| Patent | Date |
|---|
Systems and methods for advanced defect ablation protection
Grant 11,181,484 - Xu , et al. November 23, 2 | 2021-11-23 |
Multi-pass imaging using image sensors with variably biased channel-stop contacts for identifying defects in a semiconductor die
Grant 10,923,526 - Lai , et al. February 16, 2 | 2021-02-16 |
Image sensors with grounded or otherwise biased channel-stop contacts
Grant 10,903,258 - Lai , et al. January 26, 2 | 2021-01-26 |
Spread-spectrum clock-signal adjustment for image sensors
Grant 10,734,438 - Lai , et al. | 2020-08-04 |
Radiation-induced false count mitigation and detector cooling
Grant 10,690,599 - Biellak , et al. | 2020-06-23 |
Wafer inspection
Grant 10,488,348 - Romanovsky , et al. Nov | 2019-11-26 |
Dark-field inspection using a low-noise sensor
Grant 10,462,391 - Chuang , et al. Oc | 2019-10-29 |
Spread-Spectrum Clock-Signal Adjustment for Image Sensors
App 20190288019 - Lai; Tzi-Cheng ; et al. | 2019-09-19 |
Multi-Pass Imaging Using Image Sensors with Variably Biased Channel-Stop Contacts
App 20190288028 - Lai; Tzi-Cheng ; et al. | 2019-09-19 |
Image Sensors with Grounded or Otherwise Biased Channel-Stop Contacts
App 20190109163 - Lai; Tzi-Cheng ; et al. | 2019-04-11 |
System and method for reducing radiation-induced false counts in an inspection system
Grant 10,241,217 - Jiang , et al. | 2019-03-26 |
Wafer Inspection
App 20180164228 - Romanovsky; Anatoly ; et al. | 2018-06-14 |
Wafer inspection
Grant 9,915,622 - Romanovsky , et al. March 13, 2 | 2018-03-13 |
System and Method for Reducing Radiation-Induced False Counts in an Inspection System
App 20180045837 - Jiang; Ximan ; et al. | 2018-02-15 |
TDI sensor in a darkfield system
Grant 9,891,177 - Vazhaeparambil , et al. February 13, 2 | 2018-02-13 |
System and method for reducing radiation-induced false counts in an inspection system
Grant 9,841,512 - Jiang , et al. December 12, 2 | 2017-12-12 |
Laser with integrated multi line or scanning beam capability
Grant 9,678,350 - Wolters , et al. June 13, 2 | 2017-06-13 |
Image intensifier tube design for aberration correction and ion damage reduction
Grant 9,666,419 - Jiang , et al. May 30, 2 | 2017-05-30 |
Detection of selected defects in relatively noisy inspection data
Grant 9,646,379 - Chen , et al. May 9, 2 | 2017-05-09 |
Dark-Field Inspection Using A Low-Noise Sensor
App 20170048467 - Chuang; Yung-Ho Alex ; et al. | 2017-02-16 |
System and Method for Reducing Radiation-Induced False Counts in an Inspection System
App 20160334516 - Jiang; Ximan ; et al. | 2016-11-17 |
High resolution high quantum efficiency electron bombarded CCD or CMOS imaging sensor
Grant 9,460,886 - Jiang , et al. October 4, 2 | 2016-10-04 |
Wafer inspection with multi-spot illumination and multiple channels
Grant 9,404,873 - Biellak , et al. August 2, 2 | 2016-08-02 |
Detection of selected defects in relatively noisy inspection data
Grant 9,355,440 - Chen , et al. May 31, 2 | 2016-05-31 |
TDI Sensor in a Darkfield System
App 20160097727 - Vazhaeparambil; Jijen ; et al. | 2016-04-07 |
Wafer inspection
Grant 9,279,774 - Romanovsky , et al. March 8, 2 | 2016-03-08 |
High Resolution High Quantum Efficiency Electron Bombarded CCD Or CMOS Imaging Sensor
App 20160027605 - Jiang; Ximan ; et al. | 2016-01-28 |
Wafer Inspection
App 20150369753 - Romanovsky; Anatoly ; et al. | 2015-12-24 |
Illumination energy management in surface inspection
Grant 9,194,812 - Wolters , et al. November 24, 2 | 2015-11-24 |
