Birang; Manoocher

Patent Applications and Registrations

Patent applications and USPTO patent grants for Birang; Manoocher.The latest application filed is for "imaging systems and methods for image-guided radiosurgery".

Company Profile

3.156.121

Birang; Manoocher - Los Gatos CA
Birang; Manoocher - San Carlos CA
Birang; Manoocher - Los Altos CA US
Birang; Manoocher - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imaging Systems and Methods for Image-Guided Radiosurgery App 20210369217 - Achkire; Younes ; et al.	2021-12-02
Revolving Radiation Collimator App 20210322790 - Wilbur; Raymond ; et al.	2021-10-21
Revolving radiation collimator Grant 11,058,892 - Wilbur , et al. July 13, 2	2021-07-13
Self-Shielded, Integrated-Control Radiosurgery System App 20200146640 - Achkire; Younes ; et al.	2020-05-14
Self-shielded, integrated-control radiosurgery system Grant 10,499,861 - Achkire , et al. Dec	2019-12-10
Self-shielded, Integrated-control Radiosurgery System App 20190069856 - Achkire; Younes ; et al.	2019-03-07
Apparatus and Method for Control of Print Gap App 20180326767 - Lowrance; Robert B. ; et al.	2018-11-15
Eddy current system having an elongated core for in-situ profile measurement Grant 10,105,811 - Miller , et al. October 23, 2	2018-10-23
Apparatus and method for control of print gap Grant 10,029,497 - Lowrance , et al. July 24, 2	2018-07-24
Apparatus and method for control of print gap Grant 9,789,715 - Lowrance , et al. October 17, 2	2017-10-17
Apparatus and Method for Control of Print Gap App 20170246892 - Lowrance; Robert B. ; et al.	2017-08-31
Apparatus and Method for Control of Print Gap App 20170144462 - Lowrance; Robert B. ; et al.	2017-05-25
Apparatus and method for control of print gap Grant 9,656,491 - Lowrance , et al. May 23, 2	2017-05-23
Apparatus and Method for Control of Print Gap App 20170136793 - Lowrance; Robert B. ; et al.	2017-05-18
Apparatus and method for control of print gap Grant 9,550,383 - Lowrance , et al. January 24, 2	2017-01-24
Apparatus and Method for Control of Print Gap App 20160303877 - Lowrance; Robert B. ; et al.	2016-10-20
Polishing pad for endpoint detection and related methods Grant 9,333,621 - Swedek , et al. May 10, 2	2016-05-10
Apparatus and method for control of print gap Grant 9,302,513 - Lowrance , et al. April 5, 2	2016-04-05
Apparatus and Method for Control of Print Gap App 20150328910 - Lowrance; Robert B. ; et al.	2015-11-19
Apparatus and method for control of print gap Grant 9,120,344 - Lowrance , et al. September 1, 2	2015-09-01
Polishing Pad With Two-section Window Having Recess App 20150004888 - Swedek; Boguslaw A. ; et al.	2015-01-01
Polishing pad with two-section window having recess Grant 8,858,298 - Swedek , et al. October 14, 2	2014-10-14
Apparatus and method for in-situ endpoint detection for semiconductor processing operations Grant 8,795,029 - Birang , et al. August 5, 2	2014-08-05
Friction sensor for polishing system Grant 8,758,086 - Miller , et al. June 24, 2	2014-06-24
Transparent Window In A Polishing Pad App 20140038501 - Birang; Manoocher ; et al.	2014-02-06
Polishing Pad For Endpoint Detection And Related Methods App 20130295826 - Swedek; Boguslaw A. ; et al.	2013-11-07
Substrate polishing metrology using interference signals Grant 8,556,679 - Birang , et al. October 15, 2	2013-10-15
Polishing Pad With Two-section Window Having Recess App 20130231032 - Swedek; Boguslaw A. ; et al.	2013-09-05
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 8,506,356 - Birang , et al. August 13, 2	2013-08-13
Polishing pad for endpoint detection and related methods Grant 8,485,862 - Swedek , et al. July 16, 2	2013-07-16
Friction Sensor For Polishing System App 20130167614 - Miller; Gabriel Lorimer ; et al.	2013-07-04
Computer-implemented process control in chemical mechanical polishing Grant 8,460,057 - Swedek , et al. June 11, 2	2013-06-11
