loadpatents
Patent applications and USPTO patent grants for Boogaard; Arjen.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,444,644 - Sengers , et al. Oc | 2019-10-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190086820 - SENGERS; Timotheus Franciscus ;   et al. | 2019-03-21 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane Grant 10,228,615 - Nikipelov , et al. | 2019-03-12 |
Lithographic apparatus and device manufacturing method Grant 10,146,143 - Sengers , et al. De | 2018-12-04 |
Lithographic Apparatus And Device Manufacturing Method App 20180046095 - SENGERS; Timotheus Franciscus ;   et al. | 2018-02-15 |
Lithographic apparatus and device manufacturing method Grant 9,804,509 - Sengers , et al. October 31, 2 | 2017-10-31 |
Radiation source-collector and method for manufacture Grant 9,773,578 - Kuznetsov , et al. September 26, 2 | 2017-09-26 |
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane App 20170205704 - NIKIPELOV; Andrey Alexandrovich ;   et al. | 2017-07-20 |
Lithographic Apparatus And Device Manufacturing Method App 20170176876 - SENGERS; Timotheus Franciscus ;   et al. | 2017-06-22 |
Lithographic apparatus and device manufacturing method Grant 9,594,308 - Sengers , et al. March 14, 2 | 2017-03-14 |
Lithographic Apparatus And Device Manufacturing Method App 20160070178 - SENGERS; Timotheus Franciscus ;   et al. | 2016-03-10 |
Radiation Source-Collector and Method for Manufacture App 20160012929 - KUZNETSOV; Alexey Sergeevich ;   et al. | 2016-01-14 |
Lithographic apparatus and device manufacturing method Grant 9,213,247 - Sengers , et al. December 15, 2 | 2015-12-15 |
Lithographic Apparatus And Device Manufacturing Method App 20140313494 - SENGERS; Timotheus Franciscus ;   et al. | 2014-10-23 |
Exposure apparatus Grant 8,830,446 - Boogaard , et al. September 9, 2 | 2014-09-09 |
Lithographic apparatus and device manufacturing method Grant 8,711,333 - Sengers , et al. April 29, 2 | 2014-04-29 |
Exposure Apparatus App 20130286374 - BOOGAARD; Arjen ;   et al. | 2013-10-31 |
Exposure apparatus Grant 8,542,341 - Boogaard , et al. September 24, 2 | 2013-09-24 |
Digital camera with panorama or mosaic functionality Grant 7,746,375 - Ketelaars , et al. June 29, 2 | 2010-06-29 |
Lithographic Apparatus And Device Manufacturing Method App 20090251674 - Sengers; Timotheus Franciscus ;   et al. | 2009-10-08 |
Lithographic apparatus and device manufacturing method Grant 7,557,901 - Sengers , et al. July 7, 2 | 2009-07-07 |
Exposure apparatus App 20090027642 - Boogaard; Arjen ;   et al. | 2009-01-29 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,450,217 - Boogaard , et al. November 11, 2 | 2008-11-11 |
Lithographic apparatus and device manufacturing method App 20070097343 - Sengers; Thimotheus Franciscus ;   et al. | 2007-05-03 |
Digital camera with panorama or mosaic functionality App 20070085913 - Ketelaars; Wilhelmus Sebastianus Marcus Maria ;   et al. | 2007-04-19 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060152696 - Boogaard; Arjen ;   et al. | 2006-07-13 |
Lithographic apparatus and device manufacturing method App 20050041225 - Sengers, Thimotheus Franciscus ;   et al. | 2005-02-24 |
Electronic device, and method of patterning a first layer Grant 6,764,953 - Van Den Broek , et al. July 20, 2 | 2004-07-20 |
Electronic device, and method of patterning a first layer App 20030118751 - Van Den Broek, Jan Johannes ;   et al. | 2003-06-26 |
Passive component App 20020036334 - Van Den Broek, Jan Johannes ;   et al. | 2002-03-28 |
Electronic device, and method of patterning a first layer App 20020008236 - Van Den Broek, Jan Johannes ;   et al. | 2002-01-24 |
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