Bilodeau; Steven M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bilodeau; Steven M..The latest application filed is for "wet etching composition and method".

Company Profile

2.21.27

Bilodeau; Steven M. - Fairfield CT
Bilodeau; Steven M. - Oxford CT
Bilodeau; Steven M. - Newtown CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Wet Etching Composition And Method App 20220275276 - Kim; YoungMin ; et al.	2022-09-01
Wet etching composition and method Grant 11,365,351 - Kim , et al. June 21, 2	2022-06-21
Compositions And Methods For Selectively Etching Silicon Nitride Films App 20220033710 - BILODEAU; Steven M. ; et al.	2022-02-03
Silicon nitride etching composition and method Grant 11,053,440 - Bilodeau , et al. July 6, 2	2021-07-06
Wet Etching Composition And Method App 20210108140 - KIM; YoungMin ; et al.	2021-04-15
Silicon Nitride Etching Composition And Method App 20200157423 - BILODEAU; Steven M. ; et al.	2020-05-21
Formulations To Selectively Etch Silicon-germanium Relative To Silicon App 20180294165 - Bilodeau; Steven M.	2018-10-11
Precursors for silicon dioxide gap fill Grant 10,043,658 - Hunks , et al. August 7, 2	2018-08-07
Precursors For Silicon Dioxide Gap Fill App 20180130654 - Hunks; William ; et al.	2018-05-10
Precursors For Silicon Dioxide Gap Fill App 20160225615 - Hunks; William ; et al.	2016-08-04
Precursors for silicon dioxide gap fill Grant 9,337,054 - Hunks , et al. May 10, 2	2016-05-10
Component for solar adsorption refrigeration system and method of making such component Grant 9,132,412 - Carruthers , et al. September 15, 2	2015-09-15
Formulations For Wet Etching Nipt During Silicide Fabrication App 20150162213 - Chen; Tianniu ; et al.	2015-06-11
High-k Perovskite Materials And Methods Of Making And Using The Same App 20140134823 - Hendrix; Bryan C. ; et al.	2014-05-15
Component For Solar Adsorption Refrigeration System And Method Of Making Such Component App 20140020419 - Carruthers; J. Donald ; et al.	2014-01-23
Scalable Lead Zirconium Titanate (pzt) Thin Film Material And Deposition Method, And Ferroelectric Memory Device Structures Comprising Such Thin Film Material App 20130324390 - Van Buskirk; Peter C. ; et al.	2013-12-05
Component for solar adsorption refrigeration system and method of making such component Grant 8,539,781 - Carruthers , et al. September 24, 2	2013-09-24
Chemical vapor deposition of high conductivity, adherent thin films of ruthenium Grant 8,241,704 - Hendrix , et al. August 14, 2	2012-08-14
DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES App 20120127629 - Roeder; Jeffrey F. ; et al.	2012-05-24
Super-dry reagent compositions for formation of ultra low k films Grant 8,053,375 - Xu , et al. November 8, 2	2011-11-08
Chemical vapor deposition of high conductivity, adherent thin films of ruthenium Grant 8,034,407 - Hendrix , et al. October 11, 2	2011-10-11
Chemical Vapor Deposition Of High Conductivity, Adherent Thin Films Of Ruthenium App 20110195188 - Hendrix; Bryan C. ; et al.	2011-08-11
Scalable Lead Zirconium Titanate (pzt) Thin Film Material And Deposition Method, And Ferroelectric Memory Device Structures Comprising Such Thin Film Material App 20110097478 - Van Buskirk; Peter C. ; et al.	2011-04-28
Component For Solar Adsorption Refrigeration System And Method Of Making Such Component App 20110048063 - Carruthers; J. Donald ; et al.	2011-03-03
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material Grant 7,862,857 - Van Buskirk , et al. January 4, 2	2011-01-04
Scalable Lead Zirconium Titanate (pzt) Thin Film Material And Deposition Method, And Ferroelectric Memory Device Structures Comprising Such Thin Film Material App 20100209596 - Van Buskirk; Peter C. ; et al.	2010-08-19
Precursors For Silicon Dioxide Gap Fill App 20100164057 - Hunks; William ; et al.	2010-07-01
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material Grant 7,705,382 - Van Buskirk , et al. April 27, 2	2010-04-27
Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes App 20080251104 - Chen; Ing-Shin ; et al.	2008-10-16
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material Grant 7,344,589 - Van Buskirk , et al. March 18, 2	2008-03-18
Scalable Lead Zirconium Titanate (pzt) Thin Film Material And Deposition Method, And Ferroelectric Memory Device Structures Comprising Such Thin Film Material App 20080049379 - Van Buskirk; Peter C. ; et al.	2008-02-28
Ethyleneoxide-silane And Bridged Silane Precursors For Forming Low K Films App 20080048148 - Borovik; Alexander S. ; et al.	2008-02-28
Chemical vapor deposition of high conductivity, adherent thin films of ruthenium Grant 7,285,308 - Hendrix , et al. October 23, 2	2007-10-23
Chemical Vapor Deposition Of High Conductivity, Adherent Thin Films Of Ruthenium App 20070218205 - Hendrix; Bryan C. ; et al.	2007-09-20
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material App 20060115596 - Buskirk; Peter C. Van ; et al.	2006-06-01
Oxidative top electrode deposition process, and microelectronic device structure App 20060108623 - Buskirk; Peter C. Van ; et al.	2006-05-25
Oxidative top electrode deposition process, and microelectronic device structure Grant 7,012,292 - Van Buskirk , et al. March 14, 2	2006-03-14
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material Grant 6,984,417 - Van Buskirk , et al. January 10, 2	2006-01-10
Chemical vapor deposition of high conductivity, adherent thin films of ruthenium App 20050186341 - Hendrix, Bryan C. ; et al.	2005-08-25
Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same Grant 6,346,741 - Van Buskirk , et al. February 12, 2	2002-02-12
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material App 20020014644 - Van Buskirk, Peter C. ; et al.	2002-02-07
Confinement of E-fields in high density ferroelectric memory device structures Grant 6,342,711 - Van Buskirk , et al. January 29, 2	2002-01-29
Confinement of E-fields in high density ferroelectric memory device structures App 20010035543 - Buskirk, Peter C. Van ; et al.	2001-11-01
Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer Grant 5,972,430 - DiMeo, Jr. , et al. October 26, 1	1999-10-26
Liquid delivery system, heater apparatus for liquid delivery system, and vaporizer Grant 5,882,416 - Van Buskirk , et al. March 16, 1	1999-03-16

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