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Patent applications and USPTO patent grants for Boyd, Jr.; Wendell G..The latest application filed is for "electrostatic chuck aln dielectric repair".
Patent | Date |
---|---|
Electrostatic chuck AlN dielectric repair Grant 9,001,489 - Boyd, Jr. , et al. April 7, 2 | 2015-04-07 |
Electrostatic Chuck Aln Dielectric Repair App 20120307412 - Boyd, JR.; Wendell G. ;   et al. | 2012-12-06 |
Method And Apparatus For Refurbishing Gas Distribution Plate Surfaces App 20120255635 - BANDA; Sumanth ;   et al. | 2012-10-11 |
Extended Life Textured Chamber Components And Method For Fabricating Same App 20120258280 - Jackson; Michael ;   et al. | 2012-10-11 |
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