Patent | Date |
---|
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 11,169,447 - Bogaart November 9, 2 | 2021-11-09 |
Mask assembly Grant 11,009,803 - Kruizinga , et al. May 18, 2 | 2021-05-18 |
Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product App 20200379358 - Bogaart; Erik Willem | 2020-12-03 |
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 10,754,258 - Bogaart A | 2020-08-25 |
Alignment system Grant 10,585,363 - Mathijssen , et al. | 2020-03-10 |
Mask Assembly App 20200057394 - KRUIZINGA; Matthias ;   et al. | 2020-02-20 |
Mask assembly Grant 10,558,129 - Kruizinga , et al. Feb | 2020-02-11 |
Mask Assembly App 20180329314 - KRUIZINGA; Matthias ;   et al. | 2018-11-15 |
Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method Grant 10,042,260 - Bogaart , et al. August 7, 2 | 2018-08-07 |
Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product App 20180203368 - BOGAART; Erik Willem | 2018-07-19 |
Alignment System App 20180149987 - MATHIJSSEN; Simon Gijsbert Josephus ;   et al. | 2018-05-31 |
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 9,983,485 - Bogaart May 29, 2 | 2018-05-29 |
Radiation System App 20180031982 - NIENHUYS; Han-Kwang ;   et al. | 2018-02-01 |
Inspection method and apparatus, substrates for use therein and device manufacturing method Grant 9,835,954 - Bogaart , et al. December 5, 2 | 2017-12-05 |
Device For Monitoring A Radiation Source, Radiation Source, Method Of Monitoring A Radiation Source, Device Manufacturing Method App 20170307978 - BOGAART; Erik Willem ;   et al. | 2017-10-26 |
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method Grant 9,778,025 - Mathijssen , et al. October 3, 2 | 2017-10-03 |
Lithographic apparatus Grant 9,696,638 - Van Der Pasch , et al. July 4, 2 | 2017-07-04 |
Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product App 20170184980 - BOGAART; Erik Willem | 2017-06-29 |
Lithographic Apparatus App 20160109812 - VAN DER PASCH; Engelbertus Antonius Fransiscus ;   et al. | 2016-04-21 |
Inspection Method and Apparatus, Substrates for use Therein and Device Manufacturing Method App 20160097983 - BOGAART; Erik Willem ;   et al. | 2016-04-07 |
Lithographic apparatus Grant 9,229,340 - Van Der Pasch , et al. January 5, 2 | 2016-01-05 |
Method And Apparatus For Measuring Asymmetry Of A Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150176979 - Mathijssen; Simon Gijsbert Josephus ;   et al. | 2015-06-25 |
Lithographic Apparatus App 20140022527 - VAN DER PASCH; Engelbertus Antonius Fransiscus ;   et al. | 2014-01-23 |
Lithographic apparatus Grant 8,570,492 - Van Der Pasch , et al. October 29, 2 | 2013-10-29 |
Lithographic Apparatus App 20120242969 - VAN DER PASCH; Engelbertus Antonius Fransiscus ;   et al. | 2012-09-27 |