Apparatus And Method For In-situ Endpoint Detection For Semiconductor Processing Operations App 20130130413 - Birang; Manoocher ; et al.	2013-05-23
Apparatus And Method For Control Of Print Gap App 20130038649 - LOWRANCE; Robert B. ; et al.	2013-02-14
Friction sensor for polishing system Grant 8,342,906 - Miller , et al. January 1, 2	2013-01-01
Electrophoretic solar cell metallization process and apparatus Grant 8,216,441 - Birang , et al. July 10, 2	2012-07-10
Substrate Polishing Metrology Using Interference Signals App 20120107971 - Birang; Manoocher ; et al.	2012-05-03
Substrate polishing metrology using interference signals Grant 8,092,274 - Birang , et al. January 10, 2	2012-01-10
Eddy Current System for In-Situ Profile Measurement App 20110294402 - Miller; G. Laurie ; et al.	2011-12-01
Electroplating Apparatus Based On An Array Of Anodes App 20110198229 - SINGH; SARAVJEET ; et al.	2011-08-18
Eddy current apparatus and method for in-situ profile measurement Grant 7,999,540 - Miller , et al. August 16, 2	2011-08-16
Polishing System With In-line And In-situ Metrology App 20110195528 - Swedek; Boguslaw A. ; et al.	2011-08-11
Carbon nanotube-based load cells Grant 7,971,489 - Pushparaj , et al. July 5, 2	2011-07-05
Copper deposition chamber having integrated bevel clean with edge bevel removal detection Grant 7,947,131 - Chen , et al. May 24, 2	2011-05-24
Electroplating apparatus and method based on an array of anodes Grant 7,935,240 - Singh , et al. May 3, 2	2011-05-03
Polishing system with in-line and in-situ metrology Grant 7,927,182 - Swedek , et al. April 19, 2	2011-04-19
Substrate Polishing Metrology Using Interference Signals App 20110070808 - Birang; Manoocher ; et al.	2011-03-24
In-situ Profile Measurement In An Electroplating Process App 20110031112 - BIRANG; MANOOCHER ; et al.	2011-02-10
Substrate polishing metrology using interference signals Grant 7,841,926 - Birang , et al. November 30, 2	2010-11-30
Apparatus And Method For In-situ Endpoint Detection For Chemical Mechanical Polishing Operations App 20100297917 - Birang; Manoocher ; et al.	2010-11-25
In-situ profile measurement in an electroplating process Grant 7,837,851 - Birang , et al. November 23, 2	2010-11-23
Apparatus And Method Of Aligning And Positioning A Cold Substrate On A Hot Surface App 20100279516 - Chen; Chen-An ; et al.	2010-11-04
Substrate Polishing Metrology Using Interference Signals App 20100240281 - Birang; Manoocher ; et al.	2010-09-23
Copper Deposition Chamber Having Integrated Bevel Clean With Edge Bevel Removal Detection App 20100218784 - CHEN; CHEN-AN ; et al.	2010-09-02
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 7,775,852 - Birang , et al. August 17, 2	2010-08-17
Substrate polishing metrology using interference signals Grant 7,731,566 - Birang , et al. June 8, 2	2010-06-08
Auxiliary electrode encased in cation exchange membrane tube for electroplating cell Grant 7,727,364 - Singh , et al. June 1, 2	2010-06-01
Integrated endpoint detection system with optical and eddy current monitoring Grant 7,682,221 - Swedek , et al. March 23, 2	2010-03-23
Polishing System With In-line And In-situ Metrology App 20100062684 - Swedek; Boguslaw A. ; et al.	2010-03-11
Carbon Nanotube-based Load Cells App 20100050779 - Pushparaj; Victor L. ; et al.	2010-03-04
Friction Sensor For Polishing System App 20090253351 - Miller; Gabriel Lorimer ; et al.	2009-10-08
Method and apparatus of eddy current monitoring for chemical mechanical polishing Grant 7,591,708 - Birang , et al. September 22, 2	2009-09-22
Computer-implemented method for process control in chemical mechanical polishing Grant 7,585,202 - Swedek , et al. September 8, 2	2009-09-08
Electrophoretic Solar Cell Metallization Process And Apparatus App 20090145760 - BIRANG; MANOOCHER ; et al.	2009-06-11
Apparatus and method of detecting the electroless deposition endpoint Grant 7,534,298 - Shanmugasundram , et al. May 19, 2	2009-05-19
Polishing endpoint detection system and method using friction sensor Grant 7,513,818 - Miller , et al. April 7, 2	2009-04-07
