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Patent applications and USPTO patent grants for Bhatnagar; Ashish.The latest application filed is for "autonomous aircraft local planning to avoid obstructions".
Patent | Date |
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Autonomous Aircraft Local Planning To Avoid Obstructions App 20210318697 - Tehrani; Navid Dadkhah ;   et al. | 2021-10-14 |
Method of Making Carrier Head Membrane With Regions of Different Roughness App 20210245323 - Paik; Young J. ;   et al. | 2021-08-12 |
Carrier head membrane with regions of different roughness Grant 11,007,619 - Paik , et al. May 18, 2 | 2021-05-18 |
Carrier Head Membrane With A Bead App 20200381286 - Paik; Young J. ;   et al. | 2020-12-03 |
Carrier Head Membrane With Regions of Different Roughness App 20190118336 - Paik; Young J. ;   et al. | 2019-04-25 |
Thermal radiation barrier for substrate processing chamber components Grant 10,177,014 - Raj , et al. J | 2019-01-08 |
EMI/RF shielding of thermocouples Grant 10,168,229 - Raj , et al. J | 2019-01-01 |
Carrier head membrane roughness to control polishing rate Grant 10,160,093 - Paik , et al. Dec | 2018-12-25 |
Methods for bonding substrates Grant 10,131,126 - Narendrnath , et al. November 20, 2 | 2018-11-20 |
Life enhancement of ring assembly in semiconductor manufacturing chambers Grant 9,960,019 - Arun , et al. May 1, 2 | 2018-05-01 |
Emi/rf Shielding Of Thermocouples App 20180017447 - RAJ; Govinda ;   et al. | 2018-01-18 |
EMI/RF shielding of thermocouples Grant 9,823,133 - Raj , et al. November 21, 2 | 2017-11-21 |
Carrier Head Membrane With A Bead App 20170243779 - Paik; Young J. ;   et al. | 2017-08-24 |
Methods For Bonding Substrates App 20170173934 - NARENDRNATH; Kadthala Ramaya ;   et al. | 2017-06-22 |
Methods for bonding substrates Grant 9,627,231 - Narendrnath , et al. April 18, 2 | 2017-04-18 |
Surface annealing of components for substrate processing chambers Grant 9,481,608 - Bhatnagar , et al. November 1, 2 | 2016-11-01 |
Retaining ring with attachable segments Grant 9,227,297 - Rahmathullah , et al. January 5, 2 | 2016-01-05 |
Two-part retaining ring with interlock features Grant 9,168,631 - Rahmathullah , et al. October 27, 2 | 2015-10-27 |
Retaining Ring With Attachable Segments App 20140287662 - Rahmathullah; Irfanulla Khuddus ;   et al. | 2014-09-25 |
Life Enhancement Of Ring Assembly In Semiconductor Manufacturing Chambers App 20140238604 - ARUN; Sandhya ;   et al. | 2014-08-28 |
Surface Annealing Of Components For Substrate Processing Chambers App 20140167327 - BHATNAGAR; Ashish ;   et al. | 2014-06-19 |
Thermal Radiation Barrier For Substrate Processing Chamber Components App 20140165915 - RAJ; Govinda ;   et al. | 2014-06-19 |
Life enhancement of ring assembly in semiconductor manufacturing chambers Grant 8,740,206 - Arun , et al. June 3, 2 | 2014-06-03 |
Method and system of culturing an algal mat Grant 8,722,389 - Das , et al. May 13, 2 | 2014-05-13 |
Methods For Bonding Substrates App 20140099485 - NARENDRNATH; Kadthala Ramaya ;   et al. | 2014-04-10 |
Leak proof pad for CMP endpoint detection Grant 8,662,957 - Paik , et al. March 4, 2 | 2014-03-04 |
Localized surface annealing of components for substrate processing chambers Grant 8,617,672 - Bhatnagar , et al. December 31, 2 | 2013-12-31 |
Localized surface annealing of components for substrate processing chambers Grant 08617672 - | 2013-12-31 |
Two-part Retaining Ring With Interlock Features App 20130324017 - Rahmathullah; Irfanulla Khuddus ;   et al. | 2013-12-05 |
