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Patent applications and USPTO patent grants for Bettencourt; Gregory R..The latest application filed is for "ductile mode drilling methods for brittle components of plasma processing apparatuses".
Patent | Date |
---|---|
Ductile mode drilling methods for brittle components of plasma processing apparatuses Grant 9,314,854 - Huang , et al. April 19, 2 | 2016-04-19 |
Clamped monolithic showerhead electrode Grant 8,796,153 - Patrick , et al. August 5, 2 | 2014-08-05 |
Ductile Mode Drilling Methods For Brittle Components Of Plasma Processing Apparatuses App 20140213061 - Huang; Lihua Li ;   et al. | 2014-07-31 |
Clamped Monolithic Showerhead Electrode App 20130337654 - Patrick; Roger ;   et al. | 2013-12-19 |
Gasket with positioning feature for clamped monolithic showerhead electrode Grant 8,536,071 - Bettencourt , et al. September 17, 2 | 2013-09-17 |
Cam-locked showerhead electrode and assembly Grant 8,470,127 - de la Llera , et al. June 25, 2 | 2013-06-25 |
Clamped monolithic showerhead electrode Grant 8,419,959 - Bettencourt , et al. April 16, 2 | 2013-04-16 |
Clamped monolithic showerhead electrode Grant 8,414,719 - Patrick , et al. April 9, 2 | 2013-04-09 |
Gasket With Positioning Feature For Clamped Monolithic Showerhead Electrode App 20130034967 - Bettencourt; Gregory R. ;   et al. | 2013-02-07 |
Clamped Monolithic Showerhead Electrode App 20120258603 - Patrick; Roger ;   et al. | 2012-10-11 |
Gasket with positioning feature for clamped monolithic showerhead electrode Grant 8,272,346 - Bettencourt , et al. September 25, 2 | 2012-09-25 |
Clamped monolithic showerhead electrode Grant 8,221,582 - Patrick , et al. July 17, 2 | 2012-07-17 |
Cam-locked Showerhead Electrode And Assembly App 20120175062 - de la Llera; Anthony ;   et al. | 2012-07-12 |
Hot edge ring with sloped upper surface Grant 8,084,375 - Koshiishi , et al. December 27, 2 | 2011-12-27 |
Hot Edge Ring With Sloped Upper Surface App 20110104884 - Koshiishi; Akira ;   et al. | 2011-05-05 |
Clamped Monolithic Showerhead Electrode App 20110070740 - Bettencourt; Gregory R. ;   et al. | 2011-03-24 |
Gasket With Positioning Feature For Clamped Monolithic Showerhead Electrode App 20100261354 - BETTENCOURT; GREGORY R. ;   et al. | 2010-10-14 |
Clamped monolithic showerhead electrode App 20100003829 - Patrick; Roger ;   et al. | 2010-01-07 |
Substrate holding and spinning assembly and methods for making the same Grant 7,226,055 - Bettencourt , et al. June 5, 2 | 2007-06-05 |
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