Boitnott; Charles A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Boitnott; Charles A..The latest application filed is for "backside etch process chamber and method".
- Boitnott; Charles A. - Half Moon Bay CA
| Patent | Date |
|---|---|
| Backside etch process chamber and method Grant 5,914,278 - Boitnott , et al. June 22, 1 | 1999-06-22 |
| Modular process system Grant 5,863,170 - Boitnott , et al. January 26, 1 | 1999-01-26 |
| Semiconductor wafer processing carousel Grant 5,855,465 - Boitnott , et al. January 5, 1 | 1999-01-05 |
| Short-coupled-path extender for plasma source Grant 5,814,154 - Boitnott September 29, 1 | 1998-09-29 |
| Process chamber sleeve with ring seals for isolating individual process modules in a common cluster Grant 5,667,592 - Boitnott , et al. September 16, 1 | 1997-09-16 |
| Method and apparatus for batch processing a semiconductor wafer Grant 5,167,716 - Boitnott , et al. December 1, 1 | 1992-12-01 |
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