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Bijnen; Franciscus Godefridus Casper Patent Filings

Bijnen; Franciscus Godefridus Casper

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bijnen; Franciscus Godefridus Casper.The latest application filed is for "method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool".

Company Profile
8.37.36
  • Bijnen; Franciscus Godefridus Casper - Valkenswaard NL
  • Bijnen; Franciscus Godefridus Casper - Veldhoven NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool
Grant 11,442,372 - Bijnen , et al. September 13, 2
2022-09-13
Method Of Measuring An Alignment Mark Or An Alignment Mark Assembly, Alignment System, And Lithographic Tool
App 20220187722 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2022-06-16
Measurement Apparatus
App 20210381826 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2021-12-09
Method for determining deformation
Grant 11,181,836 - Hulsebos , et al. November 23, 2
2021-11-23
Measurement Apparatus And A Method For Determining A Substrate Grid
App 20210341846 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2021-11-04
Compact Alignment Sensor Arrangements
App 20210318627 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al.
2021-10-14
Measurement apparatus
Grant 11,105,619 - Bijnen , et al. August 31, 2
2021-08-31
Measurement apparatus and a method for determining a substrate grid
Grant 11,079,684 - Bijnen , et al. August 3, 2
2021-08-03
Method and apparatus for controlling an industrial process using product grouping
Grant 11,054,813 - Ypma , et al. July 6, 2
2021-07-06
Lithographic method
Grant 11,029,610 - Tinnemans , et al. June 8, 2
2021-06-08
Method For Determining Deformation
App 20210149316 - HULSEBOS; Edo Maria ;   et al.
2021-05-20
Lithographic method
Grant 10,962,887 - Tinnemans , et al. March 30, 2
2021-03-30
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,901,326 - Hulsebos , et al. January 26, 2
2021-01-26
Lithographic Method
App 20200272061 - TINNEMANS; Patricius Aloysius Jacobus ;   et al.
2020-08-27
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And
App 20200201194 - Hulsebos; Edo Maria ;   et al.
2020-06-25
Measurement Apparatus
App 20200132447 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2020-04-30
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,620,549 - Hulsebos , et al.
2020-04-14
Lithographic Method
App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ;   et al.
2020-03-12
Lithographic method
Grant 10,527,958 - Tinnemans , et al. J
2020-01-07
Method and apparatus for processing a substrate in a lithographic apparatus
Grant 10,527,957 - Sanchez-Fabres Cobaleda , et al. J
2020-01-07
Alignment method
Grant 10,514,620 - Bijnen , et al. Dec
2019-12-24
Lithographic apparatus and device manufacturing method
Grant 10,474,045 - Bijnen , et al. Nov
2019-11-12
Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate
Grant 10,444,647 - Bijnen , et al. Oc
2019-10-15
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And
App 20190265598 - HULSEBOS; Edo Maria ;   et al.
2019-08-29
Measurement Apparatus And A Method For Determining A Substrate Grid
App 20190235391 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2019-08-01
Alignment Method
App 20190227446 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2019-07-25
Methods And Apparatus For Determining The Position Of A Target Structure On A Substrate, Methods And Apparatus For Determining T
App 20190219936 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2019-07-18
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 10,331,040 - Hulsebos , et al.
2019-06-25
Lithographic Method
App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ;   et al.
2019-03-28
Method And Apparatus For Processing A Substrate In A Lithographic Apparatus
App 20180356742 - SANCHEZ-FABRES COBALEDA; Cayetano ;   et al.
2018-12-13
Measuring method, apparatus and substrate
Grant 10,151,987 - Deckers , et al. Dec
2018-12-11
Lithographic Apparatus And Device Manufacturing Method
App 20180348654 - BIJNEN; Franciscus Godefridus Casper
2018-12-06
Lithographic apparatus and device manufacturing method
Grant 10,139,740 - Bijnen , et al. Nov
2018-11-27
Lithographic Apparatus And Device Manufacturing Method
App 20180196363 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2018-07-12
Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method
Grant 9,891,540 - Ebert , et al. February 13, 2
2018-02-13
Inspection method and apparatus, substrates for use therein and device manufacturing method
Grant 9,835,954 - Bogaart , et al. December 5, 2
