BIN BUDIMAN; Mohd Fairuz
Patent Applications and Registrations
Patent applications and USPTO patent grants for BIN BUDIMAN; Mohd Fairuz.The latest application filed is for "substrate processing system, control method, and control program".
- BIN BUDIMAN; Mohd Fairuz - Miyagi JP
| Patent | Date |
|---|---|
| Substrate Processing System, Control Method, And Control Program App 20220122813 - BIN BUDIMAN; Mohd Fairuz ; et al. | 2022-04-21 |
| Cleaning method and plasma processing apparatus Grant 10,991,551 - Bin Budiman , et al. April 27, 2 | 2021-04-27 |
| Plasma Etching Method And Plasma Etching Device App 20210043431 - BIN BUDIMAN; Mohd Fairuz ; et al. | 2021-02-11 |
| Cleaning Method And Plasma Processing Apparatus App 20200328064 - BIN BUDIMAN; Mohd Fairuz ; et al. | 2020-10-15 |
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