Patent | Date |
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Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool Grant 11,442,372 - Bijnen , et al. September 13, 2 | 2022-09-13 |
Method Of Measuring An Alignment Mark Or An Alignment Mark Assembly, Alignment System, And Lithographic Tool App 20220187722 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2022-06-16 |
Measurement Apparatus App 20210381826 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2021-12-09 |
Method for determining deformation Grant 11,181,836 - Hulsebos , et al. November 23, 2 | 2021-11-23 |
Measurement Apparatus And A Method For Determining A Substrate Grid App 20210341846 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2021-11-04 |
Compact Alignment Sensor Arrangements App 20210318627 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2021-10-14 |
Measurement apparatus Grant 11,105,619 - Bijnen , et al. August 31, 2 | 2021-08-31 |
Measurement apparatus and a method for determining a substrate grid Grant 11,079,684 - Bijnen , et al. August 3, 2 | 2021-08-03 |
Method and apparatus for controlling an industrial process using product grouping Grant 11,054,813 - Ypma , et al. July 6, 2 | 2021-07-06 |
Lithographic method Grant 11,029,610 - Tinnemans , et al. June 8, 2 | 2021-06-08 |
Method For Determining Deformation App 20210149316 - HULSEBOS; Edo Maria ;   et al. | 2021-05-20 |
Lithographic method Grant 10,962,887 - Tinnemans , et al. March 30, 2 | 2021-03-30 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,901,326 - Hulsebos , et al. January 26, 2 | 2021-01-26 |
Lithographic Method App 20200272061 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2020-08-27 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And App 20200201194 - Hulsebos; Edo Maria ;   et al. | 2020-06-25 |
Measurement Apparatus App 20200132447 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2020-04-30 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,620,549 - Hulsebos , et al. | 2020-04-14 |
Lithographic Method App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2020-03-12 |
Lithographic method Grant 10,527,958 - Tinnemans , et al. J | 2020-01-07 |
Method and apparatus for processing a substrate in a lithographic apparatus Grant 10,527,957 - Sanchez-Fabres Cobaleda , et al. J | 2020-01-07 |
Alignment method Grant 10,514,620 - Bijnen , et al. Dec | 2019-12-24 |
Lithographic apparatus and device manufacturing method Grant 10,474,045 - Bijnen , et al. Nov | 2019-11-12 |
Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate Grant 10,444,647 - Bijnen , et al. Oc | 2019-10-15 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And App 20190265598 - HULSEBOS; Edo Maria ;   et al. | 2019-08-29 |
Measurement Apparatus And A Method For Determining A Substrate Grid App 20190235391 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-08-01 |
Alignment Method App 20190227446 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-07-25 |
Methods And Apparatus For Determining The Position Of A Target Structure On A Substrate, Methods And Apparatus For Determining T App 20190219936 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-07-18 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,331,040 - Hulsebos , et al. | 2019-06-25 |
Lithographic Method App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2019-03-28 |
Method And Apparatus For Processing A Substrate In A Lithographic Apparatus App 20180356742 - SANCHEZ-FABRES COBALEDA; Cayetano ;   et al. | 2018-12-13 |
Measuring method, apparatus and substrate Grant 10,151,987 - Deckers , et al. Dec | 2018-12-11 |
Lithographic Apparatus And Device Manufacturing Method App 20180348654 - BIJNEN; Franciscus Godefridus Casper | 2018-12-06 |
Lithographic apparatus and device manufacturing method Grant 10,139,740 - Bijnen , et al. Nov | 2018-11-27 |
Lithographic Apparatus And Device Manufacturing Method App 20180196363 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2018-07-12 |
Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method Grant 9,891,540 - Ebert , et al. February 13, 2 | 2018-02-13 |
Inspection method and apparatus, substrates for use therein and device manufacturing method Grant 9,835,954 - Bogaart , et al. December 5, 2 | 2017-12-05 |
Measuring Method, Measurement Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170235230 - EBERT; Earl William ;   et al. | 2017-08-17 |
