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Patent applications and USPTO patent grants for Bjorkholm; John E..The latest application filed is for "compensation of flare-induced cd changes euvl".
Patent | Date |
---|---|
Compensation of flare-induced CD changes EUVL Grant 6,815,129 - Bjorkholm , et al. November 9, 2 | 2004-11-09 |
Light induced etching of InP by aqueous solutions of H.sub.3 PO.sub.4 Grant 4,518,456 - Bjorkholm May 21, 1 | 1985-05-21 |
Nonlinear optical device using self-trapping of light Grant 4,410,239 - Kaplan , et al. October 18, 1 | 1983-10-18 |
Method for focusing neutral atoms, molecules and ions Grant 4,327,288 - Ashkin , et al. April 27, 1 | 1982-04-27 |
Single beam second harmonic generation in isotropic media Grant 4,303,840 - Bjorkholm , et al. December 1, 1 | 1981-12-01 |
Ring-type Parametric Oscillator Grant 3,628,182 - Ashkin , et al. December 14, 1 | 1971-12-14 |
Parametric Oscillator With Nonresonant Signal Grant 3,628,186 - Ashkin , et al. December 14, 1 | 1971-12-14 |
Frequency Control Of A Pulsed Parametric Oscillator By Radiation Injection Grant 3,617,936 - Bjorkholm November 2, 1 | 1971-11-02 |
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