Data processing for monitoring chemical mechanical polishing Grant 7,500,901 - Swedek , et al. March 10, 2	2009-03-10
Methods And Apparatus For Polishing Control App 20080268643 - Birang; Manoocher ; et al.	2008-10-30
System for endpoint detection with polishing pad Grant 7,429,207 - Swedek , et al. September 30, 2	2008-09-30
Substrate polishing metrology using interference signals App 20080227367 - Birang; Manoocher ; et al.	2008-09-18
Methods and apparatus for polishing control Grant 7,400,934 - Birang , et al. July 15, 2	2008-07-15
Polishing pads useful for endpoint detection in chemical mechanical polishing Grant 7,374,477 - Birang , et al. May 20, 2	2008-05-20
Reducing polishing pad deformation Grant 7,354,334 - Birang , et al. April 8, 2	2008-04-08
Chemical Mechanical Polishing With Napped Poromeric App 20080076330 - Birang; Manoocher ; et al.	2008-03-27
Conductive pad with ion exchange membrane for electrochemical mechanical polishing Grant 7,344,432 - Chen , et al. March 18, 2	2008-03-18
Polishing System With In-Line and In-Situ Metrology App 20080064300 - Swedek; Boguslaw A. ; et al.	2008-03-13
Method and Apparatus Of Eddy Current Monitoring For Chemical Mechanical Polishing App 20080064301 - Birang; Manoocher ; et al.	2008-03-13
Reducing Polishing Pad Deformation App 20080020690 - Birang; Manoocher ; et al.	2008-01-24
Polishing Pad For Eddy Current Monitoring App 20080003936 - Swedek; Boguslaw A. ; et al.	2008-01-03
Conductive polishing article for electrochemical mechanical polishing Grant 7,311,592 - Chen , et al. December 25, 2	2007-12-25
Chemical mechanical polishing apparatus with rotating belt Grant 7,303,467 - Birang , et al. December 4, 2	2007-12-04
Polishing system with in-line and in-situ metrology Grant 7,294,039 - Swedek , et al. November 13, 2	2007-11-13
Monitoring A Metal Layer During Chemical Mechanical Polishing App 20070212987 - Hanawa; Hiroji ; et al.	2007-09-13
Copper deposition chamber having integrated bevel clean with edge bevel removal detection App 20070209684 - Chen; Chen-An ; et al.	2007-09-13
Polishing assembly with a window Grant 7,255,629 - Birang , et al. August 14, 2	2007-08-14
Eddy current system for in-situ profile measurement App 20070139043 - Miller; G. Laurie ; et al.	2007-06-21
Integrated Endpoint Detection System With Optical And Eddy Current Monitoring App 20070135958 - Swedek; Boguslaw A. ; et al.	2007-06-14
Monitoring a metal layer during chemical mechanical polishing Grant 7,229,340 - Hanawa , et al. June 12, 2	2007-06-12
Spin-rinse-dryer Grant 7,226,514 - Husain , et al. June 5, 2	2007-06-05
Integrated Electroless Deposition System App 20070111519 - Lubomirsky; Dmitry ; et al.	2007-05-17
Conductive Pad With Ion Exchange Membrane For Electrochemical Mechanical Polishing App 20070099552 - Chen; Liang-Yuh ; et al.	2007-05-03
System for Endpoint Detection with Polishing Pad App 20070077862 - Swedek; Boguslaw A. ; et al.	2007-04-05
Electroplating apparatus based on an array of anodes App 20070068819 - Singh; Saravjeet ; et al.	2007-03-29
Integrated endpoint detection system with optical and eddy current monitoring Grant 7,195,536 - Swedek , et al. March 27, 2	2007-03-27
Conductive Polishing Article For Electrochemical Mechanical Polishing App 20070066201 - Chen; Liang-Yuh ; et al.	2007-03-22
Polishing Assembly With A Window App 20070021037 - Birang; Manoocher ; et al.	2007-01-25
Chemical mechanical polishing apparatus with rotating belt App 20070021043 - Birang; Manoocher ; et al.	2007-01-25
Apparatus and Method for In-Situ Endpoint Detection for Chemical Mechanical Polishing Operations App 20070015441 - Birang; Manoocher ; et al.	2007-01-18
Substrate edge detection Grant 7,153,185 - Birang , et al. December 26, 2	2006-12-26
Polishing System With In-Line and In-Situ Metrology App 20060286904 - Swedek; Boguslaw A. ; et al.	2006-12-21
