Bieg; Hermann
Patent Applications and Registrations
Patent applications and USPTO patent grants for Bieg; Hermann.The latest application filed is for "projection exposure apparatus for semiconductor lithography with reduce thermal deformation".
- Bieg; Hermann - Huettlingen DE
- Bieg; Hermann - Aalen DE
| Patent | Date |
|---|---|
| Mirror arrangement for microlithographic projection exposure apparatus and related method Grant 10,663,873 - Heintel , et al. | 2020-05-26 |
| Projection exposure apparatus for semiconductor lithography with reduce thermal deformation Grant 10,606,179 - Bieg | 2020-03-31 |
| Projection Exposure Apparatus For Semiconductor Lithography With Reduce Thermal Deformation App 20190219935 - Bieg; Hermann | 2019-07-18 |
| Diaphragm changing device Grant 10,139,733 - Bieg , et al. Nov | 2018-11-27 |
| Mirror Arrangement For Microlithographic Projection Exposure Apparatus And Related Method App 20170108788 - Heintel; Willi ; et al. | 2017-04-20 |
| Diaphragm Changing Device App 20160282724 - Bieg; Hermann ; et al. | 2016-09-29 |
| Optical aperture device Grant 9,341,955 - Bieg , et al. May 17, 2 | 2016-05-17 |
| Optical Aperture Device App 20140160456 - Bieg; Hermann ; et al. | 2014-06-12 |
| Optical aperture device Grant 8,687,169 - Bieg , et al. April 1, 2 | 2014-04-01 |
| Optical assembly Grant 8,570,676 - Bieg , et al. October 29, 2 | 2013-10-29 |
| Diaphragm Changing Device App 20120075611 - Bieg; Hermann ; et al. | 2012-03-29 |
| Diaphragm changing device Grant 8,089,707 - Bieg , et al. January 3, 2 | 2012-01-03 |
| Optical imaging device having at least one system diaphragm Grant 8,009,343 - Gellrich , et al. August 30, 2 | 2011-08-30 |
| Optical Assembly App 20110181857 - Bieg; Hermann ; et al. | 2011-07-28 |
| Optical assembly Grant 7,929,227 - Bieg , et al. April 19, 2 | 2011-04-19 |
| Optical Aperture Device App 20110063595 - Bieg; Hermann ; et al. | 2011-03-17 |
| Optical Assembly App 20100271607 - Bieg; Hermann ; et al. | 2010-10-28 |
| Optical assembly Grant 7,791,826 - Bieg , et al. September 7, 2 | 2010-09-07 |
| Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements Grant 7,763,870 - Ehm , et al. July 27, 2 | 2010-07-27 |
| Diaphragm Changing Device App 20100134777 - Bieg; Hermann ; et al. | 2010-06-03 |
| Diaphragm changing device Grant 7,684,125 - Bieg , et al. March 23, 2 | 2010-03-23 |
| Imaging Device With Exchangeable Diaphragms And Method Therefor App 20100066990 - Bieg; Hermann ; et al. | 2010-03-18 |
| Optical Imaging Device Having At Least One System Diaphragm App 20090021820 - Gellrich; Bernhard ; et al. | 2009-01-22 |
| Optical System For Radiation In The Euv-wavelength Range And Method For Measuring A Contamination Status Of Euv-reflective Elements App 20080315134 - EHM; Dirk Heinrich ; et al. | 2008-12-25 |
| Optical Assembly App 20080170303 - Bieg; Hermann ; et al. | 2008-07-17 |
| Diaphragm changing device App 20070053076 - Bieg; Hermann ; et al. | 2007-03-08 |
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