Boo; Jae-Phil

Patent Applications and Registrations

Patent applications and USPTO patent grants for Boo; Jae-Phil.The latest application filed is for "cmp apparatus".

Company Profile

0.28.25

Boo; Jae-Phil - Seongnam-si KR
Boo; Jae Phil - Gyeonggi-do KR
Boo; Jae-Phil - Seongnam KR
Boo; Jae-Phil - Suwon KR
Boo; Jae-Phil - Kyunggi-do KR
Boo, Jae-Phil - Seongnam-City KR
Boo; Jae-Phil - Suwon-shi KR
Boo, Jae-Phil - Suwon-city KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same Grant 9,620,392 - Kim , et al. April 11, 2	2017-04-11
CMP apparatus Grant 9,421,668 - Lee , et al. August 23, 2	2016-08-23
CMP pad conditioner, and method for producing the CMP pad conditioner Grant 9,314,901 - Lee , et al. April 19, 2	2016-04-19
Cmp Apparatus App 20150140900 - Lee; Seh Kwang ; et al.	2015-05-21
Chemical mechanical polishing system Grant 8,882,563 - Boo , et al. November 11, 2	2014-11-11
Chemical mechanical polishing apparatus Grant 8,790,158 - Chang , et al. July 29, 2	2014-07-29
Polishing pad for chemical mechanical polishing process and chemical mechanical polishing apparatus including the same Grant 8,734,206 - Chang , et al. May 27, 2	2014-05-27
Cmp Pad Conditioner, And Method For Producing The Cmp Pad Conditioner App 20140094101 - Lee; Seh Kwang ; et al.	2014-04-03
Conditioner of chemical mechanical polishing apparatus Grant 8,662,956 - Seo , et al. March 4, 2	2014-03-04
Single Type Apparatus For Drying A Substrate And Single Type System For Cleaning A Substrate Including The Same App 20140000661 - Kim; Dong-Soo ; et al.	2014-01-02
Brush And Method For Cleaning A Substrate And Scrubber Employing The Same App 20120247508 - Jeung; Gun-Ig ; et al.	2012-10-04
Conditioner Of Chemical Mechanical Polishing Apparatus App 20110275289 - SEO; Keon Sik ; et al.	2011-11-10
Chemical Mechanical Polishing System App 20110269378 - Boo; Jae Phil ; et al.	2011-11-03
Polishing Pad For Chemical Mechanical Polishing Process And Chemical Mechanical Polishing Apparatus Including The Same App 20110217911 - CHANG; One-Moon ; et al.	2011-09-08
Chemical Mechanical Polishing Apparatus App 20110217910 - CHANG; One-Moon ; et al.	2011-09-08
Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones Grant 7,303,466 - Boo , et al. December 4, 2	2007-12-04
Method For Polishing A Semiconductor Wafer App 20070232209 - Boo; Jae-Phil ; et al.	2007-10-04
Method for polishing a semiconductor wafer Grant 7,223,158 - Boo , et al. May 29, 2	2007-05-29
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same Grant 7,196,010 - Park , et al. March 27, 2	2007-03-27
Apparatus and method for treating substrates Grant 7,196,011 - Cho , et al. March 27, 2	2007-03-27
Apparatus for polishing a semiconductor wafer Grant 7,081,045 - Boo , et al. July 25, 2	2006-07-25
Apparatus and methods for polishing a semiconductor wafer App 20060116056 - Boo; Jae-Phil ; et al.	2006-06-01
Polishing pad for chemical mechanical polishing apparatus Grant 7,052,368 - Kim , et al. May 30, 2	2006-05-30
Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones App 20050272346 - Boo, Jae-Phil ; et al.	2005-12-08
Polishing head of chemical mechanical polishing apparatus and polishing method using the same Grant 6,945,861 - Boo , et al. September 20, 2	2005-09-20
Apparatus for polishing a semiconductor wafer and method therefor Grant 6,921,323 - Boo , et al. July 26, 2	2005-07-26
Apparatus and method for treating susbtrates App 20050153557 - Cho, Chan-Woo ; et al.	2005-07-14
Polishing Head Of Chemical Mechanical Polishing Apparatus And Polishing Method Using The Same App 20050153635 - Boo, Jae-Phil ; et al.	2005-07-14
Apparatus for polishing a semiconductor wafer and method therefor App 20050136806 - Boo, Jae-Phil ; et al.	2005-06-23
Polishing head of chemical mechanical polishing apparatus and polishing method using the same Grant 6,881,135 - Boo , et al. April 19, 2	2005-04-19
Polishing station of a chemical mechanical polishing apparatus Grant 6,840,846 - Boo , et al. January 11, 2	2005-01-11
Polishing pad for chemical mechanical polishing apparatus App 20040248501 - Kim, Jin-Kook ; et al.	2004-12-09
Polishing head of chemical mechanical polishing apparatus and polishing method using the same App 20040242129 - Boo, Jae-Phil ; et al.	2004-12-02
Polishing head of chemical mechanical polishing apparatus and polishing method using the same Grant 6,769,973 - Boo , et al. August 3, 2	2004-08-03
Apparatus for polishing a semiconductor wafer and method therefor App 20040072517 - Boo, Jae-Phil ; et al.	2004-04-15
Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness Grant 6,709,920 - Boo , et al. March 23, 2	2004-03-23
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same App 20040033693 - Park, Young-Rae ; et al.	2004-02-19
Polishing station of a chemical mechanical polishing apparatus App 20030236056 - Boo, Jae-Phil ; et al.	2003-12-25
Apparatus for polishing a semiconductor wafer and method therefor Grant 6,652,362 - Boo , et al. November 25, 2	2003-11-25
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same Grant 6,626,968 - Park , et al. September 30, 2	2003-09-30
Polishing head of chemical mechanical polishing apparatus and polishing method using the same App 20030008604 - Boo, Jae-Phil ; et al.	2003-01-09
Apparatus for polishing a semiconductor wafer and method therefor App 20020098780 - Boo, Jae-Phil ; et al.	2002-07-25
Method for fabricating MOS transistor using selective silicide process Grant 6,383,882 - Lee , et al. May 7, 2	2002-05-07
Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same App 20020034875 - Park, Young-rae ; et al.	2002-03-21
Method for fabricating MOS transistor using selective silicide process App 20020025634 - Lee, Sun-Wung ; et al.	2002-02-28
Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness App 20020016041 - Boo, Jae-Phil ; et al.	2002-02-07

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