Boumen; Roel Patent Filings

Patent	Date
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program Grant 7,195,407 - Van Den Nieuwelaar , et al. March 27, 2	2007-03-27
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program Grant 7,184,849 - Van Den Nieuwelaar , et al. February 27, 2	2007-02-27
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program App 20060197929 - Van Den Nieuwelaar; Norbertus Josephus Martinus ; et al.	2006-09-07
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program Grant 7,068,351 - Van Den Nieuwelaar , et al. June 27, 2	2006-06-27
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program App 20050278049 - Van Den Nieuwelaar, Norbertus Josephus Martinus ; et al.	2005-12-15
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit lithographic processing cell, and computer program App 20050185952 - Van Den Nieuwelaar, Norbertus Josephus Martinus ; et al.	2005-08-25

Patent

Date

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program
Grant 7,195,407 - Van Den Nieuwelaar , et al. March 27, 2

2007-03-27

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program
Grant 7,184,849 - Van Den Nieuwelaar , et al. February 27, 2

2007-02-27

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program
App 20060197929 - Van Den Nieuwelaar; Norbertus Josephus Martinus ; et al.

2006-09-07

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program
Grant 7,068,351 - Van Den Nieuwelaar , et al. June 27, 2

2006-06-27

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program
App 20050278049 - Van Den Nieuwelaar, Norbertus Josephus Martinus ; et al.

2005-12-15

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit lithographic processing cell, and computer program
App 20050185952 - Van Den Nieuwelaar, Norbertus Josephus Martinus ; et al.

2005-08-25

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Boumen; Roel

Patent Applications and Registrations