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name:-0.048356056213379
name:-0.039462804794312
name:-0.012818098068237
Bleidistel; Sascha Patent Filings

Bleidistel; Sascha

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bleidistel; Sascha.The latest application filed is for "position measurement of optical elements in a lithographic apparatus".

Company Profile
10.43.43
  • Bleidistel; Sascha - Aalen DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Position Measurement Of Optical Elements In A Lithographic Apparatus
App 20210149309 - Loopstra; Erik ;   et al.
2021-05-20
Position measurement of optical elements in a lithographic apparatus
Grant 10,908,508 - Loopstra , et al. February 2, 2
2021-02-02
Position Measurement Of Optical Elements In A Lithographic Apparatus
App 20200089126 - Loopstra; Erik ;   et al.
2020-03-19
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,578,976 - Bleidistel , et al.
2020-03-03
Position measurement of optical elements in a lithographic apparatus
Grant 10,509,325 - Loopstra , et al. Dec
2019-12-17
Device for transmitting electrical signals, and lithography apparatus
Grant 10,459,351 - Horn , et al. Oc
2019-10-29
Device For Transmitting Electrical Signals, And Lithography Apparatus
App 20190196343 - Horn; Jan ;   et al.
2019-06-27
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20190101832 - Bleidistel; Sascha ;   et al.
2019-04-04
Position Measurement Of Optical Elements In A Lithographic Apparatus
App 20190086813 - Loopstra; Erik ;   et al.
2019-03-21
Arrangement for actuating an element in a microlithographic projection exposure apparatus
Grant 10,185,221 - Bleidistel , et al. Ja
2019-01-22
Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
Grant 10,162,267 - Gruner , et al. Dec
2018-12-25
Projection exposure apparatus comprising a measuring system for measuring an optical element
Grant 10,162,270 - Bleidistel , et al. Dec
2018-12-25
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,146,137 - Bleidistel , et al. De
2018-12-04
Correction of optical elements by correction light irradiated in a flat manner
Grant 10,054,786 - Bleidistel , et al. August 21, 2
2018-08-21
Optimum arrangement of actuator and sensor points on an optical element
Grant 10,025,200 - Marsollek , et al. July 17, 2
2018-07-17
Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator
Grant 10,012,911 - Arnz , et al. July 3, 2
2018-07-03
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20180181005 - Bleidistel; Sascha ;   et al.
2018-06-28
Optical system with aperture device having plurality of aperture elements
Grant 9,964,673 - Sigel , et al. May 8, 2
2018-05-08
Projection Exposure Apparatus With Wavefront Measuring Device And Optical Wavefront Manipulator
App 20170336714 - Arnz; Michael ;   et al.
2017-11-23
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
Grant 9,817,322 - Hembacher , et al. November 14, 2
2017-11-14
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20170153553 - Bleidistel; Sascha ;   et al.
2017-06-01
Optimum Arrangement Of Actuator And Sensor Points On An Optical Element
App 20170068165 - Marsollek; Pascal ;   et al.
2017-03-09
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 9,581,813 - Conradi , et al. February 28, 2
2017-02-28
Arrangement for actuating an element in a microlithographic projection exposure apparatus
Grant 9,568,837 - Bleidistel , et al. February 14, 2
2017-02-14
Microlithographic projection exposure apparatus
Grant 9,535,336 - Bleidistel , et al. January 3, 2
2017-01-03
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner
App 20160259161 - Bleidistel; Sascha ;   et al.
2016-09-08
Semiconductor microlithography projection exposure apparatus
Grant 9,366,977 - Bleidistel , et al. June 14, 2
2016-06-14
Correction of optical elements by correction light irradiated in a flat manner
Grant 9,366,857 - Bleidistel , et al. June 14, 2
2016-06-14
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20160054661 - Bleidistel; Sascha ;   et al.
2016-02-25
Projection Exposure Apparatus Including Mechanism To Reduce Influence Of Pressure Fluctuations
App 20150316854 - Gruner; Toralf ;   et al.
2015-11-05
Projection lens system of a microlithographic projection exposure installation
Grant 9,164,396 - Beierl , et al. October 20, 2
2015-10-20
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective
App 20150293352 - Conradi; Olaf ;   et al.
2015-10-15
Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method
Grant 9,110,388 - Bleidistel , et al. August 18, 2
2015-08-18
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 9,069,263 - Conradi , et al. June 30, 2
2015-06-30
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner
App 20150062682 - Bleidistel; Sascha ;   et al.
2015-03-05
Projection Exposure Apparatus Comprising a Measuring System for Measuring an Optical Element
App 20140340664 - Bleidistel; Sascha ;   et al.
2014-11-20
Microlithographic Projection Exposure Apparatus
App 20140333912 - Bleidistel; Sascha ;   et al.
