Patent | Date |
---|
Transparent halo assembly for reduced particle generation Grant 11,424,112 - Allen , et al. August 23, 2 | 2022-08-23 |
Rf Quadrupole Particle Accelerator App 20220248523 - Sinclair; Frank ;   et al. | 2022-08-04 |
Apparatus and system including high angle extraction optics Grant 11,361,935 - Biloiu , et al. June 14, 2 | 2022-06-14 |
Resonator, Linear Accelerator Configuration And Ion Implantation System Having Toroidal Resonator App 20220174810 - Biloiu; Costel ;   et al. | 2022-06-02 |
Apparatus And System Including High Angle Extraction Optics App 20220148843 - Biloiu; Costel ;   et al. | 2022-05-12 |
Apparatus and system including extraction optics having movable blockers Grant 11,270,864 - Biloiu , et al. March 8, 2 | 2022-03-08 |
Tunable Extraction Assembly For Wide Angle Ion Beam App 20220020557 - Wallace; Jay R. ;   et al. | 2022-01-20 |
System and method for forming surface relief gratings Grant 11,226,439 - Olson , et al. January 18, 2 | 2022-01-18 |
Apparatus And System Including High Angle Extraction Optics App 20210391155 - Campbell; Christopher ;   et al. | 2021-12-16 |
Resonator Coil Having An Asymmetrical Profile App 20210343500 - Biloiu; Costel ;   et al. | 2021-11-04 |
Apparatus And System Including Extraction Optics Having Movable Blockers App 20210305001 - Biloiu; Costel ;   et al. | 2021-09-30 |
Extraction apparatus and system for high throughput ion beam processing Grant 11,127,556 - Biloiu , et al. September 21, 2 | 2021-09-21 |
Resonator coil having an asymmetrical profile Grant 11,094,504 - Biloiu , et al. August 17, 2 | 2021-08-17 |
Resonator Coil Having An Asymmetrical Profile App 20210210307 - Biloiu; Costel ;   et al. | 2021-07-08 |
Apparatus and system having extraction assembly for wide angle ion beam Grant 11,056,319 - Biloiu , et al. July 6, 2 | 2021-07-06 |
Apparatus And System Having Extraction Assembly For Wide Angle Ion Beam App 20210035779 - Biloiu; Costel ;   et al. | 2021-02-04 |
Apparatus, System And Techniques For Mass Analyzed Ion Beam App 20200294755 - Sinclair; Frank ;   et al. | 2020-09-17 |
Apparatus, system and techniques for mass analyzed ion beam Grant 10,763,072 - Sinclair , et al. Sep | 2020-09-01 |
Apparatus and method for differential in situ cleaning Grant 10,730,082 - Gilchrist , et al. | 2020-08-04 |
Extreme Edge Uniformity Control App 20200243308 - Likhanskii; Alexandre ;   et al. | 2020-07-30 |
Extreme edge uniformity control Grant 10,665,433 - Likhanskii , et al. | 2020-05-26 |
System And Method For Forming Surface Relief Gratings App 20200150325 - Olson; Joseph C. ;   et al. | 2020-05-14 |
Extraction Apparatus and System for High Throughput Ion Beam Processing App 20200098540 - Biloiu; Costel ;   et al. | 2020-03-26 |
Apparatus and techniques to treat substrates using directional plasma and point of use chemistry Grant 10,600,616 - Liang , et al. | 2020-03-24 |
Extraction apparatus and system for high throughput ion beam processing Grant 10,468,226 - Biloiu , et al. No | 2019-11-05 |
Transparent halo for reduced particle generation Grant 10,395,969 - Biloiu , et al. A | 2019-08-27 |
Transparent Halo For Reduced Particle Generation App 20190139774 - Biloiu; Costel ;   et al. | 2019-05-09 |
Transparent Halo Assembly For Reduced Particle Generation App 20190139758 - Allen; Ernest E. ;   et al. | 2019-05-09 |
Radio frequency extraction system for charge neutralized ion beam Grant 10,224,181 - Biloiu , et al. | 2019-03-05 |
Electrodynamic mass analysis Grant 10,192,727 - Sinclair , et al. Ja | 2019-01-29 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Point Of Use Chemistry App 20190006149 - Liang; Shurong ;   et al. | 2019-01-03 |
Apparatus and techniques to treat substrates using directional plasma and point of use chemistry Grant 10,128,082 - Liang , et al. November 13, 2 | 2018-11-13 |
Electrodynamic Mass Analysis App 20180286653 - Sinclair; Frank ;   et al. | 2018-10-04 |
Inductively coupled RF plasma source with magnetic confinement and Faraday shielding Grant 10,049,861 - Benveniste , et al. August 14, 2 | 2018-08-14 |
Apparatus and techniques to treat substrates using directional plasma and reactive gas Grant 10,004,133 - Liang , et al. June 19, 2 | 2018-06-19 |
Apparatus And Method For Differential In Situ Cleaning App 20180111171 - Gilchrist; Glen FR ;   et al. | 2018-04-26 |
Extreme Edge Uniformity Control App 20180082824 - Likhanskii; Alexandre ;   et al. | 2018-03-22 |
Radio Frequency Extraction System For Charge Neutralized Ion Beam App 20170309453 - Biloiu; Costel ;   et al. | 2017-10-26 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Reactive Gas App 20170311430 - Liang; Shurong ;   et al. | 2017-10-26 |
