Biche; Michael R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Biche; Michael R..The latest application filed is for "sealed robot base system".
- Biche; Michael R. - Union City CA
- Biche; Michael R. - Newark CA
| Patent | Date |
|---|---|
| Sealed Robot Base System App 20150135880 - Zaruba; Petr ; et al. | 2015-05-21 |
| Method of processing a substrate in a photolithography system utilizing a thermal process module Grant 5,935,768 - Biche , et al. August 10, 1 | 1999-08-10 |
| Method and apparatus for curing photoresist Grant 5,766,824 - Batchelder , et al. June 16, 1 | 1998-06-16 |
| Clustered photolithography system Grant 5,651,823 - Parodi , et al. July 29, 1 | 1997-07-29 |
| Cassette input/output unit for semiconductor processing system Grant 5,443,348 - Biche , et al. August 22, 1 | 1995-08-22 |
| Self-contained mobile reprogrammable automation device Grant 4,698,775 - Koch , et al. October 6, 1 | 1987-10-06 |
| Power transfer device Grant 4,654,573 - Rough , et al. March 31, 1 | 1987-03-31 |
| Laser positioning system Grant 4,615,615 - Krolak , et al. October 7, 1 | 1986-10-07 |
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