| Patent | Date |
|---|
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
Grant 11,300,884 - Smith , et al. April 12, 2 | 2022-04-12 |
Euv lithography system for dense line patterning
Grant 11,099,483 - Flagello , et al. August 24, 2 | 2021-08-24 |
Power minimizing controller for a stage assembly
Grant 11,075,573 - Hemati , et al. July 27, 2 | 2021-07-27 |
Dense line extreme ultraviolet lithography system with distortion matching
Grant 11,067,900 - Binnard July 20, 2 | 2021-07-20 |
High-resolution position encoder with image sensor and encoded target pattern
Grant 11,061,338 - Wells , et al. July 13, 2 | 2021-07-13 |
EUV lithography system for dense line patterning
Grant 10,890,849 - Flagello , et al. January 12, 2 | 2021-01-12 |
Dense Line Extreme Ultraviolet Lithography System With Distortion Matching
App 20200326633 - Binnard; Michael B. | 2020-10-15 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,747,117 - Binnard , et al. A | 2020-08-18 |
Dense line extreme ultraviolet lithography system with distortion matching
Grant 10,712,671 - Binnard | 2020-07-14 |
Illumination System With Curved 1d-patterned Mask For Use In Euv-exposure Tool
App 20200073251 - Smith; Daniel Gene ; et al. | 2020-03-05 |
System and method for control of a workpiece and a chuck
Grant 10,394,138 - Binnard , et al. A | 2019-08-27 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20190235393 - Binnard; Michael B. ; et al. | 2019-08-01 |
Dense Line Extreme Ultraviolet Lithography System With Distortion Matching
App 20190212663 - Binnard; Michael B. | 2019-07-11 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,295,911 - Binnard , et al. | 2019-05-21 |
Power Minimizing Controller For A Stage Assembly
App 20190020257 - Hemati; Neyram ; et al. | 2019-01-17 |
Array of encoders for alignment measurement
Grant 10,078,269 - Goodwin , et al. September 18, 2 | 2018-09-18 |
High-resolution Position Encoder With Image Sensor And Encoded Target Pattern
App 20180217510 - Wells; J. Kyle ; et al. | 2018-08-02 |
System And Method For Control Of A Workpiece And A Chuck
App 20180074417 - Binnard; Michael B. ; et al. | 2018-03-15 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20170336720 - Binnard; Michael B. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336716 - Flagello; Donis G. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336715 - Flagello; Donis G. ; et al. | 2017-11-23 |
System and method for controlling a temperature of a reaction assembly
Grant 9,778,579 - Pharand , et al. October 3, 2 | 2017-10-03 |
Array Of Encoders For Alignment Measurement
App 20170097574 - GOODWIN; ERIC PETER ; et al. | 2017-04-06 |
Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same
Grant 9,529,353 - Yang , et al. December 27, 2 | 2016-12-27 |
Method for determining a commutation offset and for determining a compensation map for a stage
Grant 9,465,305 - Yang , et al. October 11, 2 | 2016-10-11 |
Coil Switching Method for Moving Magnet Planar Motor
App 20150241794 - Yang; Pai-Hsueh ; et al. | 2015-08-27 |
Laser Radar Tracking Systems
App 20150185324 - Cooper; Alexander ; et al. | 2015-07-02 |
System And Method For Controlling A Temperature Of A Reaction Assembly
App 20150146176 - Pharand; Michel ; et al. | 2015-05-28 |
Method for determing a commutation offset and for determining a compensation map for a stage
Grant 9,013,134 - Yang , et al. April 21, 2 | 2015-04-21 |
Control systems and methods for compensating for effects of a stage motor
