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Patent applications and USPTO patent grants for Bosch; Niels Johannes Maria.The latest application filed is for "stage anti-fretting mechanism for roller bearing lifetime improvement".
Patent | Date |
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E-beam apparatus Grant 11,315,752 - Hempenius , et al. April 26, 2 | 2022-04-26 |
Electron beam inspection apparatus stage positioning Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
Stage Anti-fretting Mechanism For Roller Bearing Lifetime Improvement App 20220084781 - VAN GERVEN; Mark Henricus Wilhelmus ;   et al. | 2022-03-17 |
E-beam Apparatus App 20210151282 - HEMPENIUS; Peter Paul ;   et al. | 2021-05-20 |
E-beam apparatus Grant 10,867,770 - Hempenius , et al. December 15, 2 | 2020-12-15 |
Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ;   et al. | 2020-11-26 |
Electron Beam Inspection Tool And Method For Positioning An Object Table App 20200303158 - Bosch; Niels Johannes Maria ;   et al. | 2020-09-24 |
Electron Beam Inspection Apparatus Stage Positioning App 20200203118 - BAGGEN; Marcel Koenraad Marie ;   et al. | 2020-06-25 |
Lithographic apparatus and device manufacturing method Grant 10,649,347 - Ronde , et al. | 2020-05-12 |
E-beam Apparatus App 20190341224 - HEMPENIUS; Peter Paul ;   et al. | 2019-11-07 |
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ;   et al. | 2014-11-20 |
Lithographic apparatus and device manufacturing method Grant 8,891,063 - Breukers , et al. November 18, 2 | 2014-11-18 |
Lithographic Apparatus and Device Manufacturing Method App 20120188528 - BREUKERS; Marcus Joseph Elisabeth Godfried ;   et al. | 2012-07-26 |
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