In-situ profile measurement in an electroplating process App 20060266653 - Birang; Manoocher ; et al.	2006-11-30
Conductive polishing article for electrochemical mechanical polishing Grant 7,137,879 - Chen , et al. November 21, 2	2006-11-21
System and method for in-line metal profile measurement App 20060246822 - Swedek; Boguslaw A. ; et al.	2006-11-02
Auxiliary electrode encased in cation exchange membrane tube for electroplating cell App 20060243598 - Singh; Saravjeet ; et al.	2006-11-02
Profile control using selective heating App 20060226123 - Birang; Manoocher	2006-10-12
Method of forming a polishing pad for endpoint detection Grant 7,118,457 - Swedek , et al. October 10, 2	2006-10-10
Polishing pad with window and method of fabricating a window in a polishing pad Grant 7,118,450 - Birang , et al. October 10, 2	2006-10-10
Eddy current system for in-situ profile measurement Grant 7,112,960 - Miller , et al. September 26, 2	2006-09-26
Chemical mechanical polishing apparatus with rotating belt Grant 7,104,875 - Birang , et al. September 12, 2	2006-09-12
System and method for in-line metal profile measurement Grant 7,101,254 - Swedek , et al. September 5, 2	2006-09-05
Polishing system with in-line and in-situ metrology Grant 7,101,251 - Swedek , et al. September 5, 2	2006-09-05
Determination of position of sensor measurements during polishing Grant 7,097,537 - David , et al. August 29, 2	2006-08-29
Conductive polishing article for electrochemical mechanical polishing App 20060172671 - Chen; Liang-Yuh ; et al.	2006-08-03
Monitoring a metal layer during chemical mechanical polishing App 20060154570 - Hanawa; Hiroji ; et al.	2006-07-13
Chemical mechanical polishing control system and method Grant 7,074,109 - Bennett , et al. July 11, 2	2006-07-11
Methods and apparatus for polishing control App 20060148261 - Birang; Manoocher ; et al.	2006-07-06
Conductive polishing article for electrochemical mechanical polishing Grant 7,066,800 - Chen , et al. June 27, 2	2006-06-27
Carrier head with a flexible membrane Grant 7,040,971 - Zuniga , et al. May 9, 2	2006-05-09
Closed-loop control of wafer polishing in a chemical mechanical polishing system Grant 7,018,275 - Zuniga , et al. March 28, 2	2006-03-28
Patterned wafer thickness detection system App 20060062897 - Gu; Yuping ; et al.	2006-03-23
Article for polishing semiconductor substrates Grant 7,014,538 - Tietz , et al. March 21, 2	2006-03-21
Signal improvement in eddy current sensing Grant 7,016,795 - Swedek , et al. March 21, 2	2006-03-21
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 7,011,565 - Birang , et al. March 14, 2	2006-03-14
Combined eddy current sensing and optical monitoring for chemical mechanical polishing Grant 7,008,297 - Johansson , et al. March 7, 2	2006-03-07
Data processing for monitoring chemical mechanical polishing Grant 7,008,296 - Swedek , et al. March 7, 2	2006-03-07
Methods and apparatus for polishing control Grant 7,008,875 - Birang , et al. March 7, 2	2006-03-07
Substrate monitoring during chemical mechanical polishing Grant 7,008,295 - Wiswesser , et al. March 7, 2	2006-03-07
Method and apparatus of eddy current monitoring for chemical mechanical polishing Grant 7,001,242 - Birang , et al. February 21, 2	2006-02-21
Method and apparatus for monitoring a metal layer during chemical mechanical polishing Grant 7,001,246 - Hanawa , et al. February 21, 2	2006-02-21
Integrated electroless deposition system App 20060033678 - Lubomirsky; Dmitry ; et al.	2006-02-16
Method and apparatus of eddy current monitoring for chemical mechanical polishing App 20060025052 - Birang; Manoocher ; et al.	2006-02-02
Chemical mechanical polishing with multi-stage monitoring of metal clearing Grant 6,991,516 - David , et al. January 31, 2	2006-01-31
Linear polishing sheet with window Grant 6,991,517 - Redeker , et al. January 31, 2	2006-01-31
Conductive polishing article for electrochemical mechanical polishing Grant 6,988,942 - Chen , et al. January 24, 2	2006-01-24