Grant 8,853,988 - Binnard , et al. October 7, 2 | 2014-10-07 |
Three Axis Linear Actuator
App 20140132087 - Coakley; Scott ; et al. | 2014-05-15 |
Compensating temperature effects in magnetic actuators
Grant 8,705,222 - Coakley , et al. April 22, 2 | 2014-04-22 |
High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations
Grant 8,705,170 - Williamson , et al. April 22, 2 | 2014-04-22 |
Magnet Array Configuration for Higher Efficiency Planar Motor
App 20130258307 - Mahadeswaraswamy; Chetan ; et al. | 2013-10-03 |
Parallel Linkage and Actuator Motor Coil Designs for Tube Carrier
App 20130255414 - Bjork; Matthew Parker-McCormick ; et al. | 2013-10-03 |
Coil variations for an oval coil planar motor
Grant 8,492,934 - Binnard July 23, 2 | 2013-07-23 |
Hybrid Cooling And Thermal Shield For Electromagnetic Actuators
App 20130164687 - Binnard; Michael B. ; et al. | 2013-06-27 |
Temperature Control Of A Mover With Active Bypass, Predictive Feedforward Control, And Phase Change Housing
App 20130140372 - MAHADESWARASWAMY; Chetan ; et al. | 2013-06-06 |
Three axis linear actuator
Grant 8,432,072 - Coakley , et al. April 30, 2 | 2013-04-30 |
Modular Coil Arrays For Planar And Linear Motors
App 20130069449 - Pharand; Michel ; et al. | 2013-03-21 |
Method And Apparatus For Driving A Stage Using Angled Actuators For Pushpoint Matching
App 20130033122 - Binnard; Michael B. | 2013-02-07 |
Measurement Stage With Tube Carrier
App 20120325027 - Cooper; Alexander ; et al. | 2012-12-27 |
High efficiency voice coil motor
Grant 8,212,435 - Binnard , et al. July 3, 2 | 2012-07-03 |
Method For Determing A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120127447 - Yang; Pai-Hsueh ; et al. | 2012-05-24 |
Method For Determining A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120113405 - Yang; Pai-Hsueh ; et al. | 2012-05-10 |
Methods For Limiting Counter-mass Trim-motor Force And Stage Assemblies Incorporating Same
App 20120069316 - Yang; Pai-Hsueh ; et al. | 2012-03-22 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
Grant 8,140,288 - Yang , et al. March 20, 2 | 2012-03-20 |
Microchannel-cooled Coils Of Electromagnetic Actuators Exhibiting Reduced Eddy-current Drag
App 20120062866 - Binnard; Michael B. ; et al. | 2012-03-15 |
Compensating Temperature Effects in Magnetic Actuators
App 20100284119 - Coakley; Scott ; et al. | 2010-11-11 |
Substrate Handling Structure
App 20100245797 - Goodwin; Eric Peter ; et al. | 2010-09-30 |
Coil Variations for an Oval Coil Planar Motor
App 20100238425 - Binnard; Michael B. | 2010-09-23 |
Control Systems and Methods for Compensating for Effects of a Stage Motor
App 20100237819 - Binnard; Michael B. ; et al. | 2010-09-23 |
Three Degree Of Movement Mover And Method For Controlling A Three Degree Of Movement Mover
App 20100167556 - Totsu; Masahiro ; et al. | 2010-07-01 |
Shield Layer Plus Refrigerated Backside Cooling For Planar Motors
App 20100156198 - Cooper; Alexander ; et al. | 2010-06-24 |
Optical Imaging System and Method for Imaging Up to Four Reticles to a Single Imaging Location
App 20100091257 - Williamson; David M. ; et al. | 2010-04-15 |
Planar Motor With Wedge Shaped Magnets And Diagonal Magnetization Directions
App 20100090545 - Binnard; Michael B. ; et al. | 2010-04-15 |
Iron core motor driven automatic reticle blind
Grant 7,692,768 - Binnard , et al. April 6, 2 | 2010-04-06 |
Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations
App 20100053588 - Binnard; Michael B. ; et al. | 2010-03-04 |
