BOTMA; Hako

Patent Applications and Registrations

Patent applications and USPTO patent grants for BOTMA; Hako.The latest application filed is for "radiation system".

Company Profile

0.17.18

BOTMA; Hako - Eindhoven NL
Botma; Hako - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Radiation System App 20180031982 - NIENHUYS; Han-Kwang ; et al.	2018-02-01
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,785,051 - Van Schoot , et al. October 10, 2	2017-10-10
Actuation Mechanism, Optical Apparatus, Lithography Apparatus And Method Of Manufacturing Devices App 20150277233 - Van Schoot; Jan Bernard Plechelmus ; et al.	2015-10-01
Lithographic apparatus and method Grant 8,576,373 - Botma , et al. November 5, 2	2013-11-05
Pulse modifier, lithographic apparatus and device manufacturing method Grant 8,030,628 - Botma October 4, 2	2011-10-04
Lithographic Apparatus and Method App 20110149255 - BOTMA; Hako ; et al.	2011-06-23
Electromagnetic radiation pulse duration control apparatus and method Grant 7,715,101 - Botma May 11, 2	2010-05-11
Pulse Modifier, Lithographic Apparatus and Device Manufacturing Method App 20090159819 - Botma; Hako	2009-06-25
Electromagnetic Radiation Pulse Duration Control Apparatus and Method App 20090080085 - BOTMA; Hako	2009-03-26
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method Grant 7,507,976 - Botma , et al. March 24, 2	2009-03-24
Pulse modifier, lithographic apparatus, and device manufacturing method Grant 7,432,517 - Botma , et al. October 7, 2	2008-10-07
Lithographic apparatus and device manufacturing method Grant 7,400,381 - Botma July 15, 2	2008-07-15
Lithographic apparatus and device manufacturing method Grant 7,375,353 - Neerhof , et al. May 20, 2	2008-05-20
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method App 20080067424 - Botma; Hako ; et al.	2008-03-20
Lithographic apparatus and device manufacturing method Grant 7,333,178 - Dierichs , et al. February 19, 2	2008-02-19
Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method Grant 7,326,948 - Botma February 5, 2	2008-02-05
Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution Grant 7,312,850 - Mulder , et al. December 25, 2	2007-12-25
Lithographic apparatus and device manufacturing method App 20070170376 - Neerhof; Hendrik Antony Johannes ; et al.	2007-07-26
Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method App 20070090278 - Botma; Hako	2007-04-26
Lithographic apparatus and device manufacturing method App 20070057201 - Neerhof; Hendrik Antony Johannes ; et al.	2007-03-15
Lithographic apparatus and device manufacturing method Grant 7,148,952 - Eurlings , et al. December 12, 2	2006-12-12
Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system Grant 7,130,023 - Botma , et al. October 31, 2	2006-10-31
Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method Grant 7,116,400 - Botma October 3, 2	2006-10-03
Pulse modifier, lithographic apparatus, and device manufacturing method App 20060126681 - Botma; Hako ; et al.	2006-06-15
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method Grant 7,030,958 - Luijkx , et al. April 18, 2	2006-04-18
Lithographic apparatus and device manufacturing method App 20050270513 - Dierichs, Marcel Mathijs ; et al.	2005-12-08
Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method App 20050270510 - Botma, Hako	2005-12-08
Lithographic apparatus and device manufacturing method App 20050264784 - Botma, Hako	2005-12-01
Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution App 20050219494 - Mulder, Heine Melle ; et al.	2005-10-06
Lithographic apparatus and device manufacturing method Grant 6,924,885 - Botma August 2, 2	2005-08-02
Lithographic apparatus and device manufacturing method App 20050146702 - Eurlings, Markus Franciscus Antonius ; et al.	2005-07-07
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method App 20050140957 - Luijkx, Cornelis Petrus Andreas Marie ; et al.	2005-06-30
Lithographic apparatus and device manufacturing method App 20040165168 - Botma, Hako	2004-08-26
Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system App 20040150807 - Botma, Hako ; et al.	2004-08-05

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