Patent | Date |
---|
Low Temperature Selective Deposition Employing A Germanium-containing Gas Assisted Etch App 20170194138 - Brabant; Paul D. ;   et al. | 2017-07-06 |
Low temperature epitaxy of a semiconductor alloy including silicon and germanium employing a high order silane precursor Grant 9,218,962 - Brabant , et al. December 22, 2 | 2015-12-22 |
Low Temperature Epitaxy Of A Semiconductor Alloy Including Silicon And Germanium Employing A High Order Silane Precursor App 20140045324 - Brabant; Paul D. ;   et al. | 2014-02-13 |
Low temperature selective epitaxy of silicon germanium alloys employing cyclic deposit and etch Grant 8,642,454 - Brabant , et al. February 4, 2 | 2014-02-04 |
Epitaxial semiconductor deposition methods and structures Grant 8,530,340 - Brabant , et al. September 10, 2 | 2013-09-10 |
EPITAXIAL PROCESS WITH SURFACE CLEANING FIRST USING HCl/GeH4/H2SiCl2 App 20130040438 - Adam; Thomas N. ;   et al. | 2013-02-14 |
EPITAXIAL PROCESS WITH SURFACE CLEANING FIRST USING HCl/GeH4/H2SiCl2 App 20130040440 - Adam; Thomas N. ;   et al. | 2013-02-14 |
Low Temperature Selective Epitaxy Of Silicon Germanium Alloys Employing Cyclic Deposit And Etch App 20120295421 - Brabant; Paul D. ;   et al. | 2012-11-22 |
Heteroepitaxial deposition over an oxidized surface Grant 7,901,968 - Weeks , et al. March 8, 2 | 2011-03-08 |
Low temperature load and bake Grant 7,837,795 - Brabant , et al. November 23, 2 | 2010-11-23 |
Epitaxial semiconductor deposition methods and structures Grant 7,682,947 - Brabant , et al. March 23, 2 | 2010-03-23 |
Epitaxial Semiconductor Deposition Methods And Structures App 20100006024 - Brabant; Paul D. ;   et al. | 2010-01-14 |
Low temperature load and bake Grant 7,462,239 - Brabant , et al. December 9, 2 | 2008-12-09 |
Epitaxial semiconductor deposition methods and structures Grant 7,402,504 - Brabant , et al. July 22, 2 | 2008-07-22 |
Relaxed heteroepitaxial layers App 20070224787 - Weeks; Keith Doran ;   et al. | 2007-09-27 |
Epitaxial Semiconductor Deposition Methods And Structures App 20070224786 - Brabant; Paul D. ;   et al. | 2007-09-27 |
Epitaxial semiconductor deposition methods and structures Grant 7,238,595 - Brabant , et al. July 3, 2 | 2007-07-03 |
Epitaxial semiconductor deposition methods and structures App 20060281322 - Brabant; Paul D. ;   et al. | 2006-12-14 |
Epitaxial semiconductor deposition methods and structures Grant 7,115,521 - Brabant , et al. October 3, 2 | 2006-10-03 |
Purifier for chemical reactor App 20060211248 - Brabant; Paul D. ;   et al. | 2006-09-21 |
Low temperature load and bake Grant 7,108,748 - Brabant , et al. September 19, 2 | 2006-09-19 |
Low temperature load and bake App 20060201414 - Brabant; Paul D. ;   et al. | 2006-09-14 |
Low temperature load and bake App 20060130743 - Brabant; Paul D. ;   et al. | 2006-06-22 |
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy Grant 7,029,995 - Todd , et al. April 18, 2 | 2006-04-18 |
Enhanced selectivity for epitaxial deposition Grant 6,998,305 - Arena , et al. February 14, 2 | 2006-02-14 |
Epitaxial semiconductor deposition methods and structures App 20050092235 - Brabant, Paul D. ;   et al. | 2005-05-05 |
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy App 20050026400 - Todd, Michael A. ;   et al. | 2005-02-03 |
Epitaxial semiconductor deposition methods and structures App 20040219735 - Brabant, Paul D. ;   et al. | 2004-11-04 |
Enhanced selectivity for epitaxial deposition App 20040171238 - Arena, Chantal J. ;   et al. | 2004-09-02 |
Low temperature load and bake App 20030036268 - Brabant, Paul D. ;   et al. | 2003-02-20 |