Blalock; Guy T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Blalock; Guy T..The latest application filed is for "resonator for thermo optic device".

Company Profile

0.105.87

Blalock; Guy T. - Boise ID
Blalock; Guy T. - Eagle ID

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Resonator for thermo optic device Grant 9,042,697 - Sandhu , et al. May 26, 2	2015-05-26
Dielectric structures Grant 8,421,140 - Sandhu , et al. April 16, 2	2013-04-16
Resonator For Thermo Optic Device App 20120237165 - Sandhu; Gurtej Singh ; et al.	2012-09-20
Resonator for thermo optic device Grant 8,195,020 - Sandhu , et al. June 5, 2	2012-06-05
Atomic layer deposition methods Grant 8,163,648 - Blalock April 24, 2	2012-04-24
Method and apparatus for surface tension control in advanced photolithography Grant 8,124,320 - Blalock February 28, 2	2012-02-28
Waveguide for thermo optic device Grant 8,111,965 - Blalock , et al. February 7, 2	2012-02-07
Method for removing metal layers formed outside an aperture of a BPSG layer utilizing multiple etching processes including electrochemical-mechanical polishing Grant 8,048,756 - Lee , et al. November 1, 2	2011-11-01
Atomic Layer Deposition Methods App 20110250753 - Blalock; Guy T.	2011-10-13
Waveguide For Thermo Optic Device App 20110206332 - Blalock; Guy T. ; et al.	2011-08-25
Atomic layer deposition methods Grant 7,985,679 - Blalock July 26, 2	2011-07-26
Waveguide for thermo optic device Grant 7,936,955 - Blalock , et al. May 3, 2	2011-05-03
Apparatus for removing material from microfeature workpieces Grant 7,927,181 - Blalock April 19, 2	2011-04-19
Waveguide For Thermo Optic Device App 20100220958 - Blalock; Guy T. ; et al.	2010-09-02
Waveguide for thermo optic device Grant 7,720,341 - Blalock , et al. May 18, 2	2010-05-18
Resistive heater for thermo optic device Grant 7,706,647 - Sandhu , et al. April 27, 2	2010-04-27
Method for forming a microelectronic structure having a conductive material and a fill material with a hardness of 0.04 GPA or higher within an aperture Grant 7,700,436 - Lee , et al. April 20, 2	2010-04-20
Atomic Layer Deposition Methods App 20090280639 - Blalock; Guy T.	2009-11-12
Atomic layer deposition methods Grant 7,582,562 - Blalock September 1, 2	2009-09-01
Atomic layer deposition methods Grant 7,576,012 - Doan , et al. August 18, 2	2009-08-18
Resistive heater for thermo optic device Grant 7,565,039 - Sandhu , et al. July 21, 2	2009-07-21
Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device Grant RE40,790 - Dennison , et al. June 23, 2	2009-06-23
Electronic systems Grant 7,528,430 - Chen , et al. May 5, 2	2009-05-05
Resistive heater for thermo optic device Grant 7,509,005 - Sandhu , et al. March 24, 2	2009-03-24
Apparatus And Method For Removing Material From Microfeature Workpieces App 20090004951 - Blalock; Guy T.	2009-01-01
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly Grant 7,465,406 - Blalock , et al. December 16, 2	2008-12-16
Apparatus and method for removing material from microfeature workpieces Grant 7,438,626 - Blalock October 21, 2	2008-10-21
Waveguide For Thermo Optic Device App 20080226247 - Blalock; Guy T. ; et al.	2008-09-18
Capacitor constructions and semiconductor structures Grant 7,405,438 - Chen , et al. July 29, 2	2008-07-29
Atomic layer deposition methods Grant 7,402,518 - Doan , et al. July 22, 2	2008-07-22
Methods of forming patterned photoresist layers over semiconductor substrates Grant 7,368,399 - Blalock , et al. May 6, 2	2008-05-06
Resonator For Thermo Optic Device App 20080089647 - Sandhu; Gurtej Singh ; et al.	2008-04-17
Semiconductor structures Grant 7,358,587 - Moore , et al. April 15, 2	2008-04-15
Waveguide for thermo optic device Grant 7,359,607 - Blalock , et al. April 15, 2	2008-04-15
Resonator for thermo optic device Grant 7,323,353 - Sandhu , et al. January 29, 2	2008-01-29
Capacitor constructions and rugged silicon-containing surfaces Grant 7,321,148 - Blalock , et al. January 22, 2	2008-01-22
Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby Grant 7,319,075 - Ko , et al. January 15, 2	2008-01-15
Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon Grant 7,291,555 - Sandhu , et al. November 6, 2	2007-11-06
DRAM cells Grant 7,268,382 - Chen , et al. September 11, 2	2007-09-11
Methods for evaluating characteristics of a plasma or the effects of a plasma on a substrate Grant 7,262,612 - Blalock August 28, 2	2007-08-28
