BEVIS; Christopher F.

Patent Applications and Registrations

Patent applications and USPTO patent grants for BEVIS; Christopher F..The latest application filed is for "mass spectrometer detector and system and method using the same".

Company Profile

1.55.39

BEVIS; Christopher F. - Los Gatos CA
Bevis; Christopher F. - Mountain View CA
Bevis; Christopher F - Los Gatos CA
Bevis; Christopher F. - San Francisco CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mass Spectrometer Detector And System And Method Using The Same App 20220223395 - BEVIS; Christopher F. ; et al.	2022-07-14
Mass spectrometer detector and system and method using the same Grant 11,183,377 - Bevis , et al. November 23, 2	2021-11-23
Mass Spectrometer Detector And System And Method Using The Same App 20200066502 - BEVIS; Christopher F. ; et al.	2020-02-27
Apparatus and methods for aberration correction in electron beam based system Grant 9,607,802 - Bevis March 28, 2	2017-03-28
Apparatus And Methods For Aberration Correction In Electron Beam Based System App 20160172151 - BEVIS; Christopher F.	2016-06-16
Apparatus and methods for aberration correction in electron beam based system Grant 8,933,425 - Bevis January 13, 2	2015-01-13
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool Grant 8,831,767 - Lehman , et al. September 9, 2	2014-09-09
Apparatus and methods for electron beam detection Grant 8,692,204 - Kojima , et al. April 8, 2	2014-04-08
Methods and systems for determining a characteristic of a wafer Grant 8,422,010 - Kirk , et al. April 16, 2	2013-04-16
Methods and Systems for Determining a Characteristic of a Wafer App 20130035877 - Kirk; Michael D. ; et al.	2013-02-07
Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz Range App 20120281275 - Levy; Ady ; et al.	2012-11-08
Apparatus And Methods For Electron Beam Detection App 20120273686 - KOJIMA; Shinichi ; et al.	2012-11-01
Methods and systems for determining a characteristic of a wafer Grant 8,284,394 - Kirk , et al. October 9, 2	2012-10-09
Apparatus And Methods For Pattern Generation App 20120085919 - KOJIMA; Shinichi ; et al.	2012-04-12
Methods And Systems For Monitoring A Parameter Of A Measurement Device During Polishing, Damage To A Specimen During Polishing, Or A Characteristic Of A Polishing Pad Or Tool App 20110313558 - Lehman; Kurt ; et al.	2011-12-22
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool Grant 8,010,222 - Lehman , et al. August 30, 2	2011-08-30
Scatterometry target employing non-periodic defect features to enhance or optimize target sensitivity to a parameter of interest Grant 7,940,386 - Bevis May 10, 2	2011-05-10
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,933,016 - Mieher , et al. April 26, 2	2011-04-26
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout Grant 7,873,504 - Bevis January 18, 2	2011-01-18
Optical measurment systems and methods Grant 7,847,937 - Bevis December 7, 2	2010-12-07
Methods And Systems For Controlling Variation In Dimensions Of Patterned Features Across A Wafer App 20100279213 - Levy; Ady ; et al.	2010-11-04
Scatterometry target and method Grant 7,808,638 - Bevis October 5, 2	2010-10-05
Systems And Methods For Determining One Or More Characteristics Of A Specimen Using Radiation In The Terahertz Range App 20100235114 - Levy; Ady ; et al.	2010-09-16
Systems and methods for near-field heterodyne spectroscopy Grant 7,760,364 - Zhuang , et al. July 20, 2	2010-07-20
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20100091284 - Mieher; Walter D. ; et al.	2010-04-15
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,663,753 - Mieher , et al. February 16, 2	2010-02-16
Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool Grant 7,663,746 - Sullivan , et al. February 16, 2	2010-02-16
Electrical test method and apparatus Grant 7,659,126 - Smith , et al. February 9, 2	2010-02-09
Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools Grant 7,557,921 - Adel , et al. July 7, 2	2009-07-07
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface Grant 7,505,619 - Mapoles , et al. March 17, 2	2009-03-17
Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool App 20090040514 - Sullivan; Paul J. ; et al.	2009-02-12
Scatterometry Target And Method App 20090015821 - Bevis; Christopher F.	2009-01-15
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 7,436,506 - Sullivan , et al. October 14, 2	2008-10-14
Methods and systems for analyzing a specimen using atomic force microscopy profiling in combination with an optical technique Grant 7,430,898 - Weber-Grabau , et al. October 7, 2	2008-10-07
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,433,040 - Mieher , et al. October 7, 2	2008-10-07
Atomic force microscope Grant 7,423,264 - Bevis , et al. September 9, 2	2008-09-09
Methods And Systems For Monitoring A Parameter Of A Measurement Device During Polishing, Damage To A Specimen During Polishing, Or A Characteristic Of A Polishing Pad Or Tool App 20080207089 - Lehman; Kurt ; et al.	2008-08-28
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,385,699 - Mieher , et al. June 10, 2	2008-06-10
In plane drift compensation Grant 7,381,975 - Young , et al. June 3, 2	2008-06-03
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,379,183 - Mieher , et al. May 27, 2	2008-05-27
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080094630 - Mieher; Walter D. ; et al.	2008-04-24
