Patent applications and USPTO patent grants for Breeden; Michael.The latest application filed is for "methods of performing selective low resistivity ru atomic layer deposition and interconnect formed using the same".
Patent | Date |
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Methods of Performing Selective Low Resistivity Ru Atomic Layer Deposition and Interconnect Formed Using the Same App 20220189763 - Breeden; Michael ;   et al. | 2022-06-16 |
Method For Deposition Of Highly Selective Metal Films App 20210398848 - KANJOLIA; Ravindra ;   et al. | 2021-12-23 |
Passivation of Silicon Dioxide Defects for Atomic Layer Deposition App 20200340112 - Wolf; Steven ;   et al. | 2020-10-29 |
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