Patent | Date |
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Position Measurement Of Optical Elements In A Lithographic Apparatus App 20210149309 - Loopstra; Erik ;   et al. | 2021-05-20 |
Position measurement of optical elements in a lithographic apparatus Grant 10,908,508 - Loopstra , et al. February 2, 2 | 2021-02-02 |
Position Measurement Of Optical Elements In A Lithographic Apparatus App 20200089126 - Loopstra; Erik ;   et al. | 2020-03-19 |
Catadioptric projection objective including a reflective optical component and a measuring device Grant 10,578,976 - Bleidistel , et al. | 2020-03-03 |
Position measurement of optical elements in a lithographic apparatus Grant 10,509,325 - Loopstra , et al. Dec | 2019-12-17 |
Device for transmitting electrical signals, and lithography apparatus Grant 10,459,351 - Horn , et al. Oc | 2019-10-29 |
Device For Transmitting Electrical Signals, And Lithography Apparatus App 20190196343 - Horn; Jan ;   et al. | 2019-06-27 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device App 20190101832 - Bleidistel; Sascha ;   et al. | 2019-04-04 |
Position Measurement Of Optical Elements In A Lithographic Apparatus App 20190086813 - Loopstra; Erik ;   et al. | 2019-03-21 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus Grant 10,185,221 - Bleidistel , et al. Ja | 2019-01-22 |
Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations Grant 10,162,267 - Gruner , et al. Dec | 2018-12-25 |
Projection exposure apparatus comprising a measuring system for measuring an optical element Grant 10,162,270 - Bleidistel , et al. Dec | 2018-12-25 |
Catadioptric projection objective including a reflective optical component and a measuring device Grant 10,146,137 - Bleidistel , et al. De | 2018-12-04 |
Correction of optical elements by correction light irradiated in a flat manner Grant 10,054,786 - Bleidistel , et al. August 21, 2 | 2018-08-21 |
Optimum arrangement of actuator and sensor points on an optical element Grant 10,025,200 - Marsollek , et al. July 17, 2 | 2018-07-17 |
Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator Grant 10,012,911 - Arnz , et al. July 3, 2 | 2018-07-03 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20180181005 - Bleidistel; Sascha ;   et al. | 2018-06-28 |
Optical system with aperture device having plurality of aperture elements Grant 9,964,673 - Sigel , et al. May 8, 2 | 2018-05-08 |
Projection Exposure Apparatus With Wavefront Measuring Device And Optical Wavefront Manipulator App 20170336714 - Arnz; Michael ;   et al. | 2017-11-23 |
Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 9,817,322 - Hembacher , et al. November 14, 2 | 2017-11-14 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20170153553 - Bleidistel; Sascha ;   et al. | 2017-06-01 |
Optimum Arrangement Of Actuator And Sensor Points On An Optical Element App 20170068165 - Marsollek; Pascal ;   et al. | 2017-03-09 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,581,813 - Conradi , et al. February 28, 2 | 2017-02-28 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus Grant 9,568,837 - Bleidistel , et al. February 14, 2 | 2017-02-14 |
Microlithographic projection exposure apparatus Grant 9,535,336 - Bleidistel , et al. January 3, 2 | 2017-01-03 |
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner App 20160259161 - Bleidistel; Sascha ;   et al. | 2016-09-08 |
Semiconductor microlithography projection exposure apparatus Grant 9,366,977 - Bleidistel , et al. June 14, 2 | 2016-06-14 |
Correction of optical elements by correction light irradiated in a flat manner Grant 9,366,857 - Bleidistel , et al. June 14, 2 | 2016-06-14 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20160054661 - Bleidistel; Sascha ;   et al. | 2016-02-25 |
Projection Exposure Apparatus Including Mechanism To Reduce Influence Of Pressure Fluctuations App 20150316854 - Gruner; Toralf ;   et al. | 2015-11-05 |
Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2 | 2015-10-20 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20150293352 - Conradi; Olaf ;   et al. | 2015-10-15 |
Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method Grant 9,110,388 - Bleidistel , et al. August 18, 2 | 2015-08-18 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,069,263 - Conradi , et al. June 30, 2 | 2015-06-30 |
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner App 20150062682 - Bleidistel; Sascha ;   et al. | 2015-03-05 |
Projection Exposure Apparatus Comprising a Measuring System for Measuring an Optical Element App 20140340664 - Bleidistel; Sascha ;   et al. | 2014-11-20 |
Microlithographic Projection Exposure Apparatus App 20140333912 - Bleidistel; Sascha ;   et al. | 2014-11-13 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20140300882 - Bleidistel; Sascha ;   et al. | 2014-10-09 |
