Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 9,964,858 - De Smit , et al. May 8, 2 | 2018-05-08 |
Lithographic Apparatus And Device Manufacturing Method App 20150331334 - DE SMIT; Joannes Theodoor ;   et al. | 2015-11-19 |
Lithographic apparatus and device manufacturing method Grant 9,110,389 - De Smit , et al. August 18, 2 | 2015-08-18 |
Lithographic apparatus and device manufacturing method Grant 8,363,208 - De Smit , et al. January 29, 2 | 2013-01-29 |
Lithographic Apparatus And Device Manufacturing Method App 20120013872 - DE SMIT; Joannes Theodoor ;   et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method App 20120008117 - DE SMIT; Joannes Theodoor ;   et al. | 2012-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20100128235 - De Smit; Joannes Theodoor ;   et al. | 2010-05-27 |
Lithographic apparatus and device manufacturing method Grant 7,684,008 - De Smit , et al. March 23, 2 | 2010-03-23 |
Apparatus for evacuating a sample Grant 7,456,413 - Buijsse , et al. November 25, 2 | 2008-11-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,397,040 - Driessen , et al. July 8, 2 | 2008-07-08 |
Lithographic apparatus and device manufacturing method Grant 7,317,504 - De Smit , et al. January 8, 2 | 2008-01-08 |
Lithographic apparatus and device manufacturing method Grant 7,315,346 - Van Beek , et al. January 1, 2 | 2008-01-01 |
Apparatus with permanent magnetic lenses Grant 7,285,785 - Buijsse , et al. October 23, 2 | 2007-10-23 |
Apparatus for evacuating a sample App 20060284108 - Buijsse; Bart ;   et al. | 2006-12-21 |
Apparatus with permanent magnetic lenses App 20060197030 - Buijsse; Bart ;   et al. | 2006-09-07 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,084,953 - Driessen , et al. August 1, 2 | 2006-08-01 |
Apparatus with permanent magnetic lenses Grant 7,064,325 - Buijsse , et al. June 20, 2 | 2006-06-20 |
Apparatus with permanent magnetic lenses App 20050236568 - Buijsse, Bart ;   et al. | 2005-10-27 |
Lithographic apparatus and device manufacturing method App 20050225734 - De Smit, Joannes Theodoor ;   et al. | 2005-10-13 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050206863 - Bisschops, Theodorus Hubertus Josephus | 2005-09-22 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 6,930,753 - Bisschops August 16, 2 | 2005-08-16 |
Lithographic apparatus, device manufacturing method and device manufacturing thereby App 20040195527 - Driessen, Johannes Cornelis ;   et al. | 2004-10-07 |
Lithographic apparatus and device manufacturing method App 20040165160 - Van Beek, Michael Cornelis ;   et al. | 2004-08-26 |
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20040100623 - Bisschops, Theodorus Hubertus Josephus | 2004-05-27 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,740,891 - Driessen , et al. May 25, 2 | 2004-05-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,630,984 - Bisschops October 7, 2 | 2003-10-07 |
Method Of Generating Extremely Short-wave Radiation, Method Of Manufacturing A Device By Means Of Said Radiation, Extremely Short-wave Radiation Source Unit And Lithographic Projection Apparatus Provided With Such A Radiation Source Unit Grant 6,493,423 - Bisschops December 10, 2 | 2002-12-10 |
Coil with cooling means App 20020096946 - Bisschops, Theodorus Hubertus Josephus | 2002-07-25 |
Lithographic apparatus, device manufacturing mehtod, and device manufactured thereby App 20020079464 - Driessen, Johannes Cornelis ;   et al. | 2002-06-27 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020027644 - Bisschops, Theodorus Hubertus Josephus | 2002-03-07 |
Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit Grant 6,304,630 - Bisschops , et al. October 16, 2 | 2001-10-16 |
Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit App 20010006217 - Bisschops, Theodorus Hubertus Josephus | 2001-07-05 |