Multi-spot defect inspection system
Grant 9,182,358 - Xu , et al. November 10, 2 | 2015-11-10 |
Sample inspection system detector
Grant 9,086,389 - Kavaldjiev , et al. July 21, 2 | 2015-07-21 |
Illumination Energy Management in Surface Inspection
App 20140328043 - Wolters; Christian ; et al. | 2014-11-06 |
Multi-Spot Defect Inspection System
App 20140268118 - Xu; Zhiwei ; et al. | 2014-09-18 |
Illumination energy management in surface inspection
Grant 8,786,850 - Wolters , et al. July 22, 2 | 2014-07-22 |
Sample Inspection System Detector
App 20140118730 - Kavaldjiev; Daniel Ivanov ; et al. | 2014-05-01 |
Illumination Energy Management in Surface Inspection
App 20140118729 - Wolters; Christian ; et al. | 2014-05-01 |
Image Intensifier Tube Design for Aberration Correction and Ion Damage Reduction
App 20140063502 - Jiang; Ximan ; et al. | 2014-03-06 |
Photomultiplier tube optimized for surface inspection in the ultraviolet
Grant 8,629,384 - Biellak , et al. January 14, 2 | 2014-01-14 |
Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layer
Grant 8,582,094 - Shortt , et al. November 12, 2 | 2013-11-12 |
Laser with Integrated Multi Line or Scanning Beam Capability
App 20130250385 - Wolters; Christian ; et al. | 2013-09-26 |
Wafer Inspection with Multi-Spot Illumination and Multiple Channels
App 20130235374 - Biellak; Stephen ; et al. | 2013-09-12 |
Segmented polarizer for optimizing performance of a surface inspection system
Grant 8,520,208 - Biellak , et al. August 27, 2 | 2013-08-27 |
Wafer Inspection
App 20130016346 - Romanovsky; Anatoly ; et al. | 2013-01-17 |
Fast laser power control with improved reliability for surface inspection
Grant 8,294,887 - Biellak , et al. October 23, 2 | 2012-10-23 |
Computer-implemented methods for inspecting and/or classifying a wafer
Grant 8,269,960 - Reich , et al. September 18, 2 | 2012-09-18 |
Segmented polarizer for optimizing performance of a surface inspection system
Grant 8,169,613 - Biellak , et al. May 1, 2 | 2012-05-01 |
Systems and methods for determining two or more characteristics of a wafer
Grant 7,912,658 - Biellak , et al. March 22, 2 | 2011-03-22 |
Systems configured to inspect a wafer
Grant 7,746,459 - Kadkly , et al. June 29, 2 | 2010-06-29 |
Computer-implemented Methods For Inspecting And/or Classifying A Wafer
App 20100060888 - Reich; Juergen ; et al. | 2010-03-11 |
Systems And Methods For Determining Two Or More Characteristics Of A Wafer
App 20090299655 - Biellak; Stephen ; et al. | 2009-12-03 |
Systems and methods for inspecting wafers
Grant 7,623,229 - Vaez-Iravani , et al. November 24, 2 | 2009-11-24 |
Methods and systems for inspection of a wafer
Grant 7,554,656 - Shortt , et al. June 30, 2 | 2009-06-30 |
Systems Configured To Inspect A Wafer
App 20090040525 - Kadkly; Azmi ; et al. | 2009-02-12 |
Enhanced simultaneous multi-spot inspection and imaging
Grant 7,489,393 - Biellak , et al. February 10, 2 | 2009-02-10 |
Systems and methods for determining a characteristic of a specimen
Grant 7,463,349 - Biellak , et al. December 9, 2 | 2008-12-09 |
Methods and systems for inspection of a wafer
App 20070081151 - Shortt; David ; et al. | 2007-04-12 |
Enhanced simultaneous multi-spot inspection and imaging
App 20060197946 - Biellak; Stephen ; et al. | 2006-09-07 |
Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection
App 20030011760 - Vaez-Iravani, Mehdi ; et al. | 2003-01-16 |
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