| Patent | Date |
|---|
Multi-controller inspection system
Grant 11,415,526 - Duffy , et al. August 16, 2 | 2022-08-16 |
3d Structure Inspection Or Metrology Using Deep Learning
App 20220043357 - Young; Scott A. ; et al. | 2022-02-10 |
Mode Selection And Defect Detection Training
App 20210366103 - Zhang; Jing ; et al. | 2021-11-25 |
Multi-controller Inspection System
App 20210349038 - Duffy; Brian ; et al. | 2021-11-11 |
Learnable Defect Detection For Semiconductor Applications
App 20200327654 - Zhang; Jing ; et al. | 2020-10-15 |
Active learning for defect classifier training
Grant 10,713,769 - Zhang , et al. | 2020-07-14 |
Generating high resolution images from low resolution images for semiconductor applications
Grant 10,648,924 - Zhang , et al. | 2020-05-12 |
Training a neural network for defect detection in low resolution images
Grant 10,599,951 - Bhaskar , et al. | 2020-03-24 |
Active Learning For Defect Classifier Training
App 20190370955 - Zhang; Jing ; et al. | 2019-12-05 |
Training A Neural Network For Defect Detection In Low Resolution Images
App 20190303717 - Bhaskar; Kris ; et al. | 2019-10-03 |
Virtual inspection systems for process window characterization
Grant 10,402,461 - Karsenti , et al. Sep | 2019-09-03 |
Generating simulated images from input images for semiconductor applications
Grant 10,395,356 - Zhang , et al. A | 2019-08-27 |
Accelerating semiconductor-related computations using learning based models
Grant 10,360,477 - Bhaskar , et al. | 2019-07-23 |
Systems and methods incorporating a neural network and a forward physical model for semiconductor applications
Grant 10,346,740 - Zhang , et al. July 9, 2 | 2019-07-09 |
Single image detection
Grant 10,186,026 - Karsenti , et al. Ja | 2019-01-22 |
Image based specimen process control
Grant 10,181,185 - Park , et al. Ja | 2019-01-15 |
Generating simulated output for a specimen
Grant 10,043,261 - Bhaskar , et al. August 7, 2 | 2018-08-07 |
Generating simulated images from design information
Grant 9,965,901 - Zhang , et al. May 8, 2 | 2018-05-08 |
Diagnostic Systems And Methods For Deep Learning Models Configured For Semiconductor Applications
App 20180107928 - Zhang; Jing ; et al. | 2018-04-19 |
Hybrid inspectors
Grant 9,916,965 - Bhaskar , et al. March 13, 2 | 2018-03-13 |
Systems And Methods Incorporating A Neural Network And A Forward Physical Model For Semiconductor Applications
App 20170351952 - Zhang; Jing ; et al. | 2017-12-07 |
Generating Simulated Images From Input Images For Semiconductor Applications
App 20170345140 - Zhang; Jing ; et al. | 2017-11-30 |
Image Based Specimen Process Control
App 20170200264 - Park; Allen ; et al. | 2017-07-13 |
Generating Simulated Output For A Specimen
App 20170200265 - Bhaskar; Kris ; et al. | 2017-07-13 |
Accelerating Semiconductor-related Computations Using Learning Based Models
App 20170200260 - Bhaskar; Kris ; et al. | 2017-07-13 |
Accelerated Training Of A Machine Learning Based Model For Semiconductor Applications
App 20170193400 - Bhaskar; Kris ; et al. | 2017-07-06 |
Hybrid Inspectors
App 20170194126 - Bhaskar; Kris ; et al. | 2017-07-06 |
Generating High Resolution Images From Low Resolution Images For Semiconductor Applications
App 20170193680 - Zhang; Jing ; et al. | 2017-07-06 |
Generating Simulated Images From Design Information
App 20170148226 - Zhang; Jing ; et al. | 2017-05-25 |
Single Image Detection
App 20170140524 - Karsenti; Laurent ; et al. | 2017-05-18 |
Method and system for universal target based inspection and metrology
Grant 9,576,861 - Park , et al. February 21, 2 | 2017-02-21 |
Detecting defects on a wafer
Grant 9,355,208 - Shifrin , et al. May 31, 2 | 2016-05-31 |
Virtual Inspection Systems for Process Window Characterization
App 20160150191 - Karsenti; Laurent ; et al. | 2016-05-26 |
Inspection recipe setup from reference image variation
Grant 9,262,821 - Shifrin , et al. February 16, 2 | 2016-02-16 |
Acquisition of information for a construction site
Grant 9,222,771 - Rosengaus , et al. December 29, 2 | 2015-12-29 |
Generalized virtual inspector
Grant 9,222,895 - Duffy , et al. December 29, 2 | 2015-12-29 |
Inspection Recipe Setup from Reference Image Variation
App 20150324964 - Shifrin; Eugene ; et al. | 2015-11-12 |
Dark field inspection system with ring illumination
Grant 9,176,072 - Zhao , et al. November 3, 2 | 2015-11-03 |
Methods and Systems for Detecting Repeating Defects on Semiconductor Wafers Using Design Data
App 20150012900 - Shifrin; Eugene ; et al. | 2015-01-08 |
Generalized Virtual Inspector
App 20140241610 - Duffy; Brian ; et al. | 2014-08-28 |
Method and System for Universal Target Based Inspection and Metrology
App 20140199791 - Park; Allen ; et al. | 2014-07-17 |
Acquisition of Information for a Construction Site
App 20130096873 - Rosengaus; Eliezer ; et al. | 2013-04-18 |
Methods and systems for determining a characteristic of a wafer
Grant 8,422,010 - Kirk , et al. April 16, 2 | 2013-04-16 |
Methods and Systems for Determining a Characteristic of a Wafer
App 20130035877 - Kirk; Michael D. ; et al. | 2013-02-07 |
Methods and systems for determining a characteristic of a wafer
Grant 8,284,394 - Kirk , et al. October 9, 2 | 2012-10-09 |
Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer
Grant 8,204,296 - Bhaskar , et al. June 19, 2 | 2012-06-19 |
Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
Grant 8,126,255 - Bhaskar , et al. February 28, 2 | 2012-02-28 |
Dark Field Inspection System With Ring Illumination
App 20110169944 - Zhao; Guoheng ; et al. | 2011-07-14 |
Methods For Generating A Standard Reference Die For Use In A Die To Standard Reference Die Inspection And Methods For Inspecting A Wafer
App 20100329540 - Bhaskar; Kris ; et al. | 2010-12-30 |
Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer
Grant 7,796,804 - Bhaskar , et al. September 14, 2 | 2010-09-14 |
Systems And Methods For Creating Persistent Data For A Wafer And For Using Persistent Data For Inspection-related Functions
App 20090080759 - Bhaskar; Kris ; et al. | 2009-03-26 |
Methods For Generating A Standard Reference Die For Use In A Die To Standard Reference Die Inspection And Methods For Inspecting A Wafer
App 20090041332 - Bhaskar; Kris ; et al. | 2009-02-12 |
Apparatus and methods for analyzing defects on a sample
Grant 7,345,753 - Bhaskar , et al. March 18, 2 | 2008-03-18 |
Methods And Systems For Determining A Characteristic Of A Wafer
App 20080013083 - Kirk; Michael D. ; et al. | 2008-01-17 |
Apparatus and methods for analyzing defects on a sample
App 20060102839 - Bhaskar; Kris ; et al. | 2006-05-18 |
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