High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair of Imaging Locations
App 20100053738 - Williamson; David M. ; et al. | 2010-03-04 |
Split coil linear motor for z force
Grant 7,656,062 - Binnard February 2, 2 | 2010-02-02 |
Apparatus And Method For Exposing Adjacent Sites On A Substrate
App 20090310115 - Novak; W. Thomas ; et al. | 2009-12-17 |
Exposure Apparatus With A Scanning Illumination Beam
App 20090303454 - Binnard; Michael B. ; et al. | 2009-12-10 |
Apparatus For Scanning Sites On A Wafer Along A Short Dimension Of The Sites
App 20090305171 - Goodwin; Eric Peter ; et al. | 2009-12-10 |
Three Axis Linear Actuator
App 20090263747 - Coakley; Scott ; et al. | 2009-10-22 |
Lithography apparatus with flexibly supported optical system
App 20090033895 - Binnard; Michael B. ; et al. | 2009-02-05 |
Lithography apparatus and method utilizing pendulum interferometer system
Grant 7,466,396 - Binnard , et al. December 16, 2 | 2008-12-16 |
Linear motor driven automatic reticle blind
App 20080285003 - Binnard; Michael B. ; et al. | 2008-11-20 |
Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus
App 20080285004 - Binnard; Michael B. ; et al. | 2008-11-20 |
System And Method For Measuring And Mapping A Sideforce For A Mover
App 20080285005 - Gery; Jean-Marc ; et al. | 2008-11-20 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
App 20080275661 - Yang; Pai-Hsueh ; et al. | 2008-11-06 |
Two Degree Of Freedom Movers With Overlapping Coils
App 20080252151 - Binnard; Michael B. ; et al. | 2008-10-16 |
High Efficiency Voice Coil Motor
App 20080165450 - Binnard; Michael B. ; et al. | 2008-07-10 |
High Efficiency Voice Coil Motor
App 20080165451 - Binnard; Michael B. ; et al. | 2008-07-10 |
Fine Stage Z Support Apparatus
App 20080105069 - Binnard; Michael B. ; et al. | 2008-05-08 |
High efficiency voice coil motor
Grant 7,368,838 - Binnard , et al. May 6, 2 | 2008-05-06 |
Identifying and compensating force-ripple and side-forces produced by linear actuators
App 20080067968 - Binnard; Michael B. ; et al. | 2008-03-20 |
Fine stage "Z" support apparatus
App 20080029682 - Binnard; Michael B. | 2008-02-07 |
Iron Core Motor Driven Automatic Reticle Blind
App 20080002173 - Binnard; Michael B. ; et al. | 2008-01-03 |
Six Degree-of-Freedom Stage Apparatus
App 20070267995 - Binnard; Michael B. ; et al. | 2007-11-22 |
Lithography apparatus and method utilizing pendulum interferometer system
App 20070139635 - Binnard; Michael B. ; et al. | 2007-06-21 |
System for cooling motors
App 20060232145 - Binnard; Michael B. ; et al. | 2006-10-19 |
Split Coil Linear Motor for Z Force
App 20060232142 - Binnard; Michael B. | 2006-10-19 |
High Efficiency Voice Coil Motor
App 20060091733 - Binnard; Michael B. ; et al. | 2006-05-04 |
Split coil linear motor for z force
App 20060049697 - Binnard; Michael B. | 2006-03-09 |
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
Grant 6,987,559 - Phillips , et al. January 17, 2 | 2006-01-17 |
Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus
App 20050057102 - Totsu, Masahiro ; et al. | 2005-03-17 |
Square wafer chuck with mirror
App 20040145751 - Binnard, Michael B. | 2004-07-29 |
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
App 20040080729 - Phillips, Alton H. ; et al. | 2004-04-29 |
System and method to control planar motors
Grant 6,650,079 - Binnard November 18, 2 | 2003-11-18 |
System and method to control planar motors
App 20020180395 - Binnard, Michael B. | 2002-12-05 |
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