180346324 - Breitling; Achim ; et al. | 2018-12-06 |
Method For Manufacturing A Micromechanical Component
App 20180339900 - Breitling; Achim ; et al. | 2018-11-29 |
Micro-mechanical component
Grant 10,059,583 - Breitling , et al. August 28, 2 | 2018-08-28 |
Micromechanical component including a diffusion stop channel
Grant 10,029,911 - Breitling , et al. July 24, 2 | 2018-07-24 |
Structures for reducing and avoiding stresses on the seal bottom side during laser reseal
Grant 10,023,460 - Breitling , et al. July 17, 2 | 2018-07-17 |
Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction
Grant 9,927,497 - Reichenbach , et al. March 27, 2 | 2018-03-27 |
Micro-mechanical Component
App 20180044171 - Breitling; Achim ; et al. | 2018-02-15 |
Method for manufacturing a micromechanical component
Grant 9,890,035 - Breitling , et al. February 13, 2 | 2018-02-13 |
Magnetic sensor device and manufacturing method for a magnetic sensor device
Grant 9,778,323 - Dannenberg , et al. October 3, 2 | 2017-10-03 |
Method For Manufacturing A Micromechanical Component
App 20170203956 - Breitling; Achim ; et al. | 2017-07-20 |
Micromechanical Component Including A Diffusion Stop Channel
App 20170203957 - Breitling; Achim ; et al. | 2017-07-20 |
Laser Reseal Including Different Cap Materials
App 20170158495 - Breitling; Achim ; et al. | 2017-06-08 |
Additional Surface For Stabilizing The Internal Cavity Pressure Over The Lifetime
App 20170158489 - Breitling; Achim ; et al. | 2017-06-08 |
Laser Reseal Including Stress Compensation Layer
App 20170158492 - Breitling; Achim ; et al. | 2017-06-08 |
Laser Reseal Including A Protective Structure
App 20170158497 - Breitling; Achim ; et al. | 2017-06-08 |
Structures For Reducing And Avoiding Stresses On The Seal Bottom Side During Laser Reseal
App 20170113921 - Breitling; Achim ; et al. | 2017-04-27 |
Sensor Apparatus, Production Method For A Sensor Apparatus Having At Least One Magnetic Core And Method For Determining A Field Strength Of A Magnetic Field In At Least One Spatial Direction
App 20160363636 - REICHENBACH; Frank ; et al. | 2016-12-15 |
Magnetic Sensor Device And Manufacturing Method For A Magnetic Sensor Device
App 20160291096 - Dannenberg; Arne ; et al. | 2016-10-06 |
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