Breiling; Patrick

Patent Applications and Registrations

Patent applications and USPTO patent grants for Breiling; Patrick.The latest application filed is for "planar substrate edge contact with open volume equalization pathways and side containment".

Company Profile

4.11.14

Breiling; Patrick - Portland OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Planar substrate edge contact with open volume equalization pathways and side containment Grant 11,443,975 - Breiling , et al. September 13, 2	2022-09-13
Electrostatic chucking pedestal with substrate backside purging and thermal sinking Grant 11,232,966 - Thomas , et al. January 25, 2	2022-01-25
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20200227304 - Breiling; Patrick ; et al.	2020-07-16
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Pla App 20200219757 - BREILING; Patrick ; et al.	2020-07-09
Conical wafer centering and holding device for semiconductor processing Grant 10,655,224 - Agarwal , et al.	2020-05-19
Planar substrate edge contact with open volume equalization pathways and side containment Grant 10,622,243 - Breiling , et al.	2020-04-14
Electrostatic Chucking Pedestal With Substrate Backside Purging And Thermal Sinking App 20190237353 - THOMAS; Timothy S. ; et al.	2019-08-01
Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and Notch App 20180334746 - Breiling; Patrick ; et al.	2018-11-22
Conical Wafer Centering And Holding Device For Semiconductor Processing App 20180171473 - Agarwal; Pulkit ; et al.	2018-06-21
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20180122685 - Breiling; Patrick ; et al.	2018-05-03
Method and apparatus for purging and plasma suppression in a process chamber Grant 9,399,228 - Breiling , et al. July 26, 2	2016-07-26
In-situ deposition of film stacks Grant 9,028,924 - Haverkamp , et al. May 12, 2	2015-05-12
Method And Apparatus For Purging And Plasma Suppression In A Process Chamber App 20140217193 - Breiling; Patrick ; et al.	2014-08-07
In-situ deposition of film stacks Grant 8,741,394 - Haverkamp , et al. June 3, 2	2014-06-03
In-situ Deposition Of Film Stacks App 20130171834 - Haverkamp; Jason ; et al.	2013-07-04
In-Situ Deposition of Film Stacks App 20110236594 - Haverkamp; Jason ; et al.	2011-09-29
Method and apparatus for electroplating including remotely positioned second cathode Grant 7,854,828 - Reid , et al. December 21, 2	2010-12-21
Method and apparatus for electroplating including remotely positioned second cathode App 20100032303 - Reid; Jonathan ; et al.	2010-02-11
Method and apparatus for electroplating App 20100032310 - Reid; Jonathan ; et al.	2010-02-11
Active rinse shield for electrofill chemical bath and method of use Grant 7,413,616 - Breiling , et al. August 19, 2	2008-08-19
Active rinse shield for electrofill chemical bath and method of use App 20070102022 - Breiling; Patrick ; et al.	2007-05-10
Active rinse shield for electrofill chemical bath and method of use Grant 7,146,994 - Breiling , et al. December 12, 2	2006-12-12
Active rinse shield for electrofill chemical bath and method of use App 20040182424 - Breiling, Patrick ; et al.	2004-09-23

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