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Patent applications and USPTO patent grants for BIRRU; Krishna.The latest application filed is for "ex situ coating of chamber components for semiconductor processing".
Patent | Date |
---|---|
Ex Situ Coating Of Chamber Components For Semiconductor Processing App 20220275504 - SHANBHAG; Damodar Rajaram ;   et al. | 2022-09-01 |
Ex situ coating of chamber components for semiconductor processing Grant 11,365,479 - Shanbhag , et al. June 21, 2 | 2022-06-21 |
Cleaning System For Removing Deposits From Pump In An Exhaust Of A Substrate Processing System App 20210257194 - BIRRU; Krishna ;   et al. | 2021-08-19 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing App 20200347497 - Shanbhag; Damodar ;   et al. | 2020-11-05 |
Ex situ coating of chamber components for semiconductor processing Grant 10,760,158 - Shanbhag , et al. Sep | 2020-09-01 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing App 20190185999 - Shanbhag; Damodar ;   et al. | 2019-06-20 |
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