| Patent | Date |
|---|
System And Method For Pumping Laser Sustained Plasma With An Illumination Source Having Modified Pupil Power Distribution
App 20220187610 - Bezel; Ilya ; et al. | 2022-06-16 |
System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
Grant 11,262,591 - Bezel , et al. March 1, 2 | 2022-03-01 |
Laser-sustained Plasma Light Source With Gas Vortex Flow
App 20210321508 - Bezel; Ilya ; et al. | 2021-10-14 |
Differential imaging for single-path optical wafer inspection
Grant 11,138,722 - Shchemelinin , et al. October 5, 2 | 2021-10-05 |
System and method for pumping laser sustained plasma with interlaced pulsed illumination sources
Grant 11,121,521 - Bezel , et al. September 14, 2 | 2021-09-14 |
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
App 20210231292 - Bezel; Ilya ; et al. | 2021-07-29 |
Spectrometer for vacuum ultraviolet measurements in high-pressure environment
Grant 11,035,727 - Bezel , et al. June 15, 2 | 2021-06-15 |
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-Containing Laser Sustained Plasma Sources
App 20210120659 - Szilagyi; John ; et al. | 2021-04-22 |
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
Grant 10,976,025 - Bezel , et al. April 13, 2 | 2021-04-13 |
Rotating Lamp For Laser-sustained Plasma Illumination Source
App 20210092826 - Bezel; Ilya ; et al. | 2021-03-25 |
High Efficiency Laser-Sustained Plasma Light Source
App 20210022233 - Derstine; Matthew ; et al. | 2021-01-21 |
High efficiency laser-sustained plasma light source
Grant 10,887,974 - Derstine , et al. January 5, 2 | 2021-01-05 |
Plasma source with lamp house correction
Grant 10,823,943 - Zhang , et al. November 3, 2 | 2020-11-03 |
High power broadband illumination source
Grant 10,806,016 - Khodykin , et al. October 13, 2 | 2020-10-13 |
System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources
App 20200274314 - Bezel; Ilya ; et al. | 2020-08-27 |
Neutral atom imaging system
Grant 10,714,307 - Bezel , et al. | 2020-07-14 |
System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
Grant 10,714,327 - Bezel , et al. | 2020-07-14 |
Differential Imaging For Single-Path Optical Wafer Inspection
App 20200202504 - Shchemelinin; Anatoly ; et al. | 2020-06-25 |
High-power short-pass total internal reflection filter
Grant 10,691,024 - Zhao , et al. | 2020-06-23 |
Laser sustained plasma light source with forced flow through natural convection
Grant 10,690,589 - Bezel , et al. | 2020-06-23 |
System and Method for Pumping Laser Sustained Plasma with an Illumination Source Having Modified Pupil Power Distribution
App 20200150445 - Bezel; Ilya ; et al. | 2020-05-14 |
System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter
Grant 10,616,987 - Zhao , et al. | 2020-04-07 |
System and method for pumping laser sustained plasma with a frequency converted illumination source
Grant 10,568,195 - Bezel , et al. Feb | 2020-02-18 |
Plasma Source with Lamp House Correction
App 20200041774 - Zhang; Shiyu ; et al. | 2020-02-06 |
System and method for separation of pump light and collected light in a laser pumped light source
Grant 10520741 - | 2019-12-31 |
Broadband light source including transparent portion with high hydroxide content
Grant 10,522,340 - Wilson , et al. Dec | 2019-12-31 |
Neutral Atom Imaging System
App 20190378684 - Bezel; Ilya ; et al. | 2019-12-12 |
System and Method for Pumping Laser Sustained Plasma with a Frequency Converted Illumination Source
App 20190373709 - Bezel; Ilya ; et al. | 2019-12-05 |
Nanocrystal-based light source for sample characterization
Grant 10,495,287 - Bezel , et al. De | 2019-12-03 |
Spectrometer for Vacuum Ultraviolet Measurements in High-Pressure Environment
App 20190285470 - Bezel; Ilya ; et al. | 2019-09-19 |
System and Method for Pumping Laser Sustained Plasma and Enhancing Selected Wavelengths of Output Illumination
App 20190287785 - Bezel; Ilya ; et al. | 2019-09-19 |
Continuous-wave laser-sustained plasma illumination source
Grant 10,381,216 - Bezel , et al. A | 2019-08-13 |
High-Power Short-Pass Total Internal Reflection Filter
App 20190235390 - Zhao; Wei ; et al. | 2019-08-01 |
Laser sustained plasma light source with graded absorption features
Grant 10,283,342 - Bezel , et al. | 2019-05-07 |
Continuous-Wave Laser-Sustained Plasma Illumination Source
App 20190115203 - Bezel; Ilya ; et al. | 2019-04-18 |
System and method for laser-sustained plasma illumination
