Boyd, Jr.; Wendell

Patent Applications and Registrations

Patent applications and USPTO patent grants for Boyd, Jr.; Wendell.The latest application filed is for "electrostatic chuck with external flow adjustments for improved temperature distribution".

Company Profile

2.13.17

Boyd, Jr.; Wendell - Morgan Hill CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers Grant 10,736,182 - Busche , et al.	2020-08-04
Pixilated cooling, temperature controlled substrate support assembly Grant 10,403,534 - Parkhe , et al. Sep	2019-09-03
Electrostatic chuck with external flow adjustments for improved temperature distribution Grant 10,121,688 - Busche , et al. November 6, 2	2018-11-06
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods Grant 9,986,598 - Busche , et al. May 29, 2	2018-05-29
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods Grant 9,875,923 - Boyd, Jr. , et al. January 23, 2	2018-01-23
Electrostatic Chuck With External Flow Adjustments For Improved Temperature Distribution App 20170213754 - Busche; Matthew J. ; et al.	2017-07-27
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods Grant 9,698,041 - Busche , et al. July 4, 2	2017-07-04
Control Systems Employing Deflection Sensors To Control Clamping Forces Applied By Electrostatic Chucks, And Related Methods App 20170103911 - BOYD, JR.; Wendell ; et al.	2017-04-13
Electrostatic chuck with external flow adjustments for improved temperature distribution Grant 9,622,375 - Busche , et al. April 11, 2	2017-04-11
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods Grant 9,558,981 - Boyd, Jr. , et al. January 31, 2	2017-01-31
Electrostatic chuck with internal flow adjustments for improved temperature distribution Grant 9,520,315 - Parkhe , et al. December 13, 2	2016-12-13
Real Time Liquid Particle Counter (lpc) End Point Detection System App 20160056061 - Wang; Jiansheng ; et al.	2016-02-25
Temperature Control Apparatus Including Groove-routed Optical Fiber Heating, Substrate Temperature Control Systems, Electronic Device Processing Systems, And Processing Methods App 20160007411 - Busche; Matthew ; et al.	2016-01-07
Apparatus, Systems, And Methods For Temperature Control Of Substrates Using Embedded Fiber Optics And Epoxy Optical Diffusers App 20160007412 - Busche; Matthew ; et al.	2016-01-07
Substrate Temperature Control Apparatus Including Optical Fiber Heating, Substrate Temperature Control Systems, Electronic Device Processing Systems, And Methods App 20150357228 - Busche; Matthew ; et al.	2015-12-10
Electrostatic chuck with variable pixilated heating Grant 9,196,514 - Parkhe , et al. November 24, 2	2015-11-24
Electrostatic Chuck With External Flow Adjustments For Improved Temperature Distribution App 20150187625 - Busche; Matthew J. ; et al.	2015-07-02
Electrostatic Chuck With Internal Flow Adjustments For Improved Temperature Distribution App 20150187626 - Parkhe; Vijay D. ; et al.	2015-07-02
Control Systems Employing Deflection Sensors To Control Clamping Forces Applied By Electrostatic Chucks, And Related Methods App 20150138687 - BOYD, JR.; Wendell ; et al.	2015-05-21
Pixilated Cooling, Temperature Controlled Substrate Support Assembly App 20150129165 - PARKHE; Vijay D. ; et al.	2015-05-14
Electrostatic Chuck With Variable Pixilated Heating App 20150070814 - Parkhe; Vijay D. ; et al.	2015-03-12
Real Time Liquid Particle Counter (lpc) End Point Detection System App 20120216833 - Wang; Jiansheng ; et al.	2012-08-30
Lavacoat Pre-clean And Pre-heat App 20100108641 - West; Brian T. ; et al.	2010-05-06

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