Carrier head membrane Grant 8,475,231 - Paik , et al. July 2, 2 | 2013-07-02 |
Measuring flow properties of multiple gas nozzles of a gas distributor Grant 8,464,594 - Narendrnath , et al. June 18, 2 | 2013-06-18 |
Two-Part Plastic Retaining Ring App 20130035022 - Paik; Young J. ;   et al. | 2013-02-07 |
Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity Grant 8,225,927 - Narendrnath , et al. July 24, 2 | 2012-07-24 |
High Efficiency Electrostatic Chuck Assembly For Semiconductor Wafer Processing App 20120154974 - Bhatnagar; Ashish ;   et al. | 2012-06-21 |
Mixotrophic Algae For The Production Of Algae Biofuel Feedstock On Wastewater App 20120028338 - Bhatnagar; Ashish ;   et al. | 2012-02-02 |
High efficiency electro-static chucks for semiconductor wafer processing Grant 8,043,433 - Bhatnagar October 25, 2 | 2011-10-25 |
Measuring Flow Properties Of Multiple Gas Nozzles Of A Gas Distributor App 20110217208 - NARENDRNATH; Kadthala R. ;   et al. | 2011-09-08 |
Life Enhancement Of Ring Assembly In Semiconductor Manufacturing Chambers App 20110180983 - ARUN; SANDHYA ;   et al. | 2011-07-28 |
Component With Enhanced Shelf Life App 20110114519 - NARENDRNATH; KADTHALA R. ;   et al. | 2011-05-19 |
Chemical Mechanical Planarization Pad With Surface Characteristics App 20110105000 - Hu; Yongqi ;   et al. | 2011-05-05 |
Emi/rf Shielding Of Thermocouples App 20110013669 - RAJ; GOVINDA ;   et al. | 2011-01-20 |
Leak Proof Pad For Cmp Endpoint Detection App 20100330879 - Paik; Young J. ;   et al. | 2010-12-30 |
Carrier Head Membrane App 20100311311 - Paik; Young J. ;   et al. | 2010-12-09 |
Microalgae Cultivation In A Wastewater Dominated By Carpet Mill Effluents For Biofuel Applications App 20100267122 - Chinnasamy; Senthil ;   et al. | 2010-10-21 |
Carrier Head Membrane Roughness to Control Polishing Rate App 20100173566 - Paik; Young J. ;   et al. | 2010-07-08 |
Corrosion-resistant aluminum component having multi-layer coating Grant 7,732,056 - Bhatnagar , et al. June 8, 2 | 2010-06-08 |
Cmp Pad Identification And Layer Ratio Modeling App 20090305609 - KHAU; MICHAEL E. ;   et al. | 2009-12-10 |
Pad Properties Using Nanoparticle Additives App 20090278081 - M'Saad; Hichem ;   et al. | 2009-11-12 |
Carrier Head Membrane App 20090242125 - Paik; Young J. ;   et al. | 2009-10-01 |
High Efficiency Electro-static Chucks For Semiconductor Wafer Processing App 20090199765 - BHATNAGAR; ASHISH | 2009-08-13 |
Localized surface annealing of components for substrate processing chambers App 20070014949 - Bhatnagar; Ashish ;   et al. | 2007-01-18 |
Corrosion-resistant aluminum component having multi-layer coating App 20060159940 - Bhatnagar; Ashish ;   et al. | 2006-07-20 |
Cleaning a component of a process chamber Grant 7,045,020 - Bhatnagar , et al. May 16, 2 | 2006-05-16 |
Heated catalytic treatment of an effluent gas from a substrate fabrication process Grant 6,824,748 - Kaushal , et al. November 30, 2 | 2004-11-30 |
Cleaning a component of a process chamber App 20040231706 - Bhatnagar, Ashish ;   et al. | 2004-11-25 |
Treatment of hazardous gases in effluent Grant 6,673,323 - Bhatnagar , et al. January 6, 2 | 2004-01-06 |
Heated catalytic treatment of an effluent gas from a substrate fabrication process App 20020182131 - Kaushal, Tony S. ;   et al. | 2002-12-05 |
Erosion resistant gas energizer Grant 6,391,146 - Bhatnagar , et al. May 21, 2 | 2002-05-21 |
Porous ceramic liner for a plasma source Grant 6,367,412 - Ramaswamy , et al. April 9, 2 | 2002-04-09 |
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