Correction of optical elements by correction light irradiated in a flat manner Grant 8,811,568 - Bleidistel , et al. August 19, 2 | 2014-08-19 |
Arrangement For Actuating An Element In A Microlithographic Projection Exposure Apparatus App 20140204356 - Bleidistel; Sascha ;   et al. | 2014-07-24 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus Grant 8,786,826 - Bleidistel , et al. July 22, 2 | 2014-07-22 |
Microlithographic projection exposure apparatus with correction optical system that heats projection objective element Grant 8,773,638 - Dodoc , et al. July 8, 2 | 2014-07-08 |
Microlithographic projection exposure apparatus Grant 8,767,176 - Bleidistel , et al. July 1, 2 | 2014-07-01 |
Correction of optical elements by correction light irradiated in a flat manner Grant 8,760,744 - Bleidistel , et al. June 24, 2 | 2014-06-24 |
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner App 20140078567 - Bleidistel; Sascha ;   et al. | 2014-03-20 |
Projection Exposure Tool for Microlithography and Method for Microlithographic Exposure App 20130182264 - Hetzler; Jochen ;   et al. | 2013-07-18 |
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ;   et al. | 2013-03-21 |
Projection Exposure Apparatus And Optical System App 20120320353 - Bleidistel; Sascha ;   et al. | 2012-12-20 |
Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2 | 2012-11-27 |
Projection exposure apparatus and optical system Grant 8,269,948 - Bleidistel , et al. September 18, 2 | 2012-09-18 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device App 20120218536 - Bleidistel; Sascha ;   et al. | 2012-08-30 |
Optical system of a microlithographic projection exposure apparatus Grant 8,212,991 - Dodoc , et al. July 3, 2 | 2012-07-03 |
Semiconductor Microlithography Projection Exposure Apparatus App 20120069310 - Bleidistel; Sascha ;   et al. | 2012-03-22 |
Optical Imaging Device And Method For Reducing Dynamic Fluctuations In Pressure Difference App 20120026479 - Hembacher; Stefan ;   et al. | 2012-02-02 |
Optical imaging device and method for reducing dynamic fluctuations in pressure difference Grant 8,027,023 - Hembacher , et al. September 27, 2 | 2011-09-27 |
Optical System With Aperture Device App 20110194089 - Sigel; Benjamin ;   et al. | 2011-08-11 |
Projection objective of a microlithographic projection exposure apparatus Grant 7,990,622 - Conradi , et al. August 2, 2 | 2011-08-02 |
Microlithographic Projection Exposure Apparatus App 20110181852 - Bleidistel; Sascha ;   et al. | 2011-07-28 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110019169 - Conradi; Olaf ;   et al. | 2011-01-27 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20100290024 - Conradi; Olaf ;   et al. | 2010-11-18 |
Projection objective of a microlithographic projection exposure apparatus Grant 7,830,611 - Conradi , et al. November 9, 2 | 2010-11-09 |
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ;   et al. | 2010-10-21 |
Microlithographic Projection Exposure Apparatus App 20100231883 - Dodoc; Aurelian ;   et al. | 2010-09-16 |
Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2 | 2010-08-24 |
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 7,777,963 - Conradi , et al. August 17, 2 | 2010-08-17 |
Projection Objective For A Microlithography Apparatus And Method App 20100128367 - Beckenbach; Mariella ;   et al. | 2010-05-27 |
Optical System Of A Microlithographic Projection Exposure Apparatus App 20100073655 - Dodoc; Aurelian ;   et al. | 2010-03-25 |
Correction Of Optical Elements By Correction Light Irradiated In A Flat Manner App 20100060988 - Bleidistel; Sascha ;   et al. | 2010-03-11 |
Projection Exposure Apparatus And Optical System App 20090225297 - Bleidistel; Sascha ;   et al. | 2009-09-10 |
Optical System Of A Microlithographic Projection Exposure Apparatus App 20080309904 - Dodoc; Aurelian ;   et al. | 2008-12-18 |
Method for Improving the Imaging Properties of a Projection Objective, and Such a Projection Objective App 20080310029 - Conradi; Olaf ;   et al. | 2008-12-18 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080239503 - Conradi; Olaf ;   et al. | 2008-10-02 |
Optical imaging device App 20080186467 - Hembacher; Stefan ;   et al. | 2008-08-07 |
Optical System of a Microlithographic Projection Exposure Apparatus App 20080170217 - Dodoc; Aurelian ;   et al. | 2008-07-17 |
Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ;   et al. | 2008-05-08 |
Mirror arrangement and method of manufacturing thereof, optical system and lithographic method of manufacturing a miniaturized device App 20060018045 - Moeller; Timo ;   et al. | 2006-01-26 |