2017-12-05
Measuring Method, Measurement Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20170235230 - EBERT; Earl William ;   et al.
2017-08-17
Patterning device, method of producing a marker on a substrate and device manufacturing method
Grant 9,726,991 - Baselmans , et al. August 8, 2
2017-08-08
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system
Grant 9,454,084 - Lyulina , et al. September 27, 2
2016-09-27
Determining position and curvature information directly from a surface of a patterning device
Grant 9,377,700 - Schuster , et al. June 28, 2
2016-06-28
Inspection Method and Apparatus, Substrates for use Therein and Device Manufacturing Method
App 20160097983 - BOGAART; Erik Willem ;   et al.
2016-04-07
Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus
Grant 9,280,057 - Bijnen , et al. March 8, 2
2016-03-08
Alignment Measurement System, Lithographic Apparatus, and a Method to Determine Alignment of in a Lithographic Apparatus
App 20150261100 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2015-09-17
Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus
Grant 9,046,385 - Bijnen , et al. June 2, 2
2015-06-02
Method To Determine The Usefulness Of Alignment Marks To Correct Overlay, And A Combination Of A Lithographic Apparatus And An Overlay Measurement System
App 20150146188 - Lyulina; Irina ;   et al.
2015-05-28
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus
Grant 8,982,347 - Wei , et al. March 17, 2
2015-03-17
Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures
Grant 8,908,152 - Bijnen , et al. December 9, 2
2014-12-09
Determining Position And Curvature Information Directly From A Surface Of A Patterning Device
App 20140307246 - Schuster; Mark Josef ;   et al.
2014-10-16
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus
App 20130141723 - WEI; Xiuhong ;   et al.
2013-06-06
Alignment mark and a method of aligning a substrate comprising such an alignment mark
Grant 8,208,121 - Bijnen , et al. June 26, 2
2012-06-26
Alignment system and alignment marks for use therewith
Grant 8,208,140 - Hulsebos , et al. June 26, 2
2012-06-26
Alignment system and alignment marks for use therewith
Grant 8,208,139 - Hulsebos , et al. June 26, 2
2012-06-26
Measuring Method, Apparatus And Substrate
App 20120133938 - DECKERS; David ;   et al.
2012-05-31
Lithographic apparatus and device manufacturing method
Grant 8,169,593 - Bijnen , et al. May 1, 2
2012-05-01
Alignment Measurement System, Lithographic Apparatus, and a Method to Determine Alignment in a Lithographic Apparatus
App 20120062863 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2012-03-15
Method for coarse wafer alignment in a lithographic apparatus
Grant 8,130,366 - Warnaar , et al. March 6, 2
2012-03-06
Alignment Measurement Arrangement, Alignment Measurement Method, Device Manufacturing Method and Lithographic Apparatus
App 20100245792 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2010-09-30
Alignment System and Alignment Marks for Use Therewith
App 20100214550 - HULSEBOS; Edo Maria ;   et al.
2010-08-26
Lithographic Apparatus and Device Manufacturing Method
App 20100123886 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2010-05-20
Method For Coarse Wafer Alignment In A Lithographic Apparatus
App 20090237637 - Warnaar; Patrick ;   et al.
2009-09-24
Alignment Mark and a Method of Aligning a Substrate Comprising Such an Alignment Mark
App 20090195768 - Bijnen; Franciscus Godefridus Casper ;   et al.
2009-08-06
Method and system for 3D alignment in wafer scale integration
Grant 7,562,686 - Best , et al. July 21, 2
2009-07-21
Alignment System and Alignment Marks for Use Therewith
App 20090176167 - HULSEBOS; Edo Maria ;   et al.
2009-07-09
Lithographic Apparatus And Method
App 20090153825 - EDART; Remi Daniel Marie ;   et al.
2009-06-18
Lithographic Apparatus and Device Manufacturing Method
App 20090051891 - BIJNEN; Franciscus Godefridus Casper ;   et al.
2009-02-26
Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus
Grant 7,463,337 - Van Buel , et al. December 9, 2
2008-12-09
Alignment of substrates for bonding
Grant 7,433,038 - Bijnen , et al. October 7, 2
2008-10-07
Alignment of substrates for bonding
App 20070252994 - Bijnen; Franciscus Godefridus Casper ;   et al.
2007-11-01
Substrate table, method of measuring a position of a substrate and a lithographic apparatus
App 20070153253 - Van Buel; Henricus Wilhelmus Maria ;   et al.
2007-07-05
Contacts to microdevices
App 20070070311 - Bijnen; Franciscus Godefridus Casper ;   et al.
2007-03-29

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