Patent | Date |
---|
Charged particle beam device Grant 11,456,150 - Bizen , et al. September 27, 2 | 2022-09-27 |
Charged Particle Beam System and Method For Determining Observation Conditions in Charged Particle Beam Device App 20220246394 - ISHIZAKA; Fumiya ;   et al. | 2022-08-04 |
Charged Particle Beam Device App 20220216032 - SHOUJI; Minami ;   et al. | 2022-07-07 |
Charged Particle Beam Device App 20220139667 - Shouji; Minami ;   et al. | 2022-05-05 |
Charged Particle Beam Apparatus And Control Method App 20220115203 - BIZEN; Kaori ;   et al. | 2022-04-14 |
Charged-particle beam apparatus Grant 11,282,671 - Ikeda , et al. March 22, 2 | 2022-03-22 |
Pattern Measurement Method, Measurement System, and Computer-Readable Medium App 20210404801 - DOI; Ayumi ;   et al. | 2021-12-30 |
Charged particle beam apparatus Grant 11,211,224 - Okai , et al. December 28, 2 | 2021-12-28 |
Pattern cross-sectional shape estimation system and program Grant 11,211,226 - Yokosuka , et al. December 28, 2 | 2021-12-28 |
Scanning electron microscope and calculation method for three-dimensional structure depth Grant 11,164,720 - Yasui , et al. November 2, 2 | 2021-11-02 |
Charged Particle Beam Device App 20210313140 - BIZEN; Kaori ;   et al. | 2021-10-07 |
Charged Particle Beam Apparatus App 20210249221 - OKAI; Nobuhiro ;   et al. | 2021-08-12 |
Scanning electron microscope and sample observation method using scanning electron microscope Grant 11,011,348 - Bizen , et al. May 18, 2 | 2021-05-18 |
Electron beam device Grant 10,825,649 - Sohda , et al. November 3, 2 | 2020-11-03 |
Pattern Cross-sectional Shape Estimation System And Program App 20200321189 - YOKOSUKA; Toshiyuki ;   et al. | 2020-10-08 |
Scanning Electron Microscope And Calculation Method For Three-dimensional Structure Depth App 20200234916 - YASUI; Kenji ;   et al. | 2020-07-23 |
Charged-Particle Beam Apparatus App 20200185189 - IKEDA; Uki ;   et al. | 2020-06-11 |
Scanning Electron Microscope And Sample Observation Method Using Scanning Electron Microscope App 20190348255 - BIZEN; Daisuke ;   et al. | 2019-11-14 |
Electron Beam Device App 20190295805 - SOHDA; Yasunari ;   et al. | 2019-09-26 |
Scanning microscope with controlled variable measurement parameters Grant 10,338,367 - Araki , et al. | 2019-07-02 |
Scanning electron microscope and electron trajectory adjustment method therefor Grant 10,262,830 - Bizen , et al. | 2019-04-16 |
Charged particle beam apparatus Grant 10,217,604 - Sakakibara , et al. Feb | 2019-02-26 |
Charged Particle Beam Apparatus App 20180286629 - SAKAKIBARA; Makoto ;   et al. | 2018-10-04 |
Scanning electron microscope and method for controlling same Grant 10,014,160 - Shirahata , et al. July 3, 2 | 2018-07-03 |
Charged particle beam device, simulation method, and simulation device Grant 9,966,225 - Bizen , et al. May 8, 2 | 2018-05-08 |
Scanning Microscope App 20180067294 - ARAKI; Ryoko ;   et al. | 2018-03-08 |
Scanning Electron Microscope And Electron Trajectory Adjustment Method Therefor App 20170263415 - BIZEN; Daisuke ;   et al. | 2017-09-14 |
Charged Particle Beam Device, Simulation Method, And Simulation Device App 20170213695 - BIZEN; Daisuke ;   et al. | 2017-07-27 |
Scanning Electron Microscope And Method For Controlling Same App 20170186583 - SHIRAHATA; Kaori ;   et al. | 2017-06-29 |
Pattern critical dimension measurement equipment and method for measuring pattern critical dimension Grant 9,520,266 - Shirahata , et al. December 13, 2 | 2016-12-13 |
Charged particle beam device and measuring method using the same Grant 9,336,984 - Bizen , et al. May 10, 2 | 2016-05-10 |
Pattern Critical Dimension Measurement Equipment And Method For Measuring Pattern Critical Dimension App 20150041648 - Shirahata; Kaori ;   et al. | 2015-02-12 |
Charged Particle Beam Device And Measuring Method Using The Same App 20140299767 - Bizen; Daisuke ;   et al. | 2014-10-09 |
Scanning Electron Microscope And Length Measuring Method Using The Same App 20130292568 - Bizen; Daisuke ;   et al. | 2013-11-07 |