Patent | Date |
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Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element Grant 11,372,334 - Bauer , et al. June 28, 2 | 2022-06-28 |
Method For Producing A Reflective Optical Element, Reflective Optical Element, And Use Of A Reflective Optical Element App 20200096874 - Bauer; Markus ;   et al. | 2020-03-26 |
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element Grant 10,534,269 - Bauer , et al. Ja | 2020-01-14 |
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element Grant 10481501 - | 2019-11-19 |
Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb | 2019-02-12 |
Method For Producing A Reflective Optical Element, Reflective Optical Element, And Use Of A Reflective Optical Element App 20170315453 - Bauer; Markus ;   et al. | 2017-11-02 |
Method and device for connecting an optical element to a frame Grant 9,604,299 - Schoeppach , et al. March 28, 2 | 2017-03-28 |
EUV microlithography illumination optical system and EUV attenuator for same Grant 9,482,959 - Schmidts , et al. November 1, 2 | 2016-11-01 |
Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ;   et al. | 2015-06-18 |
Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2 | 2015-06-02 |
Method And Device For Connecting An Optical Element To A Frame App 20150008215 - Schoeppach; Armin ;   et al. | 2015-01-08 |
Method and device for connecting an optical element to a frame Grant 8,705,006 - Schoeppach , et al. April 22, 2 | 2014-04-22 |
Optical module with minimized overrun of the optical element Grant 8,441,747 - Heintel , et al. May 14, 2 | 2013-05-14 |
Euv Microlithography Illumination Optical System And Euv Attenuator For Same App 20120069313 - Schmidts; Nicolas ;   et al. | 2012-03-22 |
Optical Component Having An Improved Transient Thermal Behavior And Method For Improving The Transient Thermal Behavior Of An Optical Component App 20110211180 - Egle; Wilhelm ;   et al. | 2011-09-01 |
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component Grant 7,965,456 - Egle , et al. June 21, 2 | 2011-06-21 |
Method For Producing An Optical Element Through A Molding Process, Optical Element Produced According To The Method, Collector, And Lighting System App 20100182710 - DINGER; Udo ;   et al. | 2010-07-22 |
Method And Device For Connecting An Optical Element To A Frame App 20090244508 - Schoeppach; Armin ;   et al. | 2009-10-01 |
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component Grant 7,483,223 - Egle , et al. January 27, 2 | 2009-01-27 |
Optical Component Having an Improved Transient Thermal Behavior and Method for Improving the Transient Thermal Behavior of an Optical Component App 20090021950 - Egle; Wilhelm ;   et al. | 2009-01-22 |
Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ;   et al. | 2008-09-18 |
Optical module with minimized overrun of the optical element App 20080204689 - Heintel; Willi ;   et al. | 2008-08-28 |
Device for Controlling the Temperature of Elements App 20070252959 - Schwertner; Tilmann ;   et al. | 2007-11-01 |
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component App 20060093253 - Egle; Wilhelm ;   et al. | 2006-05-04 |
Method of connecting a multiplicity of optical elements to a basic body Grant 7,034,998 - Melzer , et al. April 25, 2 | 2006-04-25 |
Optical beam guidance system and method for preventing contamination of optical components contained therein Grant 6,824,277 - Freitag , et al. November 30, 2 | 2004-11-30 |
Optical beam guidance system and method for preventing contamination of optical components contained therein App 20020145808 - Freitag, Ansgar ;   et al. | 2002-10-10 |
Method of connecting a multiplicity of optical elements to a basic body App 20020021507 - Melzer, Frank ;   et al. | 2002-02-21 |