Plasma probe systems Grant 7,248,063 - Blalock July 24, 2	2007-07-24
Method and apparatus for surface tension control in advanced photolithography App 20070131247 - Blalock; Guy T.	2007-06-14
Resistive heater for thermo optic device Grant 7,215,838 - Sandhu , et al. May 8, 2	2007-05-08
Atomic layer deposition methods App 20070082468 - Blalock; Guy T.	2007-04-12
Apparatus and method for removing material from microfeature workpieces App 20070049172 - Blalock; Guy T.	2007-03-01
Plasma etching methods Grant 7,183,220 - Blalock , et al. February 27, 2	2007-02-27
Semiconductor device having a substrate an undoped silicon oxide structure and an overlaying doped silicon oxide structure with a sidewall terminating at the undoped silicon oxide structure Grant 7,173,339 - Ko , et al. February 6, 2	2007-02-06
Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon Grant 7,153,769 - Sandhu , et al. December 26, 2	2006-12-26
Field emission tips, arrays, and devices App 20060267472 - Blalock; Guy T. ; et al.	2006-11-30
Resonator for thermo optic device App 20060263027 - Sandhu; Gurtej Singh ; et al.	2006-11-23
Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon App 20060258154 - Sandhu; Gurtej S. ; et al.	2006-11-16
Capacitor Structure App 20060258113 - Sandhu; Gurtej S. ; et al.	2006-11-16
Planarization process for semiconductor substrates App 20060249723 - Doan; Trung T. ; et al.	2006-11-09
Methods of forming patterned photoresist layers over semiconductor substrates App 20060246734 - Blalock; Guy T. ; et al.	2006-11-02
Plasma probe Grant 7,129,724 - Blalock October 31, 2	2006-10-31
Electronic systems App 20060237763 - Chen; Shenlin ; et al.	2006-10-26
Resistive Heater For Thermo Optic Device App 20060228084 - Sandhu; Gurtej Singh ; et al.	2006-10-12
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly App 20060228891 - Blalock; Guy T. ; et al.	2006-10-12
DRAM cells App 20060228857 - Chen; Shenlin ; et al.	2006-10-12
Resonator for thermo optic device Grant 7,120,336 - Sandhu , et al. October 10, 2	2006-10-10
Methods of forming patterned photoresist layers over semiconductor substrates Grant 7,119,031 - Blalock , et al. October 10, 2	2006-10-10
Atomic layer deposition methods Grant 7,115,529 - Doan , et al. October 3, 2	2006-10-03
Capacitor constructions, DRAM constructions, and semiconductive material assemblies Grant 7,115,926 - Moore , et al. October 3, 2	2006-10-03
Method and apparatus for removing adjacent conductive and non-conductive materials of a microelectronic substrate App 20060199351 - Lee; Whonchee ; et al.	2006-09-07
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly Grant 7,097,782 - Blalock , et al. August 29, 2	2006-08-29
Deposition methods and apparatuses providing surface activation Grant 7,094,690 - Sandhu , et al. August 22, 2	2006-08-22
Deposition methods and apparatuses providing surface activation App 20060183322 - Sandhu; Gurtej S. ; et al.	2006-08-17
Field emission tips, arrays, and devices Grant 7,091,654 - Blalock , et al. August 15, 2	2006-08-15
Atomic layer deposition methods App 20060172534 - Doan; Trung Tri ; et al.	2006-08-03
Method for enhancing silicon dioxide to silicon nitride selectivity Grant 7,049,244 - Becker , et al. May 23, 2	2006-05-23
Resistive heater for thermo optic device App 20060098911 - Sandhu; Gurtej Singh ; et al.	2006-05-11
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates Grant 7,037,179 - Blalock May 2, 2	2006-05-02
Atomic layer deposition methods Grant 7,022,605 - Doan , et al. April 4, 2	2006-04-04
Method of forming a conductive contact Grant 7,022,618 - Sharan , et al. April 4, 2	2006-04-04
Resistive heater for thermo optic device Grant 7,020,365 - Sandhu , et al. March 28, 2	2006-03-28
Waveguide for thermo optic device Grant 7,006,746 - Blalock , et al. February 28, 2	2006-02-28
Atomic layer deposition methods App 20060029738 - Doan; Trung Tri ; et al.	2006-02-09
Method for controlling the temperature of a gas distribution plate in a process reactor App 20060021969 - Donohoe; Kevin G. ; et al.	2006-02-02
Methods of forming patterned photoresist layers over semiconductor substrates App 20050287816 - Blalock, Guy T. ; et al.	2005-12-29
Characteristics of a plasma or the methods for evaluating effects of a plasma on a substrate App 20050280426 - Blalock, Guy T.	2005-12-22
