Biwa; Satoshi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Biwa; Satoshi.The latest application filed is for "substrate processing apparatus and control method thereof".

Company Profile

5.8.10

Biwa; Satoshi - Kumamoto JP
Biwa; Satoshi - Koshi City JP
Biwa; Satoshi - Koshi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cleaning apparatus and cleaning method of substrate processing apparatus Grant 11,295,965 - Yamada , et al. April 5, 2	2022-04-05
Substrate Processing Apparatus And Control Method Thereof App 20200388512 - BIWA; Satoshi ; et al.	2020-12-10
Substrate processing apparatus having cooling member Grant 10,679,845 - Inadomi , et al.	2020-06-09
Substrate Processing Apparatus And Substrate Processing Method App 20200168482 - Inadomi; Hiroaki ; et al.	2020-05-28
Substrate processing apparatus, substrate processing method, and storage medium Grant 10,619,922 - Goshi , et al.	2020-04-14
Substrate processing apparatus Grant 10,593,571 - Inadomi , et al.	2020-03-17
Substrate processing apparatus Grant 10,381,246 - Okamura , et al. A	2019-08-13
Substrate Processing Apparatus And Substrate Processing Method App 20190206702 - GOSHO; Masataka ; et al.	2019-07-04
Cleaning Apparatus And Cleaning Method Of Substrate Processing Apparatus App 20190148182 - YAMADA; Kohei ; et al.	2019-05-16
Substrate processing system Grant 10,276,425 - Wakiyama , et al.	2019-04-30
Substrate Processing Apparatus App 20180138060 - Okamura; Satoshi ; et al.	2018-05-17
Substrate Processing Apparatus App 20170287742 - Inadomi; Hiroaki ; et al.	2017-10-05
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20170254589 - Goshi; Gentaro ; et al.	2017-09-07
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20170256398 - Inadomi; Hiroaki ; et al.	2017-09-07
Substrate Processing System App 20160148827 - Wakiyama; Terufumi ; et al.	2016-05-26
Liquid processing apparatus, liquid processing method and storage medium Grant 8,671,875 - Nagamine , et al. March 18, 2	2014-03-18
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20100040779 - NAGAMINE; Shuichi ; et al.	2010-02-18

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