Brandt; David C.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Brandt; David C..The latest application filed is for "faceted euv optical element".
- Brandt; David C. - San Diego CA
- Brandt; David C. - Escondido CA US
| Patent | Date |
|---|---|
| Faceted EUV optical element Grant 10,635,002 - Brandt , et al. | 2020-04-28 |
| Laser produced plasma EUV light source Grant 9,713,239 - Hansson , et al. July 18, 2 | 2017-07-18 |
| Faceted Euv Optical Element App 20170097572 - Brandt; David C. ; et al. | 2017-04-06 |
| Faceted EUV optical element Grant 9,541,840 - Brandt , et al. January 10, 2 | 2017-01-10 |
| Faceted Euv Optical Element App 20160179012 - BRANDT; David C. ; et al. | 2016-06-23 |
| Laser Produced Plasma Euv Light Source App 20120193547 - Hansson; Bjorn A. M. ; et al. | 2012-08-02 |
| Gas management system for a laser-produced-plasma EUV light source Grant 8,198,615 - Bykanov , et al. June 12, 2 | 2012-06-12 |
| Laser produced plasma EUV light source App 20110079736 - Hansson; Bjorn A. M. ; et al. | 2011-04-07 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source Grant 7,872,245 - Vaschenko , et al. January 18, 2 | 2011-01-18 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus Grant 7,812,329 - Bykanov , et al. October 12, 2 | 2010-10-12 |
| Gas management system for a laser-produced-plasma EUV light source App 20100140514 - Bykanov; Alexander N. ; et al. | 2010-06-10 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Gas management system for a laser-produced-plasma EUV light source Grant 7,655,925 - Bykanov , et al. February 2, 2 | 2010-02-02 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source App 20090230326 - Vaschenko; Georgiy O. ; et al. | 2009-09-17 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus App 20090154642 - Bykanov; Alexander N. ; et al. | 2009-06-18 |
| Gas management system for a laser-produced-plasma EUV light source App 20090057567 - Bykanov; Alexander N. ; et al. | 2009-03-05 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Laser produced plasma EUV light source App 20080149862 - Hansson; Bjorn A. M. ; et al. | 2008-06-26 |
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