2014-11-13
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20140300882 - Bleidistel; Sascha ;   et al.
2014-10-09
Correction of optical elements by correction light irradiated in a flat manner
Grant 8,811,568 - Bleidistel , et al. August 19, 2
2014-08-19
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus
App 20140204356 - Bleidistel; Sascha ;   et al.
2014-07-24
Arrangement for actuating an element in a microlithographic projection exposure apparatus
Grant 8,786,826 - Bleidistel , et al. July 22, 2
2014-07-22
Microlithographic projection exposure apparatus with correction optical system that heats projection objective element
Grant 8,773,638 - Dodoc , et al. July 8, 2
2014-07-08
Microlithographic projection exposure apparatus
Grant 8,767,176 - Bleidistel , et al. July 1, 2
2014-07-01
Correction of optical elements by correction light irradiated in a flat manner
Grant 8,760,744 - Bleidistel , et al. June 24, 2
2014-06-24
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner
App 20140078567 - Bleidistel; Sascha ;   et al.
2014-03-20
Projection Exposure Tool for Microlithography and Method for Microlithographic Exposure
App 20130182264 - Hetzler; Jochen ;   et al.
2013-07-18
Projection Lens System Of A Microlithographic Projection Exposure Installation
App 20130070224 - Beierl; Helmut ;   et al.
2013-03-21
Projection Exposure Apparatus And Optical System
App 20120320353 - Bleidistel; Sascha ;   et al.
2012-12-20
Projection lens system of a microlithographic projection exposure installation
Grant 8,319,944 - Beierl , et al. November 27, 2
2012-11-27
Projection exposure apparatus and optical system
Grant 8,269,948 - Bleidistel , et al. September 18, 2
2012-09-18
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20120218536 - Bleidistel; Sascha ;   et al.
2012-08-30
Optical system of a microlithographic projection exposure apparatus
Grant 8,212,991 - Dodoc , et al. July 3, 2
2012-07-03
Semiconductor Microlithography Projection Exposure Apparatus
App 20120069310 - Bleidistel; Sascha ;   et al.
2012-03-22
Optical Imaging Device And Method For Reducing Dynamic Fluctuations In Pressure Difference
App 20120026479 - Hembacher; Stefan ;   et al.
2012-02-02
Optical imaging device and method for reducing dynamic fluctuations in pressure difference
Grant 8,027,023 - Hembacher , et al. September 27, 2
2011-09-27
Optical System With Aperture Device
App 20110194089 - Sigel; Benjamin ;   et al.
2011-08-11
Projection objective of a microlithographic projection exposure apparatus
Grant 7,990,622 - Conradi , et al. August 2, 2
2011-08-02
Microlithographic Projection Exposure Apparatus
App 20110181852 - Bleidistel; Sascha ;   et al.
2011-07-28
Projection Objective Of A Microlithographic Projection Exposure Apparatus
App 20110019169 - Conradi; Olaf ;   et al.
2011-01-27
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective
App 20100290024 - Conradi; Olaf ;   et al.
2010-11-18
Projection objective of a microlithographic projection exposure apparatus
Grant 7,830,611 - Conradi , et al. November 9, 2
2010-11-09
Projection Lens System Of A Microlithographic Projection Exposure Installation
App 20100265478 - Beierl; Helmut ;   et al.
2010-10-21
Microlithographic Projection Exposure Apparatus
App 20100231883 - Dodoc; Aurelian ;   et al.
2010-09-16
Projection lens system of a microlithographic projection exposure installation
Grant 7,782,440 - Beierl , et al. August 24, 2
2010-08-24
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 7,777,963 - Conradi , et al. August 17, 2
2010-08-17
Projection Objective For A Microlithography Apparatus And Method
App 20100128367 - Beckenbach; Mariella ;   et al.
2010-05-27
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20100073655 - Dodoc; Aurelian ;   et al.
2010-03-25
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner
App 20100060988 - Bleidistel; Sascha ;   et al.
2010-03-11
Projection Exposure Apparatus And Optical System
App 20090225297 - Bleidistel; Sascha ;   et al.
2009-09-10
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20080309904 - Dodoc; Aurelian ;   et al.
2008-12-18
Method for Improving the Imaging Properties of a Projection Objective, and Such a Projection Objective
App 20080310029 - Conradi; Olaf ;   et al.
2008-12-18
Projection Objective Of A Microlithographic Projection Exposure Apparatus
App 20080239503 - Conradi; Olaf ;   et al.
2008-10-02
Optical imaging device
App 20080186467 - Hembacher; Stefan ;   et al.
2008-08-07
Optical System of a Microlithographic Projection Exposure Apparatus
App 20080170217 - Dodoc; Aurelian ;   et al.
2008-07-17
Projection Lens System of a Microlithographic Projection Exposure Installation
App 20080106711 - Beierl; Helmut ;   et al.
2008-05-08
Mirror arrangement and method of manufacturing thereof, optical system and lithographic method of manufacturing a miniaturized device
App 20060018045 - Moeller; Timo ;   et al.
2006-01-26

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