BIRKNER; Andreas

Patent Applications and Registrations

Patent applications and USPTO patent grants for BIRKNER; Andreas.The latest application filed is for "method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine".

Company Profile

1.7.13

BIRKNER; Andreas - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine App 20210352835 - BIRKNER; Andreas	2021-11-11
Maintenance apparatus Grant 10,322,919 - Birkner , et al.	2019-06-18
Service Cart App 20180155126 - WEISKE; Ingo ; et al.	2018-06-07
Maintenance Apparatus App 20170267504 - BIRKNER; Andreas ; et al.	2017-09-21
System And Method For Cooling A Computer System App 20130205822 - Heiland; Peter ; et al.	2013-08-15
System And Method For Cooling A Processing System App 20130050931 - Heiland; Peter ; et al.	2013-02-28
Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers Grant 8,089,622 - Birkner , et al. January 3, 2	2012-01-03
Device And Method For Evaluating Defects In The Edge Area Of A Wafer And Use Of The Device In Inspection System For Wafers App 20080232672 - Birkner; Andreas ; et al.	2008-09-25
Method and arrangement for transporting and inspecting semiconductor substrates Grant 7,028,565 - Birkner , et al. April 18, 2	2006-04-18
Substrate conveying module and system made up of substrate conveying module and workstation Grant 6,962,471 - Birkner , et al. November 8, 2	2005-11-08
Arrangement and method for the identification of substrates Grant 6,845,174 - Grau , et al. January 18, 2	2005-01-18
Method and arrangement for transporting and inspecting semiconductor substrates Grant 6,789,436 - Birkner , et al. September 14, 2	2004-09-14
Method and arrangement for transporting and inspecting semiconductor substrates App 20040149055 - Birkner, Andreas ; et al.	2004-08-05
Device for manipulating an object for loading and unloading a clean room Grant 6,736,582 - Mages , et al. May 18, 2	2004-05-18
Method and arrangement for transporting and inspecting semiconductor substrates App 20030140716 - Birkner, Andreas ; et al.	2003-07-31
Arrangement and method for the identification of substrates App 20020097905 - Grau, Dominik ; et al.	2002-07-25
Method and arrangement for transporting and inspecting semiconductor substrates App 20020095999 - Birkner, Andreas ; et al.	2002-07-25
Substrate conveying module and system made up of substrate conveying modile and workstation App 20020051698 - Birkner, Andreas ; et al.	2002-05-02

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