Patent | Date |
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Method and system for forming patterns using charged particle beam lithography Grant 10,031,413 - Fujimura , et al. July 24, 2 | 2018-07-24 |
Method and system for design of enhanced edge slope patterns for charged particle beam lithography Grant 9,612,530 - Fujimura , et al. April 4, 2 | 2017-04-04 |
Method And System For Forming Patterns With Charged Particle Beam Lithography App 20170023862 - Fujimura; Akira ;   et al. | 2017-01-26 |
Method And System For Forming Patterns Using Charged Particle Beam Lithography App 20160334700 - Fujimura; Akira ;   et al. | 2016-11-17 |
Method and system for forming patterns with charged particle beam lithography Grant 9,465,297 - Fujimura , et al. October 11, 2 | 2016-10-11 |
Method and system for forming patterns using charged particle beam lithography Grant 9,400,857 - Fujimura , et al. July 26, 2 | 2016-07-26 |
Method and System for Design of Enhanced Edge Slope Patterns for Charged Particle Beam Lithography App 20160195805 - Fujimura; Akira ;   et al. | 2016-07-07 |
Method and System for Design of Enhanced Edge Slope Patterns for Charged Particle Beam Lithography App 20150338737 - Fujimura; Akira ;   et al. | 2015-11-26 |
Method and system for forming non-manhattan patterns using variable shaped beam lithography Grant 9,164,372 - Fujimura , et al. October 20, 2 | 2015-10-20 |
Method And System For Forming Patterns With Charged Particle Beam Lithography App 20150261907 - Fujimura; Akira ;   et al. | 2015-09-17 |
Method and system for forming non-manhattan patterns using variable shaped beam lithography Grant 9,091,946 - Fujimura , et al. July 28, 2 | 2015-07-28 |
Method and system for design of enhanced edge slope patterns for charged particle beam lithography Grant 9,057,956 - Fujimura , et al. June 16, 2 | 2015-06-16 |
Method and system for forming high accuracy patterns using charged particle beam lithography Grant 9,043,734 - Fujimura , et al. May 26, 2 | 2015-05-26 |
Method and system for forming patterns with charged particle beam lithography Grant 9,034,542 - Fujimura , et al. May 19, 2 | 2015-05-19 |
Method and System for Forming Non-Manhattan Patterns Using Variable Shaped Beam Lithography App 20150104737 - Fujimura; Akira ;   et al. | 2015-04-16 |
Method For Determining A Position Of A Piston In A Piston Pressure Accumulator By Means Of Inductive Sensors And Suitably Designed Piston Pressure Accumulator App 20140360360 - Bauer; Richard ;   et al. | 2014-12-11 |
Winding Method For The Production Of A Rotationally Symmetric, Tube-like Hollow Body Preform, Device And Method For The Production Of A Device For Producing The Same App 20140352873 - Bork; Ingo ;   et al. | 2014-12-04 |
Method And System For Forming Patterns With Charged Particle Beam Lithography App 20140229904 - Fujimura; Akira ;   et al. | 2014-08-14 |
Method and System for Forming High Accuracy Patterns Using Charged Particle Beam Lithography App 20140223393 - Fujimura; Akira ;   et al. | 2014-08-07 |
Method and system for forming patterns using charged particle beam lithography Grant 8,719,739 - Fujimura , et al. May 6, 2 | 2014-05-06 |
Method and system for forming patterns with charged particle beam lithography Grant 8,703,389 - Fujimura , et al. April 22, 2 | 2014-04-22 |
Method and System for Forming Non-Manhattan Patterns Using Variable Shaped Beam Lithography App 20130306884 - Fujimura; Akira ;   et al. | 2013-11-21 |
Method And System For Forming Patterns Using Charged Particle Beam Lithography App 20130283218 - Fujimura; Akira ;   et al. | 2013-10-24 |
Method And System For Forming Patterns Using Charged Particle Beam Lithography App 20130283219 - Fujimura; Akira ;   et al. | 2013-10-24 |
Method And System For Forming Patterns Using Charged Particle Beam Lithography App 20130283217 - Fujimura; Akira ;   et al. | 2013-10-24 |
Method And System For Design Of Enhanced Accuracy Patterns For Charged Particle Beam Lithography App 20130252143 - Fujimura; Akira ;   et al. | 2013-09-26 |
Method and system for forming high accuracy patterns using charged particle beam lithography Grant 8,473,875 - Fujimura , et al. June 25, 2 | 2013-06-25 |
Method and System for Forming Patterns with Charged Particle Beam Lithography App 20120329289 - Fujimura; Akira ;   et al. | 2012-12-27 |
Method And System For Forming Non-manhattan Patterns Using Variable Shaped Beam Lithography App 20120278770 - Fujimura; Akira ;   et al. | 2012-11-01 |
Method And System For Design Of Enhanced Edge Slope Patterns For Charged Particle Beam Lithography App 20120221981 - Fujimura; Akira ;   et al. | 2012-08-30 |
Method And System For Design Of Enhanced Accuracy Patterns For Charged Particle Beam Lithography App 20120221980 - Fujimura; Akira ;   et al. | 2012-08-30 |
Method and System for Forming High Accuracy Patterns Using Charged Particle Beam Lithography App 20120096412 - Fujimura; Akira ;   et al. | 2012-04-19 |