Apparatus and techniques to treat substrates using directional plasma and reactive gas Grant 9,706,634 - Liang , et al. July 11, 2 | 2017-07-11 |
In situ control of ion angular distribution in a processing apparatus Grant 9,620,335 - Biloiu , et al. April 11, 2 | 2017-04-11 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Reactive Gas App 20170042010 - Liang; Shurong ;   et al. | 2017-02-09 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Point Of Use Chemistry App 20170025252 - Liang; Shurong ;   et al. | 2017-01-26 |
Control of ion angular distribution of ion beams with hidden deflection electrode Grant 9,514,912 - Biloiu , et al. December 6, 2 | 2016-12-06 |
Gallium ION source and materials therefore Grant 9,396,902 - Biloiu , et al. July 19, 2 | 2016-07-19 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20160189935 - Biloiu; Costel ;   et al. | 2016-06-30 |
Wide metal-free plasma flood gun Grant 9,299,536 - Biloiu March 29, 2 | 2016-03-29 |
In situ control of ion angular distribution in a processing apparatus Grant 9,293,301 - Biloiu , et al. March 22, 2 | 2016-03-22 |
Inductively Coupled Rf Plasma Source With Magnetic Confinement And Faraday Shielding App 20160071704 - Benveniste; Victor M. ;   et al. | 2016-03-10 |
Control Of Ion Angular Distribution Of Ion Beams With Hidden Deflection Electrode App 20160071693 - Biloiu; Costel ;   et al. | 2016-03-10 |
Extended lifetime ion source Grant 9,187,832 - Biloiu , et al. November 17, 2 | 2015-11-17 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20150179409 - Biloiu; Costel ;   et al. | 2015-06-25 |
Hardware plasma interlock system Grant 9,060,411 - Biloiu , et al. June 16, 2 | 2015-06-16 |
Wide Metal-free Plasma Flood Gun App 20150108894 - Biloiu; Costel | 2015-04-23 |
Ribbon antenna for versatile operation and efficient RF power coupling Grant 8,901,820 - Biloiu , et al. December 2, 2 | 2014-12-02 |
Extended Lifetime Ion Source App 20140326594 - Biloiu; Costel ;   et al. | 2014-11-06 |
Hardware Plasma Interlock System App 20140265849 - Biloiu; Costel ;   et al. | 2014-09-18 |
Inductively coupled plasma ion source with multiple antennas for wide ion beam Grant 8,809,803 - Biloiu , et al. August 19, 2 | 2014-08-19 |
Plasma attenuation for uniformity control Grant 8,659,229 - Kurunczi , et al. February 25, 2 | 2014-02-25 |
Inductively Coupled Plasma Ion Source With Multiple Antennas For Wide Ion Beam App 20140042337 - Biloiu; Costel ;   et al. | 2014-02-13 |
Gallium ION Source and Materials Therefore App 20130313971 - Biloiu; Costel ;   et al. | 2013-11-28 |
Small form factor plasma source for high density wide ribbon ion beam generation Grant 8,590,485 - Biloiu , et al. November 26, 2 | 2013-11-26 |
Ribbon Antenna For Versatile Operation And Efficient Rf Power Coupling App 20130193848 - Biloiu; Costel ;   et al. | 2013-08-01 |
Apparatus for controlling the temperature of an RF ion source window Grant 8,436,318 - Sinclair , et al. May 7, 2 | 2013-05-07 |
Inductively Coupled Rf Plasma Source With Magnetic Confinement And Faraday Shielding App 20130015053 - Benveniste; Victor M. ;   et al. | 2013-01-17 |
Plasma Attenuation For Uniformity Control App 20120293070 - Kurunczi; Peter ;   et al. | 2012-11-22 |
High density helicon plasma source for wide ribbon ion beam generation Grant 8,142,607 - Biloiu , et al. March 27, 2 | 2012-03-27 |
Small Form Factor Plasma Source For High Density Wide Ribbon Ion Beam Generation App 20110259269 - Biloiu; Costel ;   et al. | 2011-10-27 |
Apparatus For Controlling The Temperature Of An Rf Ion Source Window App 20110240876 - Sinclair; Frank ;   et al. | 2011-10-06 |
Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control Grant 7,999,479 - Biloiu , et al. August 16, 2 | 2011-08-16 |
Ion source cleaning method and apparatus Grant 7,888,662 - Biloiu , et al. February 15, 2 | 2011-02-15 |
Conjugated Icp And Ecr Plasma Sources For Wide Ribbon Ion Beam Generation And Control App 20100264328 - Biloiu; Costel ;   et al. | 2010-10-21 |
Techniques for providing a multimode ion source Grant 7,812,321 - Kurunczi , et al. October 12, 2 | 2010-10-12 |
High Density Helicon Plasma Source For Wide Ribbon Ion Beam Generation App 20100055345 - Biloiu; Costel ;   et al. | 2010-03-04 |
Techniques for ion beam current measurement using a scanning beam current transformer Grant 7,652,270 - Dzengeleski , et al. January 26, 2 | 2010-01-26 |
Ion Source Cleaning Method And Apparatus App 20090314951 - Biloiu; Costel ;   et al. | 2009-12-24 |
Techniques For Providing A Multimode Ion Source App 20090309041 - Kurunczi; Peter ;   et al. | 2009-12-17 |
Techniques For Ion Beam Current Measurement Using A Scanning Beam Current Transformer App 20080302955 - Dzengeleski; Joseph P. ;   et al. | 2008-12-11 |