Bowering; Norbert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Bowering; Norbert.The latest application filed is for "euv optical element having blister-resistant multilayer cap".
- Bowering; Norbert - Bielefeld DE
- Bowering; Norbert - San Diego CA
| Patent | Date |
|---|---|
| EUV optical element having blister-resistant multilayer cap Grant 11,215,736 - Bowering January 4, 2 | 2022-01-04 |
| Target material supply apparatus for an extreme ultraviolet light source Grant 9,632,418 - De Dea , et al. April 25, 2 | 2017-04-25 |
| Euv Optical Element Having Blister-resistant Multilayer Cap App 20160349412 - BOWERING; Norbert | 2016-12-01 |
| Target Material Supply Apparatus For An Extreme Ultraviolet Light Source App 20160274466 - De Dea; Silvia ; et al. | 2016-09-22 |
| Target material supply apparatus for an extreme ultraviolet light source Grant 9,392,678 - De Dea , et al. July 12, 2 | 2016-07-12 |
| Target Material Supply Apparatus For An Extreme Ultraviolet Light Source App 20140102875 - De Dea; Silvia ; et al. | 2014-04-17 |
| Laser produced plasma EUV light source Grant 8,035,092 - Bykanov , et al. October 11, 2 | 2011-10-11 |
| Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ; et al. | 2010-07-15 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Grant 7,732,793 - Ershov , et al. June 8, 2 | 2010-06-08 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Laser produced plasma euv light source App 20100024980 - Ershov; Alexander I. ; et al. | 2010-02-04 |
| Laser produced plasma EUV light source Grant 7,598,509 - Ershov , et al. October 6, 2 | 2009-10-06 |
| High repetition rate laser produced plasma EUV light source Grant 7,525,111 - Bowering April 28, 2 | 2009-04-28 |
| High repetition rate laser produced plasma EUV light source App 20080197297 - Akins; Robert P. ; et al. | 2008-08-21 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Systems for protecting internal components of a EUV light source from plasma-generated debris Grant 7,365,351 - Bowering , et al. April 29, 2 | 2008-04-29 |
| EUV light source Grant 7,323,703 - Oliver , et al. January 29, 2 | 2008-01-29 |
| Collector for EUV light source Grant 7,309,871 - Bowering December 18, 2 | 2007-12-18 |
| Collector for EUV light source Grant 7,288,778 - Partio , et al. October 30, 2 | 2007-10-30 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20070187627 - Ershov; Alexander I. ; et al. | 2007-08-16 |
| Collector for EUV light source App 20070114469 - Partlo; William N. ; et al. | 2007-05-24 |
| Collector for EUV light source App 20070114470 - Bowering; Norbert | 2007-05-24 |
| Collector for EUV light source Grant 7,217,940 - Partlo , et al. May 15, 2 | 2007-05-15 |
| Systems for protecting internal components of an EUV light source from plasma-generated debris App 20070029512 - Bowering; Norbert ; et al. | 2007-02-08 |
| EUV light source Grant 7,164,144 - Partlo , et al. January 16, 2 | 2007-01-16 |
| Laser produced plasma EUV light source App 20060219957 - Ershov; Alexander I. ; et al. | 2006-10-05 |
| Collector for EUV light source App 20060131515 - Partlo; William N. ; et al. | 2006-06-22 |
| Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
| High repetition rate laser produced plasma EUV light source App 20050205810 - Akins, Robert P. ; et al. | 2005-09-22 |
| EUV light source App 20050199829 - Partlo, William N. ; et al. | 2005-09-15 |
| Plasma focus light source with improved pulse power system Grant 6,815,700 - Melnychuk , et al. November 9, 2 | 2004-11-09 |
| Discharge produced plasma EUV light source App 20040160155 - Partlo, William N. ; et al. | 2004-08-19 |
| Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ; et al. | 2004-06-10 |
| Plasma focus light source with improved pulse power system App 20030006383 - Melnychuk, Stephan T. ; et al. | 2003-01-09 |
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