Plasma probe systems App 20050270047 - Blalock, Guy T.	2005-12-08
Plasma probe App 20050270046 - Blalock, Guy T.	2005-12-08
Atomic layer deposition methods App 20050260854 - Doan, Trung Tri ; et al.	2005-11-24
Method for controlling the temperature of a gas distribution plate in a process reactor Grant 6,960,534 - Donohoe , et al. November 1, 2	2005-11-01
Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon App 20050227487 - Sandhu, Gurtej S. ; et al.	2005-10-13
Methods for fabricating plasma probes Grant 6,952,108 - Blalock October 4, 2	2005-10-04
Methods of forming materials within openings, and methods of forming isolation regions App 20050208730 - Moore, John T. ; et al.	2005-09-22
Apparatus for improved low pressure inductively coupled high density plasma reactor Grant 6,939,813 - Blalock , et al. September 6, 2	2005-09-06
Methods of forming rugged semiconductor-containing surfaces Grant 6,916,723 - Chen , et al. July 12, 2	2005-07-12
Detection of gas phase materials Grant 6,897,070 - Blalock May 24, 2	2005-05-24
Detection of gas phase materials App 20050098448 - Blalock, Guy T.	2005-05-12
Methods of forming rugged silicon-containing surfaces Grant 6,887,755 - Blalock , et al. May 3, 2	2005-05-03
Methods of forming materials within openings, and methods of forming isolation regions Grant 6,884,725 - Moore , et al. April 26, 2	2005-04-26
Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby Grant 6,875,371 - Ko , et al. April 5, 2	2005-04-05
Plasma probe, methods for fabricating the same, and methods for using the same App 20050057268 - Blalock, Guy T.	2005-03-17
Capacitor constructions and rugged silicon-containing surfaces App 20050051827 - Blalock, Guy T. ; et al.	2005-03-10
Methods Of Forming Rugged Silicon-containing Surfaces App 20050051826 - Blalock, Guy T. ; et al.	2005-03-10
Semiconductor structures, DRAM cells and electronic systems App 20050042824 - Chen, Shenlin ; et al.	2005-02-24
Waveguide for thermo optic device App 20050031284 - Blalock, Guy T. ; et al.	2005-02-10
Resistive heater for thermo optic device App 20050031263 - Sandhu, Gurtej Singh ; et al.	2005-02-10
Apparatus for improved low pressure inductively coupled high density plasma reactor App 20050022935 - Blalock, Guy T. ; et al.	2005-02-03
Resistive heater for thermo optic device App 20050025424 - Sandhu, Gurtej Singh ; et al.	2005-02-03
Dilute cleaning composition and method for using same Grant 6,841,525 - Hineman , et al. January 11, 2	2005-01-11
Apparatus for controlling the temperature of a gas distribution plate in a process reactor Grant 6,833,049 - Donohoe , et al. December 21, 2	2004-12-21
Method for applying uniform pressurized film across wafer Grant 6,828,227 - Blalock , et al. December 7, 2	2004-12-07
Semiconductor structures, and methods of forming rugged semiconductor-containing surfaces App 20040212048 - Chen, Shenlin ; et al.	2004-10-28
Planarization process for semiconductor substrates App 20040209475 - Doan, Trung T. ; et al.	2004-10-21
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates Grant 6,758,735 - Blalock July 6, 2	2004-07-06
Methods and apparatuses for making and using planarizing pads for mechanical and chemical mechanical planarization of microelectronic substrates Grant 6,746,317 - Blalock June 8, 2	2004-06-08
Planarization process for semiconductor substrates Grant 6,743,724 - Doan , et al. June 1, 2	2004-06-01
Capacitor structure App 20040097034 - Sandhu, Gurtej S. ; et al.	2004-05-20
Atomic layer deposition methods App 20040092132 - Doan, Trung Tri ; et al.	2004-05-13
Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly App 20040089631 - Blalock, Guy T. ; et al.	2004-05-13
Method of forming a conductive contact App 20040063314 - Sharan, Sujit ; et al.	2004-04-01
Field emission tips and methods for fabricating the same Grant 6,713,312 - Blalock , et al. March 30, 2	2004-03-30
Resonator for thermo optic device App 20040057687 - Sandhu, Gurtej Singh ; et al.	2004-03-25
Resistive heater for thermo optic device App 20040042722 - Sandhu, Gurtej Singh ; et al.	2004-03-04
Waveguide for thermo optic device App 20040042751 - Blalock, Guy T. ; et al.	2004-03-04
Apparatus for controlling the temperature of a gas distribution plate in a process reactor App 20040035531 - Donohoe, Kevin G. ; et al.	2004-02-26
Method for controlling the temperature of a gas distribution plate in a process reactor App 20040038551 - Donohoe, Kevin G. ; et al.	2004-02-26