Method of fabricating a window in a polishing pad App 20060014476 - Birang; Manoocher ; et al.	2006-01-19
Method and apparatus for determining polishing endpoint with multiple light sources Grant 6,986,699 - Wiswesser , et al. January 17, 2	2006-01-17
Eddy current sensing of metal removal for chemical mechanical polishing App 20060009128 - Hanawa; Hiroji ; et al.	2006-01-12
Data processing for monitoring chemical mechanical polishing App 20060009131 - Swedek; Boguslaw A. ; et al.	2006-01-12
Integrated endpoint detection system with optical and eddy current monitoring App 20050287929 - Swedek, Boguslaw A. ; et al.	2005-12-29
Method and apparatus for substrate polishing Grant 6,977,036 - Wadensweiler , et al. December 20, 2	2005-12-20
Eddy current sensing of metal removal for chemical mechanical polishing Grant 6,975,107 - Hanawa , et al. December 13, 2	2005-12-13
Integrated endpoint detection system with optical and eddy current monitoring Grant 6,966,816 - Swedek , et al. November 22, 2	2005-11-22
Polishing system with in-line and in-situ metrology App 20050245170 - Swedek, Boguslaw A. ; et al.	2005-11-03
Polishing system with in-line and in-situ metrology Grant 6,939,198 - Swedek , et al. September 6, 2	2005-09-06
Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal Grant 6,930,478 - Hanawa , et al. August 16, 2	2005-08-16
Endpoint system for electro-chemical mechanical polishing App 20050173259 - Mavliev, Rashid ; et al.	2005-08-11
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations App 20050170751 - Birang, Manoocher ; et al.	2005-08-04
Method and apparatus for monitoring a metal layer during chemical mechanical polishing Grant 6,924,641 - Hanawa , et al. August 2, 2	2005-08-02
Method of forming a transparent window in a polishing pad Grant 6,910,944 - Birang , et al. June 28, 2	2005-06-28
Polishing endpoint detection system and method using friction sensor App 20050136800 - Miller, Gabriel Lorimer ; et al.	2005-06-23
Method of forming a polishing pad for endpoint detection App 20050124273 - Swedek, Boguslaw A. ; et al.	2005-06-09
Combined eddy current sensing and optical monitoring for chemical mechanical polishing App 20050101224 - Johansson, Nils ; et al.	2005-05-12
Chemical mechanical polishing with friction-based control Grant 6,887,129 - Birang , et al. May 3, 2	2005-05-03
Apparatus and method of detecting the electroless deposition endpoint App 20050088647 - Shanmugasundram, Arulkumar ; et al.	2005-04-28
Combined eddy current sensing and optical monitoring for chemical mechanical polishing Grant 6,878,038 - Johansson , et al. April 12, 2	2005-04-12
Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal Grant 6,878,036 - Hanawa , et al. April 12, 2	2005-04-12
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,875,078 - Birang , et al. April 5, 2	2005-04-05
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,876,454 - Birang , et al. April 5, 2	2005-04-05
System and method for in-line metal profile measurement App 20050048874 - Swedek, Boguslaw A. ; et al.	2005-03-03
Polishing pad for in-situ endpoint detection Grant 6,860,791 - Birang , et al. March 1, 2	2005-03-01
Carrier head with a flexure Grant 6,857,946 - Zuniga , et al. February 22, 2	2005-02-22
Carrier head with a flexible membrane App 20050037698 - Zuniga, Steven M. ; et al.	2005-02-17
Eddy current system for in-situ profile measurement App 20050024047 - Miller, G. Laurie ; et al.	2005-02-03
Closed-loop control of wafer polishing in a chemical mechanical polishing system App 20050020185 - Zuniga, Steven ; et al.	2005-01-27
Method and apparatus for substrate polishing Grant 6,841,057 - Wadensweiler , et al. January 11, 2	2005-01-11
Conductive polishing article for electrochemical mechanical polishing App 20040266327 - Chen, Liang-Yuh ; et al.	2004-12-30
Data processing for monitoring chemical mechanical polishing App 20040259470 - Swedek, Boguslaw A. ; et al.	2004-12-23
