Biberger; Maximilian Albert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Biberger; Maximilian Albert.The latest application filed is for "high pressure processing chamber for multiple semiconductor substrates".
- Biberger; Maximilian Albert - Palo Alto CA
| Patent | Date |
|---|---|
| Method of supercritical processing of a workpiece Grant 7,060,422 - Biberger , et al. June 13, 2 | 2006-06-13 |
| Method for supercritical processing of multiple workpieces Grant 6,926,012 - Biberger , et al. August 9, 2 | 2005-08-09 |
| Apparatus for supercritical processing of a workpiece Grant 6,926,798 - Biberger , et al. August 9, 2 | 2005-08-09 |
| Apparatus for supercritical processing of multiple workpieces Grant 6,748,960 - Biberger , et al. June 15, 2 | 2004-06-15 |
| Method and apparatus for supercritical processing of multiple workpieces Grant 6,736,149 - Biberger , et al. May 18, 2 | 2004-05-18 |
| High pressure processing chamber for multiple semiconductor substrates App 20040040660 - Biberger, Maximilian Albert ; et al. | 2004-03-04 |
| Apparatus for supercritical processing of a workpiece App 20030150559 - Biberger, Maximilian Albert ; et al. | 2003-08-14 |
| Method of supercritical processing of a workpiece App 20030136514 - Biberger, Maximilian Albert ; et al. | 2003-07-24 |
| Method and apparatus for supercritical processing of multiple workpieces App 20030121534 - Biberger, Maximilian Albert ; et al. | 2003-07-03 |
| Method for supercritical processing of multiple workpieces App 20030121535 - Biberger, Maximilian Albert ; et al. | 2003-07-03 |
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