Deadhesion method and mechanism for wafer processing Grant 6,693,034 - Blalock , et al. February 17, 2	2004-02-17
Wafer planarization using a uniform layer of material and method for forming uniform layer of material used in semiconductor processing Grant 6,656,402 - Blalock , et al. December 2, 2	2003-12-02
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates Grant 6,652,764 - Blalock November 25, 2	2003-11-25
Method for applying uniform pressurized film across wafer Grant 6,653,722 - Blalock , et al. November 25, 2	2003-11-25
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing Grant 6,645,345 - Blalock , et al. November 11, 2	2003-11-11
Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby App 20030203639 - Ko, Kei-Yu ; et al.	2003-10-30
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing Grant 6,624,089 - Blalock , et al. September 23, 2	2003-09-23
Method for controlling the temperature of a gas distribution plate in a process reactor Grant 6,617,256 - Donohoe , et al. September 9, 2	2003-09-09
Method of forming a capacitor structure Grant 6,617,206 - Sandhu , et al. September 9, 2	2003-09-09
Apparatus for controlling the temperature of a gas distribution plate in a process reactor Grant 6,613,189 - Donohoe , et al. September 2, 2	2003-09-02
Detection Of Gas Phase Materials App 20030138958 - BLALOCK, GUY T.	2003-07-24
Dilute cleaning composition and method for using the same Grant 6,596,647 - Hineman , et al. July 22, 2	2003-07-22
Method for applying uniform pressurized film across wafer App 20030104691 - Blalock, Guy T. ; et al.	2003-06-05
Apparatus for improved low pressure inductively coupled high density plasma reactor App 20030041805 - Blalock, Guy T. ; et al.	2003-03-06
Plasma Etching Process App 20030015496 - SHARAN, SUJIT ; et al.	2003-01-23
Deadhesion method and mechanism for wafer processing Grant 6,506,679 - Blalock , et al. January 14, 2	2003-01-14
Deadhesion method and mechanism for wafer processing App 20030008508 - Blalock, Guy T. ; et al.	2003-01-09
Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor App 20020189759 - Donohoe, Kevin G. ; et al.	2002-12-19
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing App 20020187650 - Blalock, Guy T. ; et al.	2002-12-12
Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor App 20020155644 - Donohoe, Kevin G. ; et al.	2002-10-24
Methods of forming materials within openings, and methods of forming isolation regions App 20020132483 - Moore, John T. ; et al.	2002-09-19
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates App 20020127496 - Blalock, Guy T.	2002-09-12
Field emission tips and methods for fabricating the same App 20020127750 - Blalock, Guy T. ; et al.	2002-09-12
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates App 20020127958 - Blalock, Guy T.	2002-09-12
Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates App 20020124958 - Blalock, Guy T.	2002-09-12
Method for applying uniform pressurized film across wafer App 20020106899 - Blalock, Guy T. ; et al.	2002-08-08
Deposition methods and apparatuses providing surface activation App 20020102818 - Sandhu, Gurtej S. ; et al.	2002-08-01
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing Grant 6,410,459 - Blalock , et al. June 25, 2	2002-06-25
Chemical vapor deposition process of depositing a material over a semiconductor substrate and method of forming a conductive contact App 20020040886 - Sharan, Sujit ; et al.	2002-04-11
Plasma etching process and semiconductor plasma etching process App 20020040885 - Sharan, Sujit ; et al.	2002-04-11
Dilute cleaning composition and method for using same App 20020032136 - Hineman, Max ; et al.	2002-03-14
Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor App 20020026983 - Donohoe, Kevin G. ; et al.	2002-03-07
Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor App 20020014471 - Donohoe, Kevin G. ; et al.	2002-02-07
Dilute cleaning composition and method for using same App 20020016273 - Hineman, Max ; et al.	2002-02-07
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing App 20020015753 - Blalock, Guy T. ; et al.	2002-02-07
Deadhesion method and mechanism for wafer processing App 20020009825 - Blalock, Guy T. ; et al.	2002-01-24
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing App 20020005260 - Blalock, Guy T. ; et al.	2002-01-17