Thermal preconditioning fixed abrasive articles Grant 6,832,948 - Birang , et al. December 21, 2	2004-12-21
System and method for in-line metal profile measurement Grant 6,811,466 - Swedek , et al. November 2, 2	2004-11-02
Chemical mechanical polishing apparatus with rotating belt App 20040209559 - Birang, Manoocher ; et al.	2004-10-21
Method and apparatus for substrate polishing App 20040200733 - Wadensweiler, Ralph ; et al.	2004-10-14
Linear polishing sheet with window App 20040198185 - Redeker, Fred C. ; et al.	2004-10-07
Linear polishing sheet with window Grant 6,796,880 - Redeker , et al. September 28, 2	2004-09-28
Methods and apparatus for polishing control App 20040166685 - Birang, Manoocher ; et al.	2004-08-26
Closed-loop control of wafer polishing in a chemical mechanical polishing system Grant 6,776,692 - Zuniga , et al. August 17, 2	2004-08-17
Signal improvement in eddy current sensing App 20040152310 - Swedek, Boguslaw A. ; et al.	2004-08-05
Substrate monitoring during chemical mechanical polishing App 20040152396 - Wiswesser, Andreas Norbert ; et al.	2004-08-05
Polishing pad for in-situ endpoint detection App 20040106357 - Birang, Manoocher ; et al.	2004-06-03
Chemical mechanical polishing apparatus with rotating belt Grant 6,729,944 - Birang , et al. May 4, 2	2004-05-04
Fixed abrasive articles App 20040082288 - Tietz, James V. ; et al.	2004-04-29
Chemical mechanical polishing with friction-based control App 20040072500 - Birang, Manoocher ; et al.	2004-04-15
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,719,818 - Birang , et al. April 13, 2	2004-04-13
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20040033769 - Zuniga, Steven M. ; et al.	2004-02-19
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations App 20040014395 - Birang, Manoocher ; et al.	2004-01-22
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,676,717 - Birang , et al. January 13, 2	2004-01-13
Polishing pad for endpoint detection and related methods App 20030236055 - Swedek, Boguslaw A. ; et al.	2003-12-25
Method and apparatus for optical monitoring in chemical mechanical polishing Grant 6,659,842 - Wiswesser , et al. December 9, 2	2003-12-09
Platen with debris control for chemical mechanical planarization Grant 6,659,849 - Li , et al. December 9, 2	2003-12-09
Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal App 20030216105 - Hanawa, Hiroji ; et al.	2003-11-20
Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal App 20030206010 - Hanawa, Hiroji ; et al.	2003-11-06
Method for monitoring a metal layer during chemical mechanical polishing App 20030201769 - Hanawa, Hiroji ; et al.	2003-10-30
Method and apparatus for monitoring a metal layer during chemical mechanical polishing App 20030201770 - Hanawa, Hiroji ; et al.	2003-10-30
Optical monitoring in a two-step chemical mechanical polishing process Grant 6,632,124 - Adams , et al. October 14, 2	2003-10-14
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus App 20030190867 - Birang, Manoocher ; et al.	2003-10-09
Linear polishing sheet with window App 20030181137 - Redeker, Fred C. ; et al.	2003-09-25
Chemical mechanical polishing with friction-based control Grant 6,623,334 - Birang , et al. September 23, 2	2003-09-23
Method and apparatus for substrate polishing App 20030173230 - Wadensweiler, Ralph ; et al.	2003-09-18
Polishing pads useful for endpoint detection in chemical mechanical polishing App 20030148721 - Birang, Manoocher ; et al.	2003-08-07
Method and apparatus of eddy current monitoring for chemical mechanical polishing App 20030148706 - Birang, Manoocher ; et al.	2003-08-07
Platen for retaining polishing material Grant 6,592,439 - Li , et al. July 15, 2	2003-07-15
In-situ monitoring of linear substrate polishing operations Grant 6,585,563 - Redeker , et al. July 1, 2	2003-07-01
Optical Monitoring In A Two-step Chemical Mechanical Polishing Process App 20030104760 - Adams, Bret W. ; et al.	2003-06-05
Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane Grant 6,572,446 - Osterheld , et al. June 3, 2	2003-06-03
Method of fabricating an electrostatic chuck Grant 6,557,248 - Shamouilian , et al. May 6, 2	2003-05-06
Spin-rinse-dryer App 20030079762 - Husain, Anwar ; et al.	2003-05-01
Method and apparatus for cleaning a thin disc Grant 6,554,003 - Birang , et al. April 29, 2	2003-04-29
Chemical-Mechanical polishing apparatus and method utilizing an advanceable polishing sheet Grant 6,540,595 - Birang April 1, 2	2003-04-01
Chemical mechanical polishing apparatus with rotating belt App 20030060143 - Birang, Manoocher ; et al.	2003-03-27
Method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,537,133 - Birang , et al. March 25, 2	2003-03-25
Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet Grant 6,520,841 - Birang , et al. February 18, 2	2003-02-18
Gripper for supporting substrate in a vertical orientation App 20030026683 - Govzman, Boris I. ; et al.	2003-02-06
Carrier head for chemical mechanical polishing a substrate Grant 6,514,124 - Zuniga , et al. February 4, 2	2003-02-04
Optical monitoring in a two-step chemical mechanical polishing process Grant 6,506,097 - Adams , et al. January 14, 2	2003-01-14
Optical Monitoring In A Two-step Chemical Mechanical Polishing Process App 20030003845 - Adams, Bret W. ; et al.	2003-01-02
Integrated endpoint detection system with optical and eddy current monitoring App 20020164925 - Swedek, Boguslaw A. ; et al.	2002-11-07
Gripper for supporting substrate in a vertical orientation Grant 6,474,712 - Govzman , et al. November 5, 2	2002-11-05
Wafer presence sensor for detecting quartz wafers App 20020117188 - Galburt, Vladimir ; et al.	2002-08-29
Conductive polishing article for electrochemical mechanical polishing App 20020119286 - Chen, Liang-Yuh ; et al.	2002-08-29
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20020086624 - Zuniga, Steven M. ; et al.	2002-07-04
Magnetically coupled substrate roller Grant 6,412,503 - Lerner , et al. July 2, 2	2002-07-02
Inspection device having wafer exchange stage App 20020075478 - Nulman, Jaim ; et al.	2002-06-20
Combined eddy current sensing and optical monitoring for chemical mechanical polishing App 20020077031 - Johansson, Nils ; et al.	2002-06-20
Apparatus for transferring semiconductor substrates using an input module Grant 6,406,359 - Birang , et al. June 18, 2	2002-06-18
Carrier head with local pressure control for a chemical mechanical polishing apparatus App 20020072313 - Zuniga, Steven M. ; et al.	2002-06-13
Method and apparatus for detecting polishing endpoint with optical monitoring Grant 6,399,501 - Birang , et al. June 4, 2	2002-06-04
Determining when to replace a retaining ring used in substrate polishing operations Grant 6,390,908 - Chen , et al. May 21, 2	2002-05-21
Adaptive endpoint detection for chemical mechanical polishing Grant 6,383,058 - Birang , et al. May 7, 2	2002-05-07
Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet App 20020052171 - Birang, Manoocher ; et al.	2002-05-02
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet Grant 6,379,231 - Birang , et al. April 30, 2	2002-04-30
Delivery of polishing agents in a wafer processing system Grant 6,348,124 - Garbett , et al. February 19, 2	2002-02-19
Method And Apparatus For Detecting Polishing Endpoint With Optical Monitoring App 20020016066 - BIRANG, MANOOCHER ; et al.	2002-02-07
Conditioner for polishing pads App 20020016136 - Birang, Manoocher ; et al.	2002-02-07
Method and apparatus for optical monitoring in chemical mechanical polishing App 20020013120 - Wiswesser, Andreas Norbert ; et al.	2002-01-31
Method and apparatus for determining polishing endpoint with multiple light sources App 20010027080 - Wiswesser, Andreas Norbert ; et al.	2001-10-04
Method and apparatus for optical monitoring in chemical mechanical polishing Grant 6,296,548 - Wiswesser , et al. October 2, 2	2001-10-02
