Patent | Date |
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Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus Grant 9,663,862 - Sato , et al. May 30, 2 | 2017-05-30 |
Method Of Smoothing Solid Surface With Gas Cluster Ion Beam And Solid Surface Smoothing Apparatus App 20160071694 - SATO; Akinobu ;   et al. | 2016-03-10 |
Method Of Smoothing Solid Surface With Gas Cluster Ion Beam And Solid Surface Smoothing Apparatus App 20160068970 - SATO; Akinobu ;   et al. | 2016-03-10 |
Solid Surface Smoothing Method App 20140299465 - SATO; Akinobu ;   et al. | 2014-10-09 |
Method Of Smoothing Solid Surface With Gas Cluster Ion Beam And Solid Surface Smoothing Apparatus App 20140295107 - SATO; Akinobu ;   et al. | 2014-10-02 |
Method for smoothing a solid surface Grant 8,764,952 - Sato , et al. July 1, 2 | 2014-07-01 |
Method Of Smoothing Solid Surface With Gas Cluster Ion Beam And Solid Surface Smoothing Apparatus App 20140106086 - SATO; Akinobu ;   et al. | 2014-04-17 |
Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus Grant 8,481,981 - Suzuki , et al. July 9, 2 | 2013-07-09 |
Method of processing solid surface with gas cluster ion beam Grant 8,268,183 - Suzuki , et al. September 18, 2 | 2012-09-18 |
Method and apparatus for flattening solid surface Grant 8,178,857 - Sato , et al. May 15, 2 | 2012-05-15 |
Method Of Smoothing Solid Surface With Gas Cluster Lon Beam And Solid Surface Smoothing Apparatus App 20100230616 - Suzuki; Akiko ;   et al. | 2010-09-16 |
Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus App 20100207041 - Sato; Akinobu ;   et al. | 2010-08-19 |
Solid surface smoothing apparatus App 20100096263 - Sato; Akinobu ;   et al. | 2010-04-22 |
Method of processing solid surface with gas cluster ion beam App 20090305507 - Suzuki; Akiko ;   et al. | 2009-12-10 |
Dry etching method and photonic crystal device fabricated by use of the same Grant 7,563,379 - Suzuki , et al. July 21, 2 | 2009-07-21 |
Method and Apparatus For Flattening Solid Surface App 20080315128 - Sato; Akinobu ;   et al. | 2008-12-25 |
Electromagnetic wave transmitting/receiving device Grant 7,375,696 - Sato , et al. May 20, 2 | 2008-05-20 |
Optical connector, optical coupling method and optical element Grant 7,269,310 - Suzuki , et al. September 11, 2 | 2007-09-11 |
Optical element Grant 7,245,808 - Sato , et al. July 17, 2 | 2007-07-17 |
Optical element App 20060291780 - Sato; Akinobu ;   et al. | 2006-12-28 |
Method and device for flattening surface of solid App 20060278611 - Sato; Akinobu ;   et al. | 2006-12-14 |
Optical connector, optical coupling method and optical element App 20060204173 - Suzuki; Akiko ;   et al. | 2006-09-14 |
Electromagnetic wave transmitting/receiving device App 20060017636 - Sato; Akinobu ;   et al. | 2006-01-26 |
Infrared sensor App 20050218328 - Suzuki, Akiko ;   et al. | 2005-10-06 |
Dry etching method and photonic crystal device fabricated by use of the same App 20050155951 - Suzuki, Akiko ;   et al. | 2005-07-21 |
Two-dimensional photonic crystal device Grant 6,873,777 - Bourelle March 29, 2 | 2005-03-29 |
Two-dimensional photonic crystal device App 20040179803 - Bourelle, Emmanuel | 2004-09-16 |