Bohlen; Harald

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bohlen; Harald.The latest application filed is for "method of transferring a pattern into a radiation-sensitive layer".

Company Profile

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Bohlen; Harald - Ammerbuch DE
Bohlen; Harald - Boeblingen DE
Bohlen; Harald - Boblingen DE
Bohlen; Harald - Sindelfingen DT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of transferring a pattern into a radiation-sensitive layer Grant 4,591,540 - Bohlen , et al. May 27, 1	1986-05-27
Error-corrected corpuscular beam lithography Grant 4,578,587 - Behringer , et al. March 25, 1	1986-03-25
Electron beam projection lithography Grant 4,554,458 - Behringer , et al. November 19, 1	1985-11-19
Contact device for releasably connecting electrical components Grant 4,522,893 - Bohlen , et al. June 11, 1	1985-06-11
Mask and system for mutually aligning objects in ray exposure systems Grant 4,513,203 - Bohlen , et al. April 23, 1	1985-04-23
Method of compensating the proximity effect in electron beam projection systems Grant 4,504,558 - Bohlen , et al. March 12, 1	1985-03-12
Shadow projection mask for ion implantation and ion beam lithography Grant 4,448,865 - Bohlen , et al. May 15, 1	1984-05-15
Method of compensating the proximity effect in electron beam projection systems Grant 4,426,584 - Bohlen , et al. January 17, 1	1984-01-17
Method of making mask for structuring surface areas Grant 4,417,946 - Bohlen , et al. November 29, 1	1983-11-29
Alignment system for particle beam lithography Grant 4,370,554 - Bohlen , et al. January 25, 1	1983-01-25
Mask for structuring surface areas, and method of making it Grant 4,342,817 - Bohlen , et al. August 3, 1	1982-08-03
Method of shadow printing exposure Grant 4,334,156 - Bohlen , et al. June 8, 1	1982-06-08
Method of exposure by means of corpuscular beam shadow printing Grant 4,169,230 - Bohlen , et al. September 25, 1	1979-09-25
Methods Of Testing The Continuity Of An Electrical Conductor By Use Of An Electron Beam Grant 3,764,898 - Bohlen , et al. October 9, 1	1973-10-09

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