Grant 10,257,918 - Chimmalgi , et al. | 2019-04-09 |
System and method for electrodeless plasma ignition in laser-sustained plasma light source
Grant 10,244,613 - Chimmalgi , et al. | 2019-03-26 |
Continuous-wave laser-sustained plasma illumination source
Grant 10,217,625 - Bezel , et al. Feb | 2019-02-26 |
Systems for providing illumination in optical metrology
Grant 10,203,247 - Brady , et al. Feb | 2019-02-12 |
High Power Broadband Illumination Source
App 20190037676 - Khodykin; Oleg ; et al. | 2019-01-31 |
Laser Sustained Plasma Light Source with Forced Flow Through Natural Convection
App 20190033204 - Bezel; Ilya ; et al. | 2019-01-31 |
Non-contact thermal measurements of VUV optics
Grant 10,139,283 - Shchemelinin , et al. Nov | 2018-11-27 |
Broadband Light Source Including Transparent Portion with High Hydroxide Content
App 20180330937 - Wilson; Lauren ; et al. | 2018-11-15 |
Broadband light source including transparent portion with high hydroxide content
Grant 10,032,620 - Wilson , et al. July 24, 2 | 2018-07-24 |
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
App 20180172240 - Bezel; Ilya ; et al. | 2018-06-21 |
High power broadband light source
Grant 9,941,655 - Chimmalgi , et al. April 10, 2 | 2018-04-10 |
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
Grant 9,927,094 - Bezel , et al. March 27, 2 | 2018-03-27 |
System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
Grant 9,899,205 - Bezel , et al. February 20, 2 | 2018-02-20 |
Method and system for controlling convective flow in a light-sustained plasma
Grant 9,887,076 - Bezel , et al. February 6, 2 | 2018-02-06 |
System and Method for Inhibiting VUV Radiative Emission of a Laser-Sustained Plasma Source
App 20170345639 - Bezel; Ilya ; et al. | 2017-11-30 |
System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source
App 20170315369 - Shchemelinin; Anatoly ; et al. | 2017-11-02 |
Method and system for generating a light-sustained plasma in a flanged transmission element
Grant 9,775,226 - Bezel , et al. September 26, 2 | 2017-09-26 |
Sub 200nm laser pumped homonuclear excimer lasers
Grant 9,735,534 - Solarz , et al. August 15, 2 | 2017-08-15 |
System and method for separation of pump light and collected light in a laser pumped light source
Grant 9,709,811 - Shchemelinin , et al. July 18, 2 | 2017-07-18 |
Laser Sustained Plasma Light Source with Graded Absorption Features
App 20170164457 - Bezel; Ilya ; et al. | 2017-06-08 |
Non-Contact Thermal Measurements of VUV Optics
App 20170153145 - Shchemelinin; Anatoly ; et al. | 2017-06-01 |
System and Method for Electrodeless Plasma Ignition in Laser-Sustained Plasma Light Source
App 20170150590 - Chimmalgi; Anant ; et al. | 2017-05-25 |
Systems for Providing Illumination in Optical Metrology
App 20170146399 - Brady; Gregory R. ; et al. | 2017-05-25 |
Method and system for controlling convection within a plasma cell
Grant 9,655,225 - Bezel , et al. May 16, 2 | 2017-05-16 |
System and method for inhibiting radiative emission of a laser-sustained plasma source
Grant 9,615,439 - Bezel , et al. April 4, 2 | 2017-04-04 |
System and Method for Laser-Sustained Plasma Illumination
App 20170094765 - Chimmalgi; Anant ; et al. | 2017-03-30 |
System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter
App 20170059490 - Zhao; Wei ; et al. | 2017-03-02 |
System and method for imaging a sample with a laser sustained plasma illumination output
Grant 9,558,858 - Shortt , et al. January 31, 2 | 2017-01-31 |
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
Grant 9,534,848 - Wang , et al. January 3, 2 | 2017-01-03 |
High Efficiency Laser-Sustained Plasma Light Source
App 20160381776 - Derstine; Matthew ; et al. | 2016-12-29 |
Light source with nanostructured antireflection layer
Grant 9,530,636 - Oh , et al. December 27, 2 | 2016-12-27 |
Laser-sustained plasma light source
Grant 9,526,158 - Bezel , et al. December 20, 2 | 2016-12-20 |
Laser-sustained plasma light source
Grant 9,516,733 - Bezel , et al. December 6, 2 | 2016-12-06 |
Systems for providing illumination in optical metrology
Grant 9,512,985 - Brady , et al. December 6, 2 | 2016-12-06 |
Method and System for Controlling Convective Flow in a Light-Sustained Plasma
App 20160322211 - Bezel; Ilya ; et al. | 2016-11-03 |
Continuous-Wave Laser-Sustained Plasma Illumination Source
App 20160268120 - Bezel; Ilya ; et al. | 2016-09-15 |
Plasma cell with floating flange
