Patent | Date |
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Producing a buried cavity in a semiconductor substrate Grant 11,393,714 - Roeth , et al. July 19, 2 | 2022-07-19 |
Method for Manufacturing a Sensor Device with a Buried Deep Trench Structure and Sensor Device App 20210167117 - Glemet; Magali ;   et al. | 2021-06-03 |
Producing A Buried Cavity In A Semiconductor Substrate App 20210013087 - ROETH; Andre ;   et al. | 2021-01-14 |
Sensor structures, systems and methods with improved integration and optimized footprint Grant 10,060,816 - Kautzsch , et al. August 28, 2 | 2018-08-28 |
Sensor structures, systems and methods with improved integration and optimized footprint Grant 9,752,943 - Kautzsch , et al. September 5, 2 | 2017-09-05 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint App 20170089790 - Kautzsch; Thoralf ;   et al. | 2017-03-30 |
Sensor structures, systems and methods with improved integration and optimized footprint Grant 9,546,923 - Kautzsch , et al. January 17, 2 | 2017-01-17 |
Semiconductor structure with lamella defined by singulation trench Grant 9,527,725 - Binder , et al. December 27, 2 | 2016-12-27 |
Micromechanical system and method for manufacturing a micromechanical system Grant 9,382,111 - Kautzsch , et al. July 5, 2 | 2016-07-05 |
Method for manufacturing a micromechanical system Grant 9,376,314 - Kautzsch , et al. June 28, 2 | 2016-06-28 |
Wafer, a method for processing a wafer, and a method for processing a carrier Grant 9,236,241 - Kautzsch , et al. January 12, 2 | 2016-01-12 |
Micromechanical System And Method For Manufacturing A Micromechanical System App 20150375999 - Kautzsch; Thoralf ;   et al. | 2015-12-31 |
Micromechanical System And Method For Manufacturing A Micromechanical System App 20150375998 - Kautzsch; Thoralf ;   et al. | 2015-12-31 |
Wafer, A Method For Processing A Wafer, And A Method For Processing A Carrier App 20150318166 - KAUTZSCH; Thoralf ;   et al. | 2015-11-05 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint App 20150210533 - Kautzsch; Thoralf ;   et al. | 2015-07-30 |
Method Of Fabricating Isolating Semiconductor Structures App 20150203350 - KAUTZSCH; Thoralf ;   et al. | 2015-07-23 |
Method of fabricating isolating semiconductor structures using a layout of trenches and openings Grant 8,994,127 - Kautzsch , et al. March 31, 2 | 2015-03-31 |
Semiconductor manufacturing and semiconductor device with semiconductor structure Grant 8,921,974 - Kautzsch , et al. December 30, 2 | 2014-12-30 |
Semiconductor manufacturing and semiconductor device with semiconductor structure Grant 08921974 - | 2014-12-30 |
Method of providing a semiconductor structure with forming a sacrificial structure Grant 8,921,954 - Kautzsch , et al. December 30, 2 | 2014-12-30 |
Semiconductor Structure With Lamella Defined By Singulation Trench App 20140227818 - Binder; Boris ;   et al. | 2014-08-14 |
Semiconductor structure with lamella defined by singulation trench Grant 8,723,276 - Binder , et al. May 13, 2 | 2014-05-13 |
Acceleration sensor Grant 8,627,720 - Kautzsch , et al. January 14, 2 | 2014-01-14 |
Method Of Providing A Semiconductor Structure With Forming A Sacrificial Structure App 20130334624 - Kautzsch; Thoralf ;   et al. | 2013-12-19 |
Semiconductor Manufacturing and Semiconductor Device with semiconductor structure App 20130328143 - KAUTZSCH; Thoralf ;   et al. | 2013-12-12 |
Method of providing a semiconductor structure with forming a sacrificial structure Grant 8,518,732 - Kautzsch , et al. August 27, 2 | 2013-08-27 |
Semiconductor manufacturing and semiconductor device with semiconductor structure Grant 8,481,400 - Kautzsch , et al. July 9, 2 | 2013-07-09 |
Method of fabricating isolated semiconductor structures App 20130134530 - KAUTZSCH; Thoralf ;   et al. | 2013-05-30 |
Acceleration Sensor App 20130001712 - Kautzsch; Thoralf ;   et al. | 2013-01-03 |
Acceleration sensor Grant 8,266,962 - Kautzsch , et al. September 18, 2 | 2012-09-18 |
Method of Providing a Semiconductor Structure with Forming A Sacrificial Structure App 20120161254 - Kautzsch; Thoralf ;   et al. | 2012-06-28 |
Semiconductor Manufacturing and Semiconductor Device with semiconductor structure App 20120068277 - KAUTZSCH; Thoralf ;   et al. | 2012-03-22 |
Semiconductor Structure with Lamella Defined by Singulation Trench App 20110068420 - Binder; Boris ;   et al. | 2011-03-24 |
Semiconductor device including a pressure sensor Grant 7,832,279 - Kautzsch , et al. November 16, 2 | 2010-11-16 |
Acceleration Sensor App 20100186511 - Kautzsch; Thoralf ;   et al. | 2010-07-29 |
Semiconductor Device Including A Pressure Sensor App 20100058876 - Kautzsch; Thoralf ;   et al. | 2010-03-11 |