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Mirror, in particular for a microlithographic projection exposure system
Grant 11,360,393 - Wylie-Van Eerd , et al. June 14, 2 | 2022-06-14 |
Reflective optical element
Grant 10,916,356 - Kuznetsov , et al. February 9, 2 | 2021-02-09 |
Mirror, In Particular For A Microlithographic Projection Exposure System
App 20200174379 - WYLIE-VAN EERD; Ben ; et al. | 2020-06-04 |
Reflective Optical Element
App 20200027623 - Kuznetsov; Dmitry ; et al. | 2020-01-23 |
Method, Apparatus And Computer Program For Measuring And Processing A Spectrum Of An Xuv Light Source From Soft X-rays To Infrar
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EUV-mirror, optical system with EUV-mirror and associated operating method
Grant 9,997,268 - Dinger , et al. June 12, 2 | 2018-06-12 |
Euv Multilayer Mirror, Optical System Including A Multilayer Mirror And Method Of Manufacturing A Multilayer Mirror
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Method for producing a reflective optical element for EUV-lithography
Grant 9,733,580 - Kuznetzov , et al. August 15, 2 | 2017-08-15 |
Euv-mirror, Optical System With Euv-mirror And Associated Operating Method
App 20160379730 - DINGER; Udo ; et al. | 2016-12-29 |
EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method
Grant 9,442,383 - Dinger , et al. September 13, 2 | 2016-09-13 |
Optical Element Comprising A Multilayer Coating, And Optical Arrangement Comprising Same
App 20160116648 - VAN DE KRUIJS; Robbert W. E. ; et al. | 2016-04-28 |
Euv-mirror Arrangement, Optical System With Euv-mirror Arrangement And Associated Operating Method
App 20140285783 - DINGER; Udo ; et al. | 2014-09-25 |
Method For Producing A Reflective Optical Element For Euv-lithography
App 20140193591 - KUZNETZOV; Alexey ; et al. | 2014-07-10 |
Reflective optical element and method of manufacturing the same
Grant 8,638,494 - Tsarfati , et al. January 28, 2 | 2014-01-28 |
Method For Manufacturing A Multilayer Structure With A Lateral Pattern For Application In The Xuv Wavelength Range, And Bf And Lmag Structures Manufactured According To This Method
App 20130220971 - Bijkerk; Frederik ; et al. | 2013-08-29 |
Reflective Optical Element And Method Of Manufacturing The Same
App 20130188248 - TSARFATI; Tim ; et al. | 2013-07-25 |
Reflective optical element and method of manufacturing the same
Grant 8,411,355 - Tsarfati , et al. April 2, 2 | 2013-04-02 |
Reflective Optical Element And Method Of Manufacturing The Same
App 20110194087 - TSARFATI; Tim ; et al. | 2011-08-11 |
Method For Regenerating A Surface Of An Optical Element In An Xuv Radiation Source, And Xuv Radiation Source
App 20100171050 - Bijkerk; Frederik ; et al. | 2010-07-08 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant RE41,362 - Koshelev , et al. June 1, 2 | 2010-06-01 |
Multilayer system with protecting layer system and production method
App 20070281109 - Bijkerk; Frederik ; et al. | 2007-12-06 |
Multilayer system with protecting layer system and production method
Grant 7,261,957 - Bijkerk , et al. August 28, 2 | 2007-08-28 |
Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device
Grant 7,172,788 - Yakshin , et al. February 6, 2 | 2007-02-06 |
Optical broad band element and process for its production
App 20050111083 - Yakshin, Andrey E. ; et al. | 2005-05-26 |
Process for manufacturing multilayer systems
App 20040245090 - Yakshin, Andrey E. ; et al. | 2004-12-09 |
Multi-layer mirror for radiation in the xuv wavelenght range and method for manufacture thereof
App 20040233519 - Bijkerk, Frederik ; et al. | 2004-11-25 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,818,912 - Koshelev , et al. November 16, 2 | 2004-11-16 |
Multilayer system with protecting layer system and production method
App 20040121134 - Bijkerk, Frederik ; et al. | 2004-06-24 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20040089819 - Koshelev, Konstantin Nikolaevitch ; et al. | 2004-05-13 |
Method for coating substrates and mask holder
App 20040052942 - Bijkerk, Frederik ; et al. | 2004-03-18 |
Photodiode, charged-coupled device and method for the production
App 20040021061 - Bijkerk, Frederik | 2004-02-05 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,667,484 - Koshelev , et al. December 23, 2 | 2003-12-23 |
Multilayer system with protecting layer system and production method
Grant 6,656,575 - Bijkerk , et al. December 2, 2 | 2003-12-02 |
Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus
Grant 6,469,310 - Fiedorowicz , et al. October 22, 2 | 2002-10-22 |
Radiation source for use in lithographic projection apparatus
Grant 6,452,194 - Bijkerk , et al. September 17, 2 | 2002-09-17 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20020021430 - Koshelev, Konstantin Nikolaevitch ; et al. | 2002-02-21 |
Multilayer system with protecting layer system and production method
App 20020012797 - Bijkerk, Frederik ; et al. | 2002-01-31 |
Method for the production of multi-layer systems
App 20010038456 - Yakshin, Andrey E. ; et al. | 2001-11-08 |
Radiation source for use in lithographic projection apparatus
App 20010004104 - Bijkerk, Frederik ; et al. | 2001-06-21 |
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