Grant 9,433,070 - Bezel , et al. August 30, 2 | 2016-08-30 |
System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source
App 20160205758 - Bezel; Ilya ; et al. | 2016-07-14 |
Method and system for controlling convective flow in a light-sustained plasma
Grant 9,390,902 - Bezel , et al. July 12, 2 | 2016-07-12 |
Laser sustained plasma light source with electrically induced gas flow
Grant 9,390,892 - Shchemelinin , et al. July 12, 2 | 2016-07-12 |
Open Plasma Lamp for Forming a Light-Sustained Plasma
App 20160163516 - Wilson; Lauren ; et al. | 2016-06-09 |
Plasma cell for laser-sustained plasma light source
Grant 9,318,311 - Chimmalgi , et al. April 19, 2 | 2016-04-19 |
Method and System for Controlling Convection within a Plasma Cell
App 20160066402 - Bezel; Ilya ; et al. | 2016-03-03 |
Open plasma lamp for forming a light-sustained plasma
Grant 9,263,238 - Wilson , et al. February 16, 2 | 2016-02-16 |
Gas refraction compensation for laser-sustained plasma bulbs
Grant 9,232,622 - Bezel , et al. January 5, 2 | 2016-01-05 |
Broadband Light Source Including Transparent Portion with High Hydroxide Content
App 20150357179 - Wilson; Lauren ; et al. | 2015-12-10 |
High Power Broadband Light Source
App 20150333471 - Chimmalgi; Anant ; et al. | 2015-11-19 |
Method and system for controlling convection within a plasma cell
Grant 9,185,788 - Bezel , et al. November 10, 2 | 2015-11-10 |
Open Plasma Lamp for Forming a Light-Sustained Plasma
App 20150279628 - Wilson; Lauren ; et al. | 2015-10-01 |
System and Method for Transverse Pumping of Laser-Sustained Plasma
App 20150282288 - Bezel; Ilya ; et al. | 2015-10-01 |
Light Source with Nanostructured Antireflection Layer
App 20150271905 - Oh; Sebaek ; et al. | 2015-09-24 |
Adaptive optics for compensating aberrations in light-sustained plasma cells
Grant 9,097,577 - Bezel , et al. August 4, 2 | 2015-08-04 |
Laser-sustained plasma light source
Grant 9,099,292 - Bezel , et al. August 4, 2 | 2015-08-04 |
Plasma Cell with Floating Flange
App 20150201483 - Bezel; Ilya ; et al. | 2015-07-16 |
System and Method for Separation of Pump Light and Collected Light in a Laser Pumped Light Source
App 20150049778 - Shchemelinin; Anatoly ; et al. | 2015-02-19 |
System and Method for Imaging a Sample with a Laser Sustained Plasma Illumination Output
App 20150048741 - Shortt; David W. ; et al. | 2015-02-19 |
Method and System for Controlling Convection within a Plasma Cell
App 20150034838 - Bezel; Ilya ; et al. | 2015-02-05 |
Gas Refraction Compensation For Laser-sustained Plasma Bulbs
App 20140367592 - Bezel; Ilya ; et al. | 2014-12-18 |
Gas refraction compensation for laser-sustained plasma bulbs
Grant 8,853,655 - Bezel , et al. October 7, 2 | 2014-10-07 |
Method and System for Controlling Convective Flow in a Light-Sustained Plasma
App 20140291546 - Bezel; Ilya ; et al. | 2014-10-02 |
Gas Refraction Compensation For Laser-sustained Plasma Bulbs
App 20140239202 - Bezel; Ilya ; et al. | 2014-08-28 |
Systems for Providing Illumination in Optical Metrology
App 20140240951 - Brady; Gregory R. ; et al. | 2014-08-28 |
Laser sustained plasma bulb including water
Grant 8,796,652 - Bezel , et al. August 5, 2 | 2014-08-05 |
Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures
App 20140060792 - Wang; Jincheng ; et al. | 2014-03-06 |
Optically pumping to sustain plasma
Grant 8,658,967 - Bezel , et al. February 25, 2 | 2014-02-25 |
Laser Sustained Plasma Bulb Including Water
App 20140042336 - Bezel; Ilya ; et al. | 2014-02-13 |
Laser Sustained Plasma Light Source With Electrically Induced Gas Flow
App 20130342105 - Shchemelinin; Anatoly ; et al. | 2013-12-26 |
Full numerical aperture pump of laser-sustained plasma
Grant 8,517,585 - Bezel , et al. August 27, 2 | 2013-08-27 |
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
App 20130181595 - Bezel; Ilya ; et al. | 2013-07-18 |
Plasma Cell For Laser-sustained Plasma Light Source
App 20130106275 - Chimmalgi; Anant ; et al. | 2013-05-02 |
Optically Pumping To Sustain Plasma
App 20130001438 - Bezel; Ilya ; et al. | 2013-01-03 |
Adaptive Optics For Compensating Aberrations In Light-sustained Plasma Cells
App 20130003384 - Bezel; Ilya ; et al. | 2013-01-03 |
Initiating laser-sustained plasma
Grant 8,259,771 - Shchemelinin , et al. September 4, 2 | 2012-09-04 |
Pulse stretcher
Grant 7,804,866 - Shchemelinin , et al. September 28, 2 | 2010-09-28 |
| 