Patent | Date |
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System and method for controlling a stage assembly App 20070268475 - Binnard; Mike | 2007-11-22 |
Stage assembly including a reaction assembly having a connector assembly Grant 7,221,433 - Binnard May 22, 2 | 2007-05-22 |
System and method for resetting a reaction mass assembly of a stage assembly Grant 6,958,808 - Tanaka , et al. October 25, 2 | 2005-10-25 |
Stage assembly including a reaction assembly having a connector assembly App 20050162635 - Binnard, Mike | 2005-07-28 |
System and method for holding a device with minimal deformation Grant 6,888,620 - Lee , et al. May 3, 2 | 2005-05-03 |
System and method for resetting a reaction mass assembly of a stage assembly Grant 6,885,430 - Tanaka , et al. April 26, 2 | 2005-04-26 |
Holder mover for a stage assembly Grant 6,882,126 - Watson , et al. April 19, 2 | 2005-04-19 |
System and method for calibrating mirrors of a stage assembly Grant 6,842,248 - Binnard , et al. January 11, 2 | 2005-01-11 |
Stage assembly including a reaction mass assembly Grant 6,757,053 - Hazelton , et al. June 29, 2 | 2004-06-29 |
Multiple chamber fluid mount Grant 6,731,372 - Binnard , et al. May 4, 2 | 2004-05-04 |
System and method for resetting a reaction mass assembly of a stage assembly App 20040051854 - Tanaka, Keiichi ;   et al. | 2004-03-18 |
System and method for resetting a reaction mass assembly of a stage assembly App 20040012768 - Tanaka, Keiichi ;   et al. | 2004-01-22 |
Stage assembly including a reaction assembly App 20030218732 - Watson, Douglas C. ;   et al. | 2003-11-27 |
Stage assembly including a reaction assembly that is connected by actuators App 20030202167 - Binnard, Mike | 2003-10-30 |
Stage assembly including a reaction assembly that is connected by actuators Grant 6,603,531 - Binnard August 5, 2 | 2003-08-05 |
Stage assembly including a reaction assembly Grant 6,593,997 - Watson , et al. July 15, 2 | 2003-07-15 |
System and method for supporting a device holder with separate components App 20030098965 - Binnard, Mike ;   et al. | 2003-05-29 |
Fluid connector for a stage assembly App 20030098963 - Phillips, Alton H. ;   et al. | 2003-05-29 |
System and method for holding a device with minimal deformation App 20030098964 - Lee, Martin E. ;   et al. | 2003-05-29 |
Holder mover for a stage assembly App 20030098664 - Watson, Douglas C. ;   et al. | 2003-05-29 |
Multiple chamber fluid mount App 20020140916 - Binnard, Mike ;   et al. | 2002-10-03 |
Multiple point support assembly for a stage App 20020137358 - Binnard, Mike ;   et al. | 2002-09-26 |
Exposure apparatus and method App 20020075467 - Tanaka, Keiichi ;   et al. | 2002-06-20 |