Calibration standards and methods Grant 7,361,941 - Lorusso , et al. April 22, 2	2008-04-22
Methods and systems for optical and non-optical measurements of a substrate Grant 7,355,709 - Bevis , et al. April 8, 2	2008-04-08
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool Grant 7,332,438 - Lehman , et al. February 19, 2	2008-02-19
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080024766 - Mieher; Walter D. ; et al.	2008-01-31
Methods And Systems For Determining A Characteristic Of A Wafer App 20080013083 - Kirk; Michael D. ; et al.	2008-01-17
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,317,531 - Mieher , et al. January 8, 2	2008-01-08
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,301,634 - Mieher , et al. November 27, 2	2007-11-27
Driven inspection or measurement Grant 7,269,816 - Bevis September 11, 2	2007-09-11
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,242,477 - Mieher , et al. July 10, 2	2007-07-10
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface App 20070081154 - Mapoles; Evan R. ; et al.	2007-04-12
Darkfield inspection system having a programmable light selection array Grant 7,199,874 - Bevis , et al. April 3, 2	2007-04-03
Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device Grant 7,175,503 - Lehman , et al. February 13, 2	2007-02-13
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20060232770 - Sullivan; Paul J. ; et al.	2006-10-19
Surface inspection system and method for using photo detector array to detect defects in inspection surface Grant 7,106,432 - Mapoles , et al. September 12, 2	2006-09-12
Methods and systems for detecting a presence of blobs on a specimen during a polishing process App 20060148383 - Lehman; Kurt ; et al.	2006-07-06
Methods and systems for controlling variation in dimensions of patterned features across a wafer App 20060141376 - Levy; Ady ; et al.	2006-06-29
Systems for inspection of patterned or unpatterned wafers and other specimen Grant 7,068,363 - Bevis , et al. June 27, 2	2006-06-27
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool App 20060131273 - Lehman; Kurt ; et al.	2006-06-22
Darkfield inspection system having photodetector array Grant 7,061,598 - Bevis , et al. June 13, 2	2006-06-13
Methods and systems for detecting a presence of blobs on a specimen during a polishing process Grant 7,052,369 - Lehman , et al. May 30, 2	2006-05-30
Darkfield inspection system having a programmable light selection array App 20060082767 - Bevis; Christopher F. ; et al.	2006-04-20
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool Grant 7,030,018 - Lehman , et al. April 18, 2	2006-04-18
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 7,009,696 - Sullivan , et al. March 7, 2	2006-03-07
Darkfield inspection system having a programmable light selection array Grant 7,002,677 - Bevis , et al. February 21, 2	2006-02-21
Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing Grant 6,935,922 - Lehman , et al. August 30, 2	2005-08-30
Driven inspection or measurement App 20050160394 - Bevis, Christopher F.	2005-07-21
Design driven inspection or measurement for semiconductor using recipe Grant 6,886,153 - Bevis April 26, 2	2005-04-26
Systems and methods for characterizing a polishing process Grant 6,884,146 - Lehman , et al. April 26, 2	2005-04-26
Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad Grant 6,866,559 - Lehman , et al. March 15, 2	2005-03-15
Darkfield inspection system having a programmable light selection array App 20050018179 - Bevis, Christopher F. ; et al.	2005-01-27
Systems for inspection of patterned or unpatterned wafers and other specimen App 20040246476 - Bevis, Christopher F. ; et al.	2004-12-09
Apparatus and methods for detecting overlay errors using scatterometry App 20040233442 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233440 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233444 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233441 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and method for detecting overlay errors using scatterometry App 20040169861 - Mieher, Walter D. ; et al.	2004-09-02
Critical dimension scanning electron microscope Grant 6,770,868 - Bevis , et al. August 3, 2	2004-08-03
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20040145733 - Sullivan, Paul J. ; et al.	2004-07-29
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 6,686,996 - Sullivan , et al. February 3, 2	2004-02-03
Methods and systems for detecting a presence of blobs on a specimen during a polishing process App 20030190864 - Lehman, Kurt ; et al.	2003-10-09
Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing App 20030181132 - Lehman, Kurt ; et al.	2003-09-25
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool App 20030180973 - Lehman, Kurt ; et al.	2003-09-25
Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device App 20030181138 - Lehman, Kurt ; et al.	2003-09-25
Systems and methods for characterizing a polishing process App 20030181131 - Lehman, Kurt ; et al.	2003-09-25
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20020154296 - Sullivan, Paul J. ; et al.	2002-10-24
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 6,414,752 - Sullivan , et al. July 2, 2	2002-07-02
Surface scanner with thin film gauge Grant 5,416,594 - Gross , et al. May 16, 1	1995-05-16
Thin film thickness monitor Grant 5,241,366 - Bevis , et al. August 31, 1	1993-08-31