Patterning device, method of producing a marker on a substrate and device manufacturing method Grant 9,726,991 - Baselmans , et al. August 8, 2 | 2017-08-08 |
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system Grant 9,454,084 - Lyulina , et al. September 27, 2 | 2016-09-27 |
Determining position and curvature information directly from a surface of a patterning device Grant 9,377,700 - Schuster , et al. June 28, 2 | 2016-06-28 |
Inspection Method and Apparatus, Substrates for use Therein and Device Manufacturing Method App 20160097983 - BOGAART; Erik Willem ;   et al. | 2016-04-07 |
Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus Grant 9,280,057 - Bijnen , et al. March 8, 2 | 2016-03-08 |
Alignment Measurement System, Lithographic Apparatus, and a Method to Determine Alignment of in a Lithographic Apparatus App 20150261100 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2015-09-17 |
Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus Grant 9,046,385 - Bijnen , et al. June 2, 2 | 2015-06-02 |
Method To Determine The Usefulness Of Alignment Marks To Correct Overlay, And A Combination Of A Lithographic Apparatus And An Overlay Measurement System App 20150146188 - Lyulina; Irina ;   et al. | 2015-05-28 |
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus Grant 8,982,347 - Wei , et al. March 17, 2 | 2015-03-17 |
Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures Grant 8,908,152 - Bijnen , et al. December 9, 2 | 2014-12-09 |
Determining Position And Curvature Information Directly From A Surface Of A Patterning Device App 20140307246 - Schuster; Mark Josef ;   et al. | 2014-10-16 |
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus App 20130141723 - WEI; Xiuhong ;   et al. | 2013-06-06 |
Alignment mark and a method of aligning a substrate comprising such an alignment mark Grant 8,208,121 - Bijnen , et al. June 26, 2 | 2012-06-26 |
Alignment system and alignment marks for use therewith Grant 8,208,140 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Alignment system and alignment marks for use therewith Grant 8,208,139 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Measuring Method, Apparatus And Substrate App 20120133938 - DECKERS; David ;   et al. | 2012-05-31 |
Lithographic apparatus and device manufacturing method Grant 8,169,593 - Bijnen , et al. May 1, 2 | 2012-05-01 |
Alignment Measurement System, Lithographic Apparatus, and a Method to Determine Alignment in a Lithographic Apparatus App 20120062863 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2012-03-15 |
Method for coarse wafer alignment in a lithographic apparatus Grant 8,130,366 - Warnaar , et al. March 6, 2 | 2012-03-06 |
Alignment Measurement Arrangement, Alignment Measurement Method, Device Manufacturing Method and Lithographic Apparatus App 20100245792 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2010-09-30 |
Alignment System and Alignment Marks for Use Therewith App 20100214550 - HULSEBOS; Edo Maria ;   et al. | 2010-08-26 |
Lithographic Apparatus and Device Manufacturing Method App 20100123886 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2010-05-20 |
Method For Coarse Wafer Alignment In A Lithographic Apparatus App 20090237637 - Warnaar; Patrick ;   et al. | 2009-09-24 |
Alignment Mark and a Method of Aligning a Substrate Comprising Such an Alignment Mark App 20090195768 - Bijnen; Franciscus Godefridus Casper ;   et al. | 2009-08-06 |
Method and system for 3D alignment in wafer scale integration Grant 7,562,686 - Best , et al. July 21, 2 | 2009-07-21 |
Alignment System and Alignment Marks for Use Therewith App 20090176167 - HULSEBOS; Edo Maria ;   et al. | 2009-07-09 |
Lithographic Apparatus And Method App 20090153825 - EDART; Remi Daniel Marie ;   et al. | 2009-06-18 |
Lithographic Apparatus and Device Manufacturing Method App 20090051891 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2009-02-26 |
Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus Grant 7,463,337 - Van Buel , et al. December 9, 2 | 2008-12-09 |
Alignment of substrates for bonding Grant 7,433,038 - Bijnen , et al. October 7, 2 | 2008-10-07 |
Alignment of substrates for bonding App 20070252994 - Bijnen; Franciscus Godefridus Casper ;   et al. | 2007-11-01 |
Substrate table, method of measuring a position of a substrate and a lithographic apparatus App 20070153253 - Van Buel; Henricus Wilhelmus Maria ;   et al. | 2007-07-05 |
Contacts to microdevices App 20070070311 - Bijnen; Franciscus Godefridus Casper ;   et al. | 2007-03-29 |