Method of forming flash memory Grant 6,337,244 - Prall , et al. January 8, 2	2002-01-08
Field emission tips and methods for fabricating the same App 20020000548 - Blalock, Guy T. ; et al.	2002-01-03
Method for enhancing oxide to nitride selectivity through the use of independent heat control App 20020000423 - Becker, David S. ; et al.	2002-01-03
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing App 20010055686 - Blalock, Guy T. ; et al.	2001-12-27
Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing App 20010053446 - Blalock, Guy T. ; et al.	2001-12-20
Planarization process for semiconductor substrates Grant 6,331,488 - Doan , et al. December 18, 2	2001-12-18
Planarization process for semiconductor substrates App 20010051430 - Doan, Trung T. ; et al.	2001-12-13
Methods of forming materials within openings, and methods of forming isolation regions App 20010049198 - Moore, John T. ; et al.	2001-12-06
Dilute Cleaning Composition And Method For Using Same App 20010041664 - HINEMAN, MAX ; et al.	2001-11-15
Capacitor constructions, DRAM constructions, semiconductive material assemblies, etching processes, and methods for forming capacitors and DRAMs App 20010034129 - Moore, John T. ; et al.	2001-10-25
Method of etching a substrate Grant 6,287,978 - Becker , et al. September 11, 2	2001-09-11
Plasma etching methods Grant 6,277,759 - Blalock , et al. August 21, 2	2001-08-21
Methods of forming carbon-containing layers Grant 6,251,802 - Moore , et al. June 26, 2	2001-06-26
Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures Grant 6,232,219 - Blalock , et al. May 15, 2	2001-05-15
Plasma producing tools, dual-source plasma etchers, dual-source plasma etching methods, and method of forming planar coil dual-source plasma etchers Grant 6,184,146 - Donohoe , et al. February 6, 2	2001-02-06
Plasma processing tools dual-source plasma etchers, dual-source plasma etching methods, and methods of forming planar coil dual-source plasma etchers Grant 6,136,720 - Donohoe , et al. October 24, 2	2000-10-24
Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor Grant 6,132,552 - Donohoe , et al. October 17, 2	2000-10-17
Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby Grant 6,117,791 - Ko , et al. September 12, 2	2000-09-12
Small pores defined by a disposable internal spacer for use in chalcogenide memories Grant 6,111,264 - Wolstenholme , et al. August 29, 2	2000-08-29
Dual-source plasma etchers, dual-source plasma etching methods, and methods of forming planar coil dual-source plasma etchers Grant 6,074,953 - Donohoe , et al. June 13, 2	2000-06-13
Apparatus for improving the performance of a temperature-sensitive etch process Grant 6,056,850 - Blalock , et al. May 2, 2	2000-05-02
Method of making small pores defined by a disposable internal spacer for use in chalcogenide memories Grant 5,814,527 - Wolstenholme , et al. September 29, 1	1998-09-29
In situ etch process for insulating and conductive materials Grant 5,691,246 - Becker , et al. November 25, 1	1997-11-25
Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples Grant 5,438,011 - Blalock , et al. August 1, 1	1995-08-01
Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors Grant 5,417,826 - Blalock May 23, 1	1995-05-23
Method to slope conductor profile prior to dielectric deposition to improve dielectric step-coverage Grant 5,416,048 - Blalock , et al. May 16, 1	1995-05-16
Situ stringer removal during polysilicon capacitor cell plate delineation Grant 5,378,648 - Lin , et al. January 3, 1	1995-01-03
Use of a faceted etch process to eliminate stringers Grant 5,346,585 - Doan , et al. September 13, 1	1994-09-13
High accuracy via formation for semiconductor devices Grant 5,320,981 - Blalock June 14, 1	1994-06-14
Integrated circuit fabrication process to reduce critical dimension loss during etching Grant 5,259,924 - Mathews , et al. November 9, 1	1993-11-09
Use of a clean up step to form more vertical profiles of polycrystalline silicon sidewalls during the manufacture of a semiconductor device Grant 5,256,245 - Keller , et al. October 26, 1	1993-10-26
Method of conductor isolation from a conductive contact plug Grant 5,252,517 - Blalock , et al. October 12, 1	1993-10-12
Method for making electrical contact with an active area through sub-micron contact openings and a semiconductor device Grant 5,229,326 - Dennison , et al. July 20, 1	1993-07-20