Method and apparatus for determining substrate layer thickness during chemical mechanical polishing Grant 6,247,998 - Wiswesser , et al. June 19, 2	2001-06-19
Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet Grant 6,244,935 - Birang , et al. June 12, 2	2001-06-12
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20010000775 - Zuniga, Steven M. ; et al.	2001-05-03
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 6,183,354 - Zuniga , et al. February 6, 2	2001-02-06
Carrier head for chemical mechanical polishing a substrate Grant 6,159,079 - Zuniga , et al. December 12, 2	2000-12-12
End effector for pad conditioning Grant 6,159,087 - Birang , et al. December 12, 2	2000-12-12
Carrier head with local pressure control for a chemical mechanical polishing apparatus Grant 6,146,259 - Zuniga , et al. November 14, 2	2000-11-14
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 6,045,439 - Birang , et al. April 4, 2	2000-04-04
Electrostatic chuck with improved erosion resistance Grant 6,023,405 - Shamouilian , et al. February 8, 2	2000-02-08
Magnetic carrier head for chemical mechanical polishing Grant 5,989,103 - Birang , et al. November 23, 1	1999-11-23
Apparatus and method for in-situ monitoring of chemical mechanical polishing operations Grant 5,964,643 - Birang , et al. October 12, 1	1999-10-12
Linear conditioner apparatus for a chemical mechanical polishing system Grant 5,938,507 - Ko , et al. August 17, 1	1999-08-17
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 5,893,796 - Birang , et al. April 13, 1	1999-04-13
Electrostatic chuck with fluid flow regulator Grant 5,883,778 - Sherstinsky , et al. March 16, 1	1999-03-16
Apparatus for measuring the profile of a polishing pad in a chemical mechanical polishing system Grant 5,875,559 - Birang , et al. March 2, 1	1999-03-02
Endpoint detector for a chemical mechanical polishing system Grant 5,846,882 - Birang December 8, 1	1998-12-08
Electrostatic chuck with improved erosion resistance Grant 5,822,171 - Shamouilian , et al. October 13, 1	1998-10-13
Method of making electrostatic chuck with conformal insulator film Grant 5,753,132 - Shamouilian , et al. May 19, 1	1998-05-19
Electrostatic chuck with conformal insulator film Grant 5,745,331 - Shamouilian , et al. April 28, 1	1998-04-28
Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process Grant 5,743,784 - Birang , et al. April 28, 1	1998-04-28
Apparatus and method for detecting surface roughness in a chemical polishing pad conditioning process Grant 5,708,506 - Birang January 13, 1	1998-01-13
Electrostatic chuck Grant 5,671,117 - Sherstinsky , et al. September 23, 1	1997-09-23
Multi-electrode electrostatic chuck Grant 5,646,814 - Shamouilian , et al. July 8, 1	1997-07-08
Method of making a dielectric chuck Grant 5,634,266 - Sherstinsky , et al. June 3, 1	1997-06-03
Releasing a workpiece from an electrostatic chuck Grant 5,612,850 - Birang , et al. March 18, 1	1997-03-18
Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer Grant 5,491,603 - Birang , et al. February 13, 1	1996-02-13
Releasing a workpiece from an electrostatic chuck Grant 5,459,632 - Birang , et al. October 17, 1	1995-10-17
Method and apparatus for displaying process endpoint signal based on emission concentration within a processing chamber Grant 5,343,412 - Birang * August 30, 1	1994-08-30
Method and apparatus for endpoint detection in a semiconductor wafer etching system Grant 5,151,584 - Ebbing , et al. September 29, 1	1992-09-29
Method and apparatus for displaying process end point signal based on emission concentration within a processing chamber Grant 5,097,430 - Birang March 17, 1	1992-03-17
Method and apparatus for endpoint detection in a semiconductor wafer etching system Grant 5,077,464 - Ebbing , et al. December 31, 1	1991-12-31
Method and apparatus for endpoint detection in a semiconductor wafer etching system Grant 4,953,982 - Ebbing